{"id":7440,"date":"2021-11-29T17:30:35","date_gmt":"2021-11-29T09:30:35","guid":{"rendered":"http:\/\/www.szryc.com\/?p=7440"},"modified":"2021-11-29T17:33:40","modified_gmt":"2021-11-29T09:33:40","slug":"gan-%e5%92%8c-sic-%e5%99%a8%e4%bb%b6%e5%8c%ba%e5%88%ab%e8%af%a6%e8%a7%a3","status":"publish","type":"post","link":"http:\/\/www.szryc.com\/?p=7440","title":{"rendered":"GaN \u548c SiC \u5668\u4ef6\u533a\u522b\u8be6\u89e3"},"content":{"rendered":"
\u51e0\u5341\u5e74\u6765\uff0c\u7845\u4e00\u76f4\u4e3b\u5bfc\u7740\u6676\u4f53\u7ba1<\/u>\u4e16\u754c\uff0c\u4f46\u8fd9\u79cd\u60c5\u51b5\u6b63\u5728\u9010\u6e10\u53d1\u751f\u53d8\u5316\u3002\u5df2\u7ecf\u5f00\u53d1\u51fa\u7531\u4e24\u79cd\u6216\u4e09\u79cd\u6750\u6599\u5236\u6210\u7684\u5316\u5408\u7269\u534a\u5bfc\u4f53\uff0c\u5e76\u5177\u6709\u72ec\u7279\u7684\u4f18\u52bf\u548c\u5353\u8d8a\u7684\u7279\u6027\u3002\u4f8b\u5982\uff0c\u5316\u5408\u7269\u534a\u5bfc\u4f53\u4e3a\u6211\u4eec\u63d0\u4f9b\u4e86\u00a0LED<\/u>\uff1a\u4e00\u79cd\u662f\u7531\u7837\u5316\u9553 (GaAs) \u548c\u7837\u5316\u9553\u548c\u78f7 (GaAsP) \u7684\u6df7\u5408\u7269\u7ec4\u6210\uff1b\u5176\u4ed6\u4eba\u4f7f\u7528\u94df\u548c\u78f7\u3002<\/p>\n
\u867d\u7136\u5316\u5408\u7269\u534a\u5bfc\u4f53\u66f4\u96be\u5236\u9020\u4e14\u66f4\u6602\u8d35\uff0c\u4f46\u4e0e\u7845\u76f8\u6bd4\uff0c\u5b83\u4eec\u5177\u6709\u663e\u7740\u7684\u4f18\u52bf\u3002\u6c7d\u8f66\u7535\u6c14\u7cfb\u7edf\u548c\u7535\u52a8\u6c7d\u8f66 (EV) \u7b49\u65b0\u7684\u3001\u8981\u6c42\u66f4\u9ad8\u7684\u5e94\u7528\u7684\u8bbe\u8ba1\u4eba\u5458\u53d1\u73b0\uff0c\u5316\u5408\u7269\u534a\u5bfc\u4f53\u66f4\u80fd\u6ee1\u8db3\u5176\u4e25\u683c\u7684\u89c4\u8303\u3002<\/p>\n
\u8fd1\u5e74\u6765\uff0c\u7814\u7a76\u4eba\u5458\u548c\u6280\u672f\u4eba\u5458\u4e00\u76f4\u5728\u5171\u540c\u52aa\u529b\uff0c\u5bfb\u627e\u4f18\u5316\u5668\u4ef6\u80fd\u6548\u548c\u63d0\u9ad8\u5668\u4ef6\u6027\u80fd\u7684\u89e3\u51b3\u65b9\u6848\u3002\u5c3d\u7ba1\u5fae\u63a7\u5236\u5668\u5728\u6570\u7801\u8bbe\u5907\u4e0a\u5df2\u7ecf\u8fbe\u5230\u4e86\u975e\u51e1\u7684\u8282\u80fd\u6c34\u5e73\uff0c\u4f46\u662f\u5728\u529f\u7387\u5668\u4ef6\u4e2d\u4f7f\u7528\u65b0\u6750\u6599\u4e5f\u53d6\u5f97\u4e86\u6700\u4f73\u6548\u679c\u3002\u4e0d\u4e45\u524d\uff0c\u4eba\u4eec\u8ba4\u4e3aSiC\u548cGaN\u5668\u4ef6\u7684\u5e94\u7528\u76f8\u5f53\u56f0\u96be\u3002\u4f462018\u5e74\uff0c\u8fd9\u4e9b\u6280\u672f\u7684\u4f18\u52bf\u5f00\u59cb\u5e94\u7528\u5230\u73b0\u5b9e\u751f\u6d3b\u4e2d\uff08\u6bd4\u5982\u91c7\u7528SiC MOSFET\u7684Tesla Model3\u4e3b\u9006\u53d8\u5668\uff09\u3002\u8fd9\u9879\u65b0\u6280\u672f\u6210\u529f\u7684\u539f\u56e0\u662f\u4ec0\u4e48\uff1f<\/p>\n
