{"id":9601,"date":"2022-09-05T20:25:20","date_gmt":"2022-09-05T12:25:20","guid":{"rendered":"http:\/\/www.szryc.com\/?p=9601"},"modified":"2022-09-05T20:25:20","modified_gmt":"2022-09-05T12:25:20","slug":"%e5%8f%b0%e7%a7%af%e7%94%b5%e5%bc%95%e9%a2%861nm%e7%a0%94%e5%8f%91-%e5%85%89%e5%88%bb%e6%9c%ba%e6%88%90%e4%b8%ba%e5%85%b3%e9%94%ae","status":"publish","type":"post","link":"http:\/\/www.szryc.com\/?p=9601","title":{"rendered":"\u53f0\u79ef\u7535\u5f15\u98861nm\u7814\u53d1 \u5149\u523b\u673a\u6210\u4e3a\u5173\u952e"},"content":{"rendered":"
3nm\u5236\u7a0b\u82af\u7247\u5df2\u7ecf\u5f00\u59cb\u91cf\u4ea7\uff0c2nm\u5c06\u4e8e2025\u5e74\u8bd5\u4ea7\uff0c\u63a5\u4e0b\u6765\u76841nm\u5c06\u662f\u7eb3\u7c73\u65f6\u4ee3\u7684\u6700\u540e\u4e00\u4e2a\u8282\u70b9\uff0c\u4e3a\u6b64\uff0c\u4e1a\u754c\u9f99\u5934\u4f01\u4e1a\u548c\u673a\u6784\u90fd\u5728\u6469\u62f3\u64e6\u638c\u3002<\/strong><\/p>\n \u4f5c\u8005\uff1a\u7545\u79cb<\/p>\n 2022\u5e74\uff0c\u534a\u5bfc\u4f53<\/u>\u4e1a\u8fdb\u5165\u4e863nm\u5236\u7a0b\u91cf\u4ea7\u9636\u6bb5\uff0c\u4e0a\u534a\u5e74\uff0c\u4e09\u661f<\/u>\u5ba3\u5e03\u91cf\u4ea73nm\u82af\u7247\uff0c\u4f46\u5ba2\u6237\u548c\u4ea7\u91cf\u5f88\u6709\u9650\uff0c\u4e0b\u534a\u5e74\uff0c\u53f0\u79ef\u7535\u4e5f\u5f00\u59cb\u91cf\u4ea73nm\u82af\u7247\uff0c\u4f46\u4e5f\u53ea\u9650\u4e8e\u82f9\u679c\u7684\u4e00\u90e8\u5206\u65b0\u624b\u673a\u5904\u7406\u5668\uff0c\u4e0e\u4e09\u661f\u7c7b\u4f3c\uff0c\u53f0\u79ef\u7535\u4e5f\u6ca1\u6709\u5728\u7b2c\u4e00\u5e74\u5b9e\u73b0\u5927\u89c4\u6a21\u91cf\u4ea7\u30023nm\u5236\u7a0b\u82af\u7247\u4ea7\u91cf\u5982\u4f55\uff0c\u5c31\u8981\u770b\u4e09\u661f\u548c\u53f0\u79ef\u75352023\u5e74\u5347\u7ea7\u7248\u672c\u7684\u6027\u80fd\u548c\u826f\u7387\u8868\u73b0\u4e86\u3002<\/p>\n 3nm\u91cf\u4ea7\u5982\u6b64\u8270\u96be\uff0c\u63a5\u4e0b\u6765\u76842nm\u30011nm\u8282\u70b9\u5c06\u66f4\u5177\u6311\u6218\u6027\uff0c\u7279\u522b\u662f1nm\uff0c\u5b83\u8fbe\u5230\u4e86\u7eb3\u7c73\u7ea7\u5236\u7a0b\u8282\u70b9\u7684\u6781\u9650\uff0c\u518d\u5411\u524d\u6f14\u8fdb\uff0c\u5c31\u662f\u57c3\uff08A\uff0c1nm=10A\uff09\u4e86\u3002\u56e0\u6b64\uff0c\u8c01\u80fd\u505a\u597d1nm\u5236\u7a0b\u5de5\u827a\u7684\u7814\u53d1\u548c\u91cf\u4ea7\uff0c\u5e76\u5728\u4e1a\u754c\u9996\u5148\u63a8\u51fa\uff0c\u5c06\u5177\u6709\u5f88\u5f3a\u7684\u8c61\u5f81\u610f\u4e49\u3002<\/p>\n \u6309\u7167IMEC\uff08\u6bd4\u5229\u65f6\u5fae\u7535\u5b50\u4e2d\u5fc3<\/u>\uff09\u89c4\u5212\u7684\u53d1\u5c55\u8def\u7ebf\u56fe\uff0c\u9884\u8ba12028\u5e74\u53ef\u5b9e\u73b01nm\u5236\u7a0b\u5de5\u827a\u91cf\u4ea7\uff0c2030\u5e74\u662fA7\uff080.7nm\uff09\uff0c\u4e4b\u540e\u5206\u522b\u662fA5\u3001A3\u3001A2\u5236\u7a0b\u3002<\/p>\n <\/p>\n \u4e0d\u8fc7\uff0c\u771f\u6b63\u51b3\u5b9a\u5de5\u827a\u5bc6\u5ea6\u7684\u91d1\u5c5e\u6805\u6781\u8ddd\u6307\u6807\u53d8\u5316\u6ca1\u6709\u5de5\u827a\u6570\u5b57\u90a3\u4e48\u5927\uff0c\u751a\u81f3A7\u5230A2\u5236\u7a0b\u5de5\u827a\u90fd\u662f\u572816nm-12nm\u4e4b\u95f4\uff0c\u5bc6\u5ea6\u53ef\u80fd\u6ca1\u592a\u591a\u63d0\u5347\u3002\u800c\u4e14\uff0c\u5230\u8fbe1nm\u8282\u70b9\u9644\u8fd1\u65f6\uff0c\u6240\u4ea7\u751f\u7684\u91cf\u5b50\u96a7\u7a7f\u6548\u5e94\u6709\u53ef\u80fd\u8ba9\u4f20\u7edf\u7684\u534a\u5bfc\u4f53\u5de5\u827a\u5931\u6548\u3002<\/p>\n \u6b64\u5916\uff0c\u8981\u5b9e\u73b01nm\u53ca\u4ee5\u4e0b\u5236\u7a0b\u5de5\u827a\uff0c\u6676\u4f53\u7ba1<\/u>\u67b6\u6784\u4e5f\u8981\u6539\u53d8\uff0c\u4e09\u661f\u548c\u53f0\u79ef\u7535\u5206\u522b\u57283nm\u30012nm\u8282\u70b9\u653e\u5f03\u4e86FinFET\uff0c\u8f6c\u5411GAAFE<\/u>T\u7ed3\u6784\uff0c\u800c1nm\u4e4b\u540e\uff0c\u4e1a\u754c\u5c06\u666e\u904d\u8f6c\u5411CFET\u6676\u4f53<\/u>\u7ba1\u7ed3\u6784\u3002\u4e0d\u6b62\u6676\u4f53\u7ba1\uff0c\u8fd8\u6709\u5176\u5b83\u76f8\u5173\u6280\u672f\u4e5f\u8981\u5347\u7ea7\uff0c\u4f8b\u5982\u5e03\u7ebf<\/u>\u3001\u5149\u523b\u673a\u7b49\uff0c\u9700\u8981\u4e00\u7cfb\u5217\u6280\u672f\u7a81\u7834\u624d\u6709\u53ef\u80fd\u5b9e\u73b0\u3002<\/p>\n \u65b0\u6676\u4f53\u7ba1\u67b6\u6784<\/strong><\/p>\n \u4e09\u661f3nm\u91c7\u7528\u7684\u6676\u4f53\u7ba1\u67b6\u6784\u662fGAAFET\uff0c\u4e5f\u88ab\u79f0\u4e3aNanosheet\uff0c\u800c1nm\u5236\u7a0b\u5bf9\u6676\u4f53\u7ba1\u67b6\u6784\u63d0\u51fa\u4e86\u66f4\u9ad8\u7684\u8981\u6c42\u3002IMEC\u63d0\u51fa\u4e86Forksheet\uff0c\u5728\u8fd9\u79cd\u67b6\u6784\u4e2d\uff0csheet\u7531\u53c9\u5f62\u6805\u6781\u7ed3\u6784\u63a7\u5236\uff0c\u5728\u6805\u6781\u56fe\u6848\u5316\u4e4b\u524d\uff0c\u901a\u8fc7\u5728PMOS\u548cNMOS\u4e4b\u95f4\u5f15\u5165\u4ecb\u7535\u5c42\u6765\u5b9e\u73b0\uff0c\u8fd9\u4e2a\u4ecb\u7535\u5c42\u4ece\u7269\u7406\u4e0a\u9694\u79bb\u4e86P\u6805\u6c9f\u69fd\u548cN\u6805\u6c9f\u69fd\uff0c\u4f7f\u5f97N-to-P\u95f4\u8ddd\u6bd4FinFET\u6216Nanosheet\u66f4\u7d27\u5bc6\u3002\u901a\u8fc7\u4eff\u771f\uff0cIMEC\u9884\u8ba1Forksheet\u5177\u6709\u7406\u60f3\u7684\u9762\u79ef\u548c\u6027\u80fd\u5fae\u7f29\u6027\uff0c\u4ee5\u53ca\u66f4\u4f4e\u7684\u5bc4\u751f\u7535\u5bb9\u3002<\/p>\n \u6b64\u5916\uff0c3D\u201c\u4e92\u8865FET\u201d\uff08CFET\uff09\u4e5f\u662f1nm\u5236\u7a0b\u7684\u6676\u4f53\u7ba1\u65b9\u6848\u3002CFET\u6280\u672f\u7684\u4e00\u4e2a\u663e\u7740\u7279\u5f81\u662f\u4e0e\u7eb3\u7c73\u7247\u62d3\u6251\u7ed3\u6784\u5177\u6709\u5f88\u5f3a\u7684\u76f8\u4f3c\u6027\u3002CFET\u7684\u65b0\u9896\u4e4b\u5904\u5728\u4e8ePFET\u548cNFET\u7eb3\u7c73\u7247\u7684\u5782\u76f4\u653e\u7f6e\u3002CFET\u62d3\u6251\u5229\u7528\u4e86\u5178\u578b\u7684CMOS\u903b\u8f91\u5e94\u7528\uff0c\u5176\u4e2d\u5c06\u516c\u5171\u8f93\u5165\u4fe1\u53f7\u65bd\u52a0\u5230NFET\u548cPFET\u7684\u6805\u6781\u3002<\/p>\n <\/p>\n CFET\u67b6\u6784\u9700\u8981\u7279\u522b\u6ce8\u610fPFET\u548cNFET\u7684\u5f62\u6210\u3002\u7528\u4e8ePFET\u6e90\/\u6f0f\u6781\u7684SiGe\u5916\u5ef6\u751f\u957f\u7528\u4e8e\u5728\u6c9f\u9053\u4e2d\u5f15\u5165\u538b\u7f29\u5e94\u53d8\uff0c\u4ee5\u63d0\u9ad8\u7a7a\u7a74\u8fc1\u79fb\u7387\uff0c\u7136\u540e\u6267\u884cPFET\u6805\u6781\u6c27\u5316<\/u>\u7269\u548c\u91d1\u5c5e\u6805\u6781\u6c89\u79ef\uff0c\u968f\u540e\uff0cNFET\u6e90\u6781\/\u6f0f\u6781\u8282\u70b9\u7684\u5916\u5ef6Si\u751f\u957f\uff0c\u968f\u540e\u7684\u6805\u6781\u6c27\u5316\u7269\u548c\u91d1\u5c5e\u6805\u6781\u6c89\u79ef\u5fc5\u987b\u9075\u5b88\u73b0\u6709PFET\u5668\u4ef6\u65bd\u52a0\u7684\u6750\u6599\u5316\u5b66\u7ea6\u675f\u3002<\/p>\n \u65b0\u6750\u6599\u5de5\u827a<\/strong><\/p>\n \u5728\u5148\u8fdb\u5236\u7a0b\u82af\u7247\u7684\u5236\u9020\u8fc7\u7a0b\u4e2d\uff0c\u524d\u9053\u5de5\u5e8f\u8d1f\u8d23\u5236\u9020\u51fa\u76f8\u5e94\u7ed3\u6784\u7684\u6676\u4f53\u7ba1\uff0c\u800c\u4e2d\u95f4\u5de5\u5e8f\u548c\u540e\u9053\u5de5\u5e8f\u5219\u662f\u5c06\u8fd9\u4e9b\u72ec\u7acb\u7684\u6676\u4f53\u7ba1\u8fde\u63a5\u8d77\u6765\uff0c\u4ece\u800c\u5b9e\u73b0\u76f8\u5e94\u7684\u82af\u7247\u529f\u80fd\u548c\u6027\u80fd\uff0c\u8fd9\u5c31\u9700\u8981\u7528\u5230\u5404\u79cd\u534a\u5bfc\u4f53\u6750\u6599\u3002<\/p>\n 1nm\u5236\u7a0b\u9700\u8981\u65b0\u7684\u6676\u4f53\u7ba1\u67b6\u6784\u652f\u6301\uff0c\u5982Forksheet\u548cCFET\uff0c\u5b83\u4eec\u5bf9\u5c40\u90e8\u4e92\u8fde\u63d0\u51fa\u4e86\u66f4\u9ad8\u7684\u8981\u6c42\uff0c\u76f8\u5e94\u5730\uff0c\u540e\u9053\u5de5\u5e8f\u9700\u8981\u91c7\u7528\u65b0\u578b\u6750\u6599\uff08\u5982\u948c\uff08Ru\uff09\u3001\u94bc\uff08Mo\uff09\u7b49\uff09\uff0c\u8fd8\u9700\u8981\u964d\u4f4e\u4e2d\u95f4\u5de5\u5e8f\u7684\u63a5\u89e6\u7535\u963b<\/u>\u3002<\/p>\n \u5bf9\u4e8e\u540e\u9053\u5de5\u5e8f\u800c\u8a00\uff0c\u91d1\u5c5e\u7ebf\u548c\u901a\u5b54<\/u>\u7684\u7535\u963b\u548c\u7535\u5bb9<\/u>\u4ecd\u7136\u662f\u6700\u5173\u952e\u7684\u53c2\u6570\uff0c\u89e3\u51b3\u8fd9\u4e2a\u95ee\u9898\u7684\u4e00\u79cd\u65b9\u6cd5\u662f\u91c7\u7528\u53e6\u4e00\u79cd\u91d1\u5c5e\u5316\u7ed3\u6784\uff0c\u79f0\u4e3a\u201c\u96f6\u901a\u5b54\u6df7\u5408\u9ad8\u5ea6\u201d\u3002\u8fd9\u79cd\u65b9\u6848\u53ef\u4ee5\u6839\u636e\u91d1\u5c5e\u7ebf\u7684\u5e94\u7528\u9700\u6c42\uff0c\u7075\u6d3b\u5730\u5c06\u7535\u963b\u6362\u6210\u7535\u5bb9\u3002<\/p>\n \u4e3a\u4e86\u6ee1\u8db3\u65b0\u6676\u4f53\u7ba1\u7ed3\u6784\u7684\u8981\u6c42\uff0c\u540c\u65f6\u8fdb\u4e00\u6b65\u7f13\u89e3\u5e03\u7ebf\u62e5\u6324\u72b6\u51b5\uff0c\u4e2d\u95f4\u5de5\u5e8f\u9700\u8981\u8fdb\u4e00\u6b65\u521b\u65b0\uff0c\u4f8b\u5982\uff0c\u5728CFET\u4e2d\uff0c\u9700\u8981\u4e3a\u63a5\u89e6\u6805\u6781\u63d0\u4f9b\u65b0\u7684\u89e3\u51b3\u65b9\u6848\u3002\u6b64\u5916\uff0c\u9ad8\u7eb5\u6a2a\u6bd4\u7684\u901a\u5b54\u628a\u5404\u79cd\u6784\u4ef6\u4e92\u8fde\u8d77\u6765\uff0c\u76ee\u524d\uff0c\u8fd9\u4e9b\u6784\u4ef6\u5df2\u7ecf\u6269\u5c55\u5230\u4e09\u7ef4\uff083D\uff09\uff0c\u4f46\u662f\uff0c\u9700\u8981\u964d\u4f4e\u8fd9\u4e9b\u6df1\u901a\u5b54\u7684\u5bc4\u751f\u7535\u963b\uff0c\u8fd9\u53ef\u4ee5\u901a\u8fc7\u5f15\u5165\u5148\u8fdb\u7684\u89e6\u70b9<\/u>\u6765\u5b9e\u73b0\uff0c\u4f8b\u5982\u4f7f\u7528\u948c\u3002<\/p>\n \u8fc7\u53bb\uff0c\u82af\u7247\u5236\u9020\u591a\u4f7f\u7528\u4e09\u7ef4\u6750\u6599\uff0c\u8fd1\u4e9b\u5e74\uff0c\u5728\u4ee5\u53f0\u79ef\u7535\u548c\u82f1\u7279\u5c14<\/u>\u4e3a\u4ee3\u8868\u7684\u9f99\u5934\u5382\u5546<\/u>\u5f15\u9886\u4e0b\uff0c\u4e8c\u7ef4\uff082D\uff09\u6750\u6599\u9010\u6e10\u8fdb\u5165\u4e3b\u6d41\u884c\u5217\u3002<\/p>\n 2021\u5e74\uff0c\u53f0\u79ef\u7535\u4e0e\u4e2d\u56fd\u53f0\u6e7e\u5927\u5b66\u548c\u7f8e\u56fd\u9ebb\u7701\u7406\u5de5\u5b66\u9662\uff08MI<\/u>T\uff09\u5408\u4f5c\uff0c\u53d1\u73b0\u4e86\u4e8c\u7ef4\u6750\u6599\u7ed3\u5408\u534a\u91d1\u5c5e\u94cb\uff08Bi\uff09\u80fd\u5b9e\u73b0\u6781\u4f4e\u7684\u7535\u963b\uff0c\u63a5\u8fd1\u91cf\u5b50\u6781\u9650\uff0c\u53ef\u4ee5\u6ee1\u8db31nm\u5236\u7a0b\u7684\u9700\u6c42\u3002\u4e8c\u7ef4\u6750\u6599\u539a\u5ea6\u53ef\u5c0f\u4e8e1nm\uff0c\u66f4\u903c\u8fd1\u56fa\u6001\u534a\u5bfc\u4f53\u6750\u6599\u539a\u5ea6\u7684\u6781\u9650\uff0c\u800c\u534a\u91d1\u5c5e\u94cb\u7684\u7279\u6027\uff0c\u80fd\u6d88\u9664\u4e0e\u4e8c\u7ef4\u534a\u5bfc\u4f53\u63a5\u9762\u7684\u80fd\u91cf\u969c\u788d\uff0c\u4e14\u6c89\u79ef\u65f6\uff0c\u4e0d\u4f1a\u7834\u574f\u4e8c\u7ef4\u6750\u6599\u7684\u539f\u5b50\u7ed3\u6784\u3002\u8fd9\u6837\uff0c\u901a\u8fc7\u4ec51 ~3\u5c42\u539f\u5b50\u539a\u5ea6\uff08\u5c0f\u4e8e1nm\uff09\u7684\u4e8c\u7ef4\u6750\u6599\uff0c\u7535\u5b50<\/u>\u4ece\u6e90\u6781\uff08source\uff09\u8d70\u4ee5\u4e8c\u786b\u5316\u94bc\u4e3a\u6750\u6599\u7684\u7535\u5b50\u901a\u9053\u5c42\uff0c\u4e0a\u65b9\u6709\u6805\u6781\uff08gate\uff09\u52a0\u7535\u538b\u6765\u63a7\u5236\uff0c\u518d\u4ece\u6f0f\u6781\uff08drain\uff09\u6d41\u51fa\uff0c\u7528\u94cb\u4f5c\u4e3a\u63a5\u89e6\u7535\u6781\uff0c\u53ef\u4ee5\u5927\u5e45\u964d\u4f4e\u7535\u963b\u5e76\u63d0\u9ad8\u4f20\u8f93\u7535\u6d41<\/u>\uff0c\u4f7f\u5f97\u4e8c\u7ef4\u6750\u6599\u57281nm\u5236\u7a0b\u5de5\u827a\u5b9e\u65bd\u8fc7\u7a0b\u4e2d\u6210\u4e3a\u53d6\u4ee3\u7845\u7684\u65b0\u578b\u534a\u5bfc\u4f53\u6750\u6599\u3002<\/p>\n \u6700\u8fd1\uff0c\u6089\u5c3c\u65b0\u5357\u5a01\u5c14\u58eb\u5927\u5b66\u6750\u6599\u4e0e\u5236\u9020\u7814\u7a76\u6240\uff08MMFI\uff09\u7684\u7814\u7a76\u4eba\u5458\u4f7f\u7528\u72ec\u7acb\u5f0f\u5355\u6676\u949b\u9178\u9536\uff08STO\uff09\u819c\u5236\u9020\u4e86\u4e00\u7cfb\u5217\u900f\u660e\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff0c\u5176\u6027\u80fd\u4e0e\u5f53\u524d\u7684\u7845\u534a\u5bfc\u4f53\u573a\u6548\u5e94\u6676\u4f53\u7ba1\u76f8\u5f53\u3002\u8be5\u534a\u5bfc\u4f53\u6750\u6599\u5de5\u827a\u514b\u670d\u4e86\u7845\u5728\u5c0f\u578b\u5316\u65b9\u9762\u7684\u9650\u5236\uff0c\u540c\u65f6\u5c55\u793a\u4e86\u5927\u89c4\u6a21\u5236\u90202D\u573a\u6548\u5e94\u6676\u4f53\u7ba1\u7684\u6f5c\u529b\uff0c\u514b\u670d\u4e86\u7eb3\u7c73\u7ea7\u7845\u534a\u5bfc\u4f53\u751f\u4ea7\u7684\u6311\u6218\uff0c\u5e76\u63d0\u4f9b\u4e86\u53ef\u9760\u7684\u7535\u5bb9\u548c\u6709\u6548\u7684\u5f00\u5173<\/u>\u64cd\u4f5c\u3002<\/p>\n \u636e\u7814\u53d1\u4eba\u5458\u4ecb\u7ecd\uff0c\u8fd9\u9879\u5de5\u4f5c\u7684\u5173\u952e\u521b\u65b0\u662f\uff0c\u5c06\u4f20\u7edf\u76843D\u6563\u88c5\u6750\u6599\u8f6c\u53d8\u4e3a\u51c62D\u5f62\u5f0f\uff0c\u800c\u4e0d\u4f1a\u964d\u4f4e\u5176\u6027\u80fd\uff0c\u8fd9\u610f\u5473\u7740\u5b83\u53ef\u4ee5\u50cf\u4e50\u9ad8\u79ef\u6728\u4e00\u6837\u4e0e\u5176\u5b83\u6750\u6599\u81ea\u7531\u7ec4\u88c5\uff0c\u4e3a\u5404\u79cd\u65b0\u5174\u548c\u672a\u88ab\u53d1\u73b0\u7684\u5e94\u7528\u521b\u5efa\u9ad8\u6027\u80fd\u6676\u4f53\u7ba1\u3002<\/p>\n \u6b64\u5916\uff0c\u57281nm\u5236\u7a0b\u82af\u7247\u4e2d\uff0c\u91d1\u5c5e\u4e92\u8fde\u5e26\u6765\u7684\u7126\u8033\u70ed\u6548\u5e94\u662f\u4e00\u4e2a\u91cd\u8981\u8003\u91cf\u56e0\u7d20\uff0c\u8fd9\u65b9\u9762\uff0cIMEC\u63d0\u51fa\u4e86\u65b0\u7684\u89e3\u51b3\u65b9\u6848\u30021nm\u5236\u7a0b\u9700\u8981\u5728\u540e\u7aef\u6700\u5173\u952e\u7684\u5c42\u5f15\u5165\u65b0\u7684\u5bfc\u4f53\u6750\u6599\uff0c\u5982\u4e8c\u5143\u548c\u4e09\u5143\u91d1\u5c5e\u95f4\u5316\u5408\u7269\uff08Al\u6216Ru\u5316\u5408\u7269\uff09\uff0c\u5176\u7535\u963b\u7387\u4f4e\u4e8e\u6309\u6bd4\u4f8b\u5c3a\u5bf8\u7684\u5e38\u89c4\u5143\u7d20\u91d1\u5c5e\uff08\u4f8b\u5982 Cu\u3001Co\u3001Mo \u6216 Ru\uff09\u3002IMEC\u901a\u8fc7\u5b9e\u9a8c\u7814\u7a76\u4e86\u94dd\u5316\u7269\u8584\u819c\u7684\u7535\u963b\u7387\uff0c\u5305\u62ec AlNi\u3001Al3Sc\u3001AlCu \u548c Al2Cu\uff0c\u572820nm \u53ca\u4ee5\u4e0a\u539a\u5ea6\u65f6\uff0c\u6240\u6709 PVD \u6c89\u79ef\u819c\u7684\u7535\u963b\u7387\u4e0e Ru \u6216 Mo \u76f8\u5f53\u6216\u66f4\u4f4e\uff0c28nm\u7684AlCu\u548cAl2Cu\u819c\u7684\u6700\u4f4e\u7535\u963b\u7387\u4e3a9.5 \u00b5\u03a9cmCu<\/u>\uff0c\u4f4e\u4e8eCu\u3002<\/p>\n \u53f0\u79ef\u7535\u5f15\u98861nm\u7814\u53d1<\/strong><\/p>\n \u5728\u5148\u8fdb\u5236\u7a0b\u7684\u7814\u53d1\u548c\u5546\u4e1a\u5316\u65b9\u9762\uff0c\u53f0\u79ef\u7535\u4e00\u76f4\u662f\u884c\u4e1a\u5148\u950b\uff0c1nm\u81ea\u7136\u4e0d\u4f1a\u4f8b\u5916\u3002<\/p>\n \u5982\u4e0a\u6587\u6240\u8ff0\uff0c\u53f0\u79ef\u7535\u3001\u4e2d\u56fd\u53f0\u6e7e\u5927\u5b66\u548cMIT\u8054\u5408\u7814\u53d1\u7684\u4f7f\u7528\u534a\u91d1\u5c5e\u94cb\u4f5c\u4e3a\u4e8c\u7ef4\u6750\u6599\u7684\u63a5\u89e6\u7535\u6781\uff0c\u4e0d\u4ec5\u964d\u4f4e\u4e86\u7535\u963b\uff0c\u8fd8\u589e\u52a0\u4e86\u7535\u6d41\uff0c\u4ece\u800c\u5927\u5e45\u63d0\u5347\u4e86\u80fd\u6548\u3002\u4e0d\u8fc7\uff0c\u8be5\u6750\u6599\u5de5\u827a\u8fd8\u5904\u4e8e\u7814\u53d1\u9636\u6bb5\uff0c\u672a\u7528\u4e8e\u91cf\u4ea7\uff0c\u4e3a\u4e86\u4f7f\u7528\u534a\u91d1\u5c5e\u94cb\u4f5c\u4e3a\u6676\u4f53\u7ba1\u7684\u63a5\u89e6\u7535\u6781\uff0c\u4e0d\u5f97\u4e0d\u4f7f\u7528\u6c26\u79bb\u5b50\u675f (HIB) \u5149\u523b\u7cfb\u7edf\u5e76\u8bbe\u8ba1\u4e00\u79cd\u201c\u7b80\u5355\u7684\u6c89\u79ef\u5de5\u827a\u201d\u3002\u8fd9\u79cd\u5de5\u827a\u4ec5\u7528\u4e8e\u7814\u53d1\u751f\u4ea7\u7ebf\uff0c\u56e0\u6b64\u8fd8\u6ca1\u6709\u5b8c\u5168\u51c6\u5907\u597d\u8fdb\u884c\u5927\u89c4\u6a21\u751f\u4ea7\u3002<\/p>\n \u76ee\u524d\uff0c\u53f0\u79ef\u7535\u7684 1nm \u5236\u7a0b\u8282\u70b9\u4ecd\u5904\u4e8e\u63a2\u7d22\u9636\u6bb5\uff0c\u5de5\u5382\u6b63\u5728\u5c1d\u8bd5\u5404\u79cd\u9009\u9879\uff0c\u4e5f\u4e0d\u80fd\u4fdd\u8bc1\u672a\u6765\u91cf\u4ea7\u65f6\u786e\u5b9a\u4f7f\u7528\u534a\u91d1\u5c5e\u94cb\u3002<\/p>\n \u76ee\u524d\uff0c\u53f0\u79ef\u7535\u5148\u8fdb\u5236\u7a0b\u4ea7\u7ebf\u4f7f\u7528\u94a8\u4e92\u8fde\u6676\u4f53\u7ba1\uff0c\u800c\u82f1\u7279\u5c14\u4f7f\u7528\u94b4\u4e92\u8fde\u3002\u4e24\u8005\u90fd\u6709\u5404\u81ea\u4f18\u70b9\uff0c\u5e76\u4e14\u90fd\u9700\u8981\u7279\u5b9a\u7684\u8bbe\u5907\u548c\u5de5\u5177\u3002<\/p>\n \u4e0d\u4e45\u524d\uff0c\u6709\u6d88\u606f\u4f20\u51fa\uff0c\u53f0\u79ef\u7535\u5728\u5b8c\u62103nm\u5236\u7a0b\u5de5\u827a\u7814\u53d1\u4e4b\u540e\uff0c\u5df2\u7ecf\u4e8e\u4eca\u5e746\u6708\u628a\u8be5\u56e2\u961f\u8f6c\u5411\u4e86\u672a\u6765\u76841.4nm\u5de5\u827a\u7814\u53d1\u3002<\/p>\n \u9664\u4e86\u53f0\u79ef\u7535\uff0c\u4e09\u661f\u548cIBM\u4e5f\u5728\u8fdb\u884c1nm\u5236\u7a0b\u5de5\u827a\u7684\u7814\u53d1\u3002<\/p>\n \u5f53\u4e0b\u7684\u96c6\u6210\u7535\u8def<\/u>\uff0c\u7279\u522b\u662f\u5904\u7406\u5668\uff0c\u6676\u4f53\u7ba1\u662f\u5e73\u653e\u5728\u7845\u8868\u9762\u4e0a\u7684\uff0c\u7535\u6d41\u4ece\u4e00\u4fa7\u6d41\u5411\u53e6\u4e00\u4fa7\u30022021\u5e74\uff0cIBM\u548c\u4e09\u661f\u516c\u5e03\u4e86\u4e00\u79cd\u5728\u82af\u7247\u4e0a\u5782\u76f4\u5806\u53e0\u6676\u4f53\u7ba1\u7684\u8bbe\u8ba1\u65b9\u6cd5\uff0c\u79f0\u4e3a\u5782\u76f4\u4f20\u8f93\u573a\u6548\u5e94\u6676\u4f53\u7ba1 (Ver<\/u>TI<\/u>calTransport Field Effect Transistors\uff0cVTFET)\u3002\u4e0e\u5e38\u89c4\u8bbe\u8ba1\u76f8\u6bd4\uff0cVTFET\u5f7c\u6b64\u5782\u76f4\uff0c\u7535\u6d41\u5782\u76f4\u6d41\u52a8\u3002\u8be5\u6280\u672f\u6709\u671b\u7a81\u78341nm\u5236\u7a0b\u5de5\u827a\u74f6\u9888\u3002<\/p>\n IBM\u548c\u4e09\u661f\u8868\u793a\uff0c\u8fd9\u79cd\u8bbe\u8ba1\u6709\u4e24\u4e2a\u4f18\u70b9\uff1a\u9996\u5148\uff0c\u5b83\u53ef\u4ee5\u7ed5\u8fc7\u8bb8\u591a\u6027\u80fd\u9650\u5236\uff0c\u5c06\u6469\u5c14\u5b9a\u5f8b\u6269\u5c55\u5230\u7eb3\u7c73\u7247\u6280\u672f\u4e4b\u5916\uff0c\u66f4\u91cd\u8981\u7684\u662f\uff0c\u7531\u4e8e\u7535\u6d41\u66f4\u5927\uff0c\u8be5\u8bbe\u8ba1\u51cf\u5c11\u4e86\u80fd\u6e90\u6d88\u8017\uff0c\u4f30\u8ba1VTFET\u5c06\u4f7f\u5904\u7406\u5668\u7684\u901f\u5ea6\u6bd4\u91c7\u7528 FinFET \u6676\u4f53\u7ba1\u8bbe\u8ba1\u7684\u82af\u7247\u5feb\u4e24\u500d\u6216\u529f\u8017\u964d\u4f4e 85%\u3002<\/p>\n \u82f1\u7279\u5c14\u4e5f\u4e8e2021\u5e74\u8868\u793a\uff0c\u8ba1\u5212\u57282024\u5e74\u4e4b\u524d\u8de8\u8d8a1nm\uff0c\u5b8c\u6210\u57c3\u7ea7\u82af\u7247\u8bbe\u8ba1\uff0c\u636e\u6089\uff0c\u82f1\u7279\u5c14\u5c06\u4f7f\u7528\u5176\u65b0\u7684\u201cIntel<\/u>\u00a020A\u201d\u5236\u7a0b\u8282\u70b9\u548c RibbonFET \u6676\u4f53\u7ba1\u6765\u5b9e\u73b0\u8fd9\u4e00\u76ee\u6807\u3002<\/p>\n \u5149\u523b\u673a\u6210\u4e3a\u5173\u952e<\/strong><\/p>\n \u9664\u4e86\u6676\u4f53\u7ba1\u67b6\u6784\u548c\u6750\u6599\u5de5\u827a\uff0c\u8981\u5b9e\u73b01nm\u5236\u7a0b\u82af\u7247\u7684\u91cf\u4ea7\uff0cEUV<\/u>\u5149\u523b\u673a\u4f9d\u7136\u662f\u6210\u529f\u7684\u5173\u952e\u3002<\/p>\n \u4f5c\u4e3a\u5168\u7403\u552f\u4e00\u4e00\u5bb6EUV\u5149\u523b\u673a\u4f9b\u5e94\u5546\uff0cASML\u4e00\u76f4\u662f\u53f0\u79ef\u7535\u3001\u4e09\u661f\u548c\u82f1\u7279\u5c14\u5173\u6ce8\u7684\u7126\u70b9\u3002\u76ee\u524d\uff0cASML\u51fa\u8d27\u7684\u5148\u8fdbEUV\u5149\u523b\u673a\u662fNXE:3400B\u30013400C\u548c3600D\uff0c\u8fd9\u51e0\u6b3e\u673a\u578b\u7684\u6570\u503c\u5b54\u5f84<\/u>\uff08NA\uff09\u5747\u4e3a0.33\u3002\u5176\u4e2d\uff0c3600D\u572830mJ\/cm2\u4e0b\u7684\u6676\u5706\u541e\u5410\u91cf\u8fbe\u5230160\u7247\uff0c\u6bd43400C\u63d0\u9ad8\u4e8618%\uff0c\u5b83\u5c06\u6210\u4e3a\u53f0\u79ef\u7535\u548c\u4e09\u661f3nm\u5236\u7a0b\u4ea7\u7ebf\u7684\u4e3b\u8981\u8bbe\u5907\u3002<\/p>\n \u636e\u6089\uff0cIMEC\u548cASML\u5408\u4f5c\u7684EUV\u8bbe\u5907\u7814\u53d1\u5de5\u4f5c\u6b63\u5728\u8fdb\u884c\uff0c\u65e5\u672c\u7684\u00a0TE<\/u>L\u4e5f\u53c2\u4e0e\u5176\u4e2d\uff0c\u9884\u8ba1\u6d4b\u8bd5\u8bbe\u5907\u6709\u671b\u57282023\u5e74\u521d\u5b8c\u6210\u3002<\/p>\n ASML\u8fd8\u516c\u5e03\u4e86\u672a\u6765\u4e09\u4ee3\u5149\u523b\u673a\u7684\u7814\u53d1\u8ba1\u5212\uff0c\u4e09\u6b3e\u673a\u578b\u7684\u578b\u53f7\u5206\u522b\u662fNEXT:5000\u3001EXE:5000 \u548cEXE:5200\u3002\u4eceEXE:5000\u5f00\u59cb\uff0c\u6570\u503c\u5b54\u5f84\u63d0\u9ad8\u5230\u4e860.55\u3002<\/p>\n \u4e0e0.33NA\u76f8\u6bd4\uff0c0.55NA\u8bbe\u5907\u5728\u591a\u65b9\u9762\u90fd\u6709\u5f88\u5927\u63d0\u5347\uff0c\u5305\u62ec\u66f4\u9ad8\u7684\u5bf9\u6bd4\u5ea6\uff0c\u56fe\u50cf\u66dd\u5149\u6210\u672c\u66f4\u4f4e\u7b49\uff0c\u662f\u672a\u6765\u53d1\u5c55\u7684\u8d8b\u52bf\u3002<\/p>\n \u73b0\u5728\uff0c\u7528\u4e8e\u751f\u4ea75nm\/7nm\u5236\u7a0b\u82af\u7247\u7684\u5149\u523b\u673a\u8bbe\u5907\u96f6\u4ef6\u6570\u91cf\u8d85\u8fc710\u4e07\u4e2a\uff0c\u8fd0\u8f93\u65f6\u9700\u898140\u4e2a\u8d27\u67dc\uff0c\u636e\u6089\uff0c\u5236\u90201nm\u82af\u7247\u7684\u5149\u523b\u673a\u4f53\u79ef\u6bd43nm\u7684\u591a\u51fa\u4e00\u500d\u3002\u7531\u4e8e\u5149\u523b\u673a\u62e5\u6709\u975e\u5e38\u591a\u7684\u96f6\u4ef6\uff0c\u9700\u8981\u9ad8\u7cbe\u5ea6\u7684\u88c5\u914d\uff0c\u5bfc\u81f4\u5149\u523b\u673a\u4ece\u53d1\u8d27\u5230\u914d\u7f6e\/\u57f9\u8bad\u7684\u6574\u4e2a\u6d41\u7a0b\u9700\u8981\u4e24\u5e74\u65f6\u95f4\uff0c\u8fd9\u6837\u7b97\u6765\uff0c\u9884\u8ba10.55NA\u5149\u523b\u673a\u7684\u5927\u89c4\u6a21\u5e94\u7528\u8981\u52302025~2026\u5e74\uff0c\u4e50\u89c2\u4f30\u8ba1\uff0c\u90a3\u65f6\uff0c\u4e1a\u754c\u5f00\u59cb\u8bd5\u4ea71nm\u5236\u7a0b\u5de5\u827a\u4e86\u3002<\/p>\n","protected":false},"excerpt":{"rendered":" 3nm\u5236\u7a0b\u82af\u7247\u5df2\u7ecf\u5f00\u59cb\u91cf\u4ea7\uff0c2nm\u5c06\u4e8e2025\u5e74\u8bd5\u4ea7\uff0c\u63a5\u4e0b\u6765\u76841nm\u5c06\u662f\u7eb3\u7c73\u65f6\u4ee3\u7684\u6700\u540e\u4e00\u4e2a\u8282\u70b9\uff0c\u4e3a\u6b64\uff0c\u4e1a\u754c\u9f99\u5934 […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[10],"tags":[],"_links":{"self":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/9601"}],"collection":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=9601"}],"version-history":[{"count":1,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/9601\/revisions"}],"predecessor-version":[{"id":9605,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/9601\/revisions\/9605"}],"wp:attachment":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=9601"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=9601"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=9601"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}