SiC\u548cGaN\u88ab\u79f0\u4e3a\u201c\u5bbd\u5e26\u9699\u534a\u5bfc\u4f53\u201d\uff08WBG\uff09\uff0c\u56e0\u4e3a\u5c06\u8fd9\u4e9b\u6750\u6599\u7684\u7535\u5b50\u4ece\u4ef7\u5e26\u6269\u6563\u5230\u5bfc\u5e26\u9700\u8981\u80fd\u91cf: \u5176\u4e2d\u7845\uff08Silicon\uff09\u6240\u9700\u80fd\u91cf\u4e3a1.1eV\uff0c\u6c2e\u5316\u7845\uff08SiC\uff09\u5219\u97003.3eV\uff0c\u6c2e\u5316\u9553\uff08GaN\uff09\u5219\u97003.4eV. \u8fd9\u5c31\u5e26\u6765\u4e86\u66f4\u9ad8\u7684\u51fb\u7a7f\u7535\u538b\uff0c\u5728\u67d0\u4e9b\u5e94\u7528\u4e2d\u53ef\u9ad8\u52301200-1700V\u3002\u901a\u8fc7\u5408\u9002\u7684\u751f\u4ea7\u5de5\u827a\uff0cWBG\u5c55\u73b0\u51fa\u4ee5\u4e0b\u4f18\u70b9\uff1a<\/p>\n
\u25cf\u6781\u4f4e\u7684\u5185\u90e8\u7535\u963b\uff0c\u4e0e\u540c\u7c7b\u7845\u5668\u4ef6\u76f8\u6bd4\uff0c\u6548\u7387\u53ef\u63d0\u9ad870%<\/p>\n
\u25cf\u4f4e\u7535\u963b\u53ef\u6539\u5584\u70ed\u6027\u80fd\uff08\u6700\u9ad8\u5de5\u4f5c\u6e29\u5ea6\u589e\u52a0\u4e86\uff09\u548c\u6563\u70ed\uff0c\u5e76\u53ef\u83b7\u5f97\u66f4\u9ad8\u7684\u529f\u7387\u5bc6\u5ea6<\/p>\n
\u25cf\u6563\u70ed\u5f97\u5230\u4f18\u5316\uff0c\u4e0e\u540c\u7c7b\u7845\u5668\u4ef6\u76f8\u6bd4\uff0c\u5c31\u53ef\u4ee5\u91c7\u7528\u66f4\u7b80\u5355\u7684\u5c01\u88c5\u3001\u5c3a\u5bf8\u548c\u91cd\u91cf\u4e5f\u5927\u5927\u51cf\u5c11<\/p>\n
\u25cf\u6781\u77ed\u7684\u5173\u65ad\u65f6\u95f4\uff08GaN\u5668\u4ef6\u63a5\u8fd1\u4e8e\u96f6\uff09\u80fd\u591f\u5de5\u4f5c\u4e8e\u975e\u5e38\u9ad8\u7684\u5f00\u5173\u9891\u7387\uff0c\u800c\u4e14\u5de5\u4f5c\u6e29\u5ea6\u4e5f\u66f4\u4f4e<\/p>\n
\u4f5c\u4e3a\u89e3\u51b3\u65b9\u6848\u51fa\u73b0\u7684\u4e24\u79cd\u5316\u5408\u7269\u534a\u5bfc\u4f53\u5668\u4ef6\u662f\u6c2e\u5316\u9553<\/u>\u548c\u78b3\u5316\u7845\u529f\u7387\u6676\u4f53\u7ba1\u3002\u8fd9\u4e9b\u5668\u4ef6\u4e0e\u5bff\u547d\u957f\u7684\u7845\u529f\u7387 LDMOS\u00a0MOSFET<\/u>\u00a0\u548c\u8d85\u7ea7\u7ed3 MOSFET \u7ade\u4e89\u3002GaN \u548c SiC \u5668\u4ef6\u5728\u67d0\u4e9b\u65b9\u9762\u76f8\u4f3c\uff0c\u4f46\u6709\u663e\u7740\u5dee\u5f02\u3002\u672c\u6587\u5c06\u4e24\u8005\u8fdb\u884c\u6bd4\u8f83\u5e76\u63d0\u4f9b\u4fe1\u606f\u4ee5\u5e2e\u52a9\u60a8\u4e3a\u4e0b\u4e00\u4e2a\u8bbe\u8ba1\u505a\u51fa\u51b3\u5b9a\u3002<\/p>\n
<\/p>\n
\u56fe 1\uff1a\u6d41\u884c\u7684\u9ad8\u538b\u3001\u5927\u7535\u6d41\u6676\u4f53<\/u>\u7ba1\u548c\u5176\u4ed6\u8bbe\u5907\u4ee5\u53ca\u4e3b\u8981\u5e94\u7528\u7684\u529f\u7387\u80fd\u529b\u4e0e\u5f00\u5173<\/u>\u9891\u7387\u7684\u5173\u7cfb<\/p>\n
\u5bbd\u5e26\u9699\u534a\u5bfc\u4f53<\/strong><\/p>\n \u5316\u5408\u7269\u534a\u5bfc\u4f53\u88ab\u79f0\u4e3a\u5bbd\u5e26\u9699\u5668\u4ef6\u3002\u5728\u4e0d\u8bc9\u8bf8\u6676\u683c\u7ed3\u6784\u3001\u80fd\u7ea7\u548c\u5176\u4ed6\u4ee4\u4eba\u9ebb\u6728\u7684\u534a\u5bfc\u4f53\u7269\u7406\u5b66\u7684\u60c5\u51b5\u4e0b\uff0c\u6211\u4eec\u53ea\u60f3\u8bf4 WBG \u7684\u5b9a\u4e49\u8bd5\u56fe\u63cf\u8ff0\u7535\u6d41<\/u>\uff08\u7535\u5b50<\/u>\uff09\u5982\u4f55\u5728\u5316\u5408\u7269\u534a\u5bfc\u4f53\u4e2d\u6d41\u52a8\u3002<\/p>\n WBG \u5316\u5408\u7269\u534a\u5bfc\u4f53\u5177\u6709\u9ad8\u7535\u5b50\u8fc1\u79fb\u7387\u548c\u66f4\u9ad8\u7684\u5e26\u9699\u80fd\u91cf\uff0c\u8f6c\u5316\u4e3a\u4f18\u4e8e\u7845\u7684\u7279\u6027\u3002\u7531 WBG \u5316\u5408\u7269\u534a\u5bfc\u4f53\u5236\u6210\u7684\u6676\u4f53\u7ba1\u5177\u6709\u66f4\u9ad8\u7684\u51fb\u7a7f<\/u>\u7535\u538b\u548c\u66f4\u5927\u7684\u9ad8\u6e29\u8010\u53d7\u6027\u3002\u5bf9\u4e8e\u9ad8\u538b\u548c\u9ad8\u529f\u7387\u5e94\u7528\uff0c\u8fd9\u4e9b\u5668\u4ef6\u4f18\u4e8e\u7845\u7b49\u6548\u5668\u4ef6\u3002<\/p>\n <\/p>\n \u56fe 2\uff1a\u53cc\u82af\u7247\u53cc FET \u5171\u6e90\u5171\u6805\u7535\u8def<\/u>\u5c06 GaN \u6676\u4f53\u7ba1\u8f6c\u6362\u4e3a\u5e38\u6001\u201c\u5173\u65ad\u201d\u5668\u4ef6\uff0c\u5b9e\u73b0\u9ad8\u529f\u7387\u5f00\u5173\u7535\u8def\u4e2d\u6807\u51c6\u7684\u589e\u5f3a\u578b\u64cd\u4f5c\u6a21\u5f0f\u3002<\/p>\n WBG \u6676\u4f53\u7ba1\u7684\u5f00\u5173\u901f\u5ea6\u4e5f\u66f4\u5feb\uff0c\u5e76\u4e14\u53ef\u4ee5\u5728\u6bd4\u7845\u66f4\u9ad8\u7684\u9891\u7387\u4e0b\u8fd0\u884c\u3002\u8f83\u4f4e\u7684\u5bfc\u901a\u7535\u963b<\/u>\u610f\u5473\u7740\u5b83\u4eec\u6d88\u8017\u7684\u529f\u7387\u8f83\u5c11\uff0c\u4ece\u800c\u63d0\u9ad8\u6548\u7387\u3002\u8fd9\u79cd\u72ec\u7279\u7684\u7279\u6027\u7ec4\u5408\u4f7f\u8fd9\u4e9b\u5668\u4ef6\u5bf9\u6c7d\u8f66\u5e94\u7528\u4e2d\u4f7f\u7528\u7684\u4e00\u4e9b\u6700\u82db\u523b\u7684\u7535\u8def\u5177\u6709\u5438\u5f15\u529b\uff0c\u5c24\u5176\u662f\u6df7\u5408\u52a8\u529b\u7535\u52a8\u6c7d\u8f66 (HEV) \u548c EV\u3002<\/p>\n GaN \u548c SiC \u6676\u4f53\u7ba1\u6b63\u53d8\u5f97\u8d8a\u6765\u8d8a\u5bb9\u6613\u7528\u4e8e\u89e3\u51b3\u6c7d\u8f66\u7535\u5b50\u8bbe\u5907\u7684\u6311\u6218\u3002GaN \u548c SiC \u5668\u4ef6\u7684\u5173\u952e\u8981\u70b9\u662f\u4ee5\u4e0b\u4f18\u52bf\uff1a<\/p>\n GaN \u6676\u4f53\u7ba1\u5728\u5c04\u9891<\/u>\u00a0(RF<\/u>) \u529f\u7387\u9886\u57df\u627e\u5230\u4e86\u65e9\u671f\u7684\u5229\u57fa\u3002\u6750\u6599\u7684\u6027\u8d28\u5bfc\u81f4\u4e86\u8017\u5c3d\u578b\uff08d \u578b\uff09\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff08FET\uff09\u7684\u53d1\u5c55\u3002d \u578b FET \u88ab\u79f0\u4e3a\u5047\u6676\u9ad8\u7535\u5b50\u8fc1\u79fb\u7387\u6676\u4f53\u7ba1 (pHEMT)\uff0c\u81ea\u7136\u662f\u201c\u5bfc\u901a\u201d\u5668\u4ef6\uff1b\u6ca1\u6709\u6805\u6781\u63a7\u5236\u8f93\u5165\uff0c\u5b58\u5728\u81ea\u7136\u4f20\u5bfc\u901a\u9053\u3002\u6805\u6781\u8f93\u5165\u4fe1\u53f7\u63a7\u5236\u901a\u9053\u5bfc\u901a\u5e76\u6253\u5f00\u548c\u5173\u95ed\u5668\u4ef6\u3002<\/p>\n \u7531\u4e8e\u901a\u5e38\u201c\u5173\u95ed\u201d\u7684\u589e\u5f3a\u6a21\u5f0f\uff08e \u6a21\u5f0f\uff09\u5668\u4ef6\u5728\u5f00\u5173\u5e94\u7528\u4e2d\u662f\u9996\u9009\uff0c\u8fd9\u5bfc\u81f4\u4e86 e \u6a21\u5f0f GaN \u5668\u4ef6\u7684\u5f00\u53d1\u3002\u7b2c\u4e00\u4e2a\u662f\u4e24\u4e2a FET \u5668\u4ef6\u7684\u7ea7\u8054\uff08\u56fe 2\uff09\uff1b\u73b0\u5728\uff0c\u53ef\u4ee5\u4f7f\u7528\u6807\u51c6\u7684 e-mode GaN \u5668\u4ef6\u3002\u5b83\u4eec\u53ef\u4ee5\u5728\u9ad8\u8fbe 10 MHz \u548c\u9ad8\u8fbe\u6570\u5341\u5343\u74e6\u7684\u9891\u7387\u4e0b\u8fdb\u884c\u5207\u6362\u3002<\/p>\n <\/p>\n \u78b3\u5316\u7845\u6676\u4f53\u7ba1<\/strong><\/p>\n SiC \u6676\u4f53\u7ba1\u662f\u81ea\u7136\u7684 e-mode MOSFET\u3002\u8fd9\u4e9b\u5668\u4ef6\u53ef\u4ee5\u5728\u8fdc\u9ad8\u4e8e\u7845 MOSFET \u7684\u7535\u538b\u548c\u7535\u6d41\u6c34\u5e73\u4e0b\u4ee5\u9ad8\u8fbe 1 MHz \u7684\u9891\u7387\u8fdb\u884c\u5f00\u5173\u3002\u6700\u5927\u6f0f\u6e90\u7535\u538b\u9ad8\u8fbe\u7ea6 1,800 V\uff0c\u7535\u6d41\u80fd\u529b\u53ef\u8fbe 100 A\u3002\u6b64\u5916\uff0cSiC \u5668\u4ef6\u7684\u5bfc\u901a\u7535\u963b\u8fdc\u4f4e\u4e8e\u7845 MOSFET\uff0c\u4f7f\u5176\u5728\u6240\u6709\u5f00\u5173\u7535\u6e90\u5e94\u7528\u4e2d\u7684\u6548\u7387\u66f4\u9ad8\u3002\u4e00\u4e2a\u4e3b\u8981\u7f3a\u70b9\u662f\u5b83\u4eec\u9700\u8981\u6bd4\u5176\u4ed6 MOSFET \u66f4\u9ad8\u7684\u6805\u6781\u9a71\u52a8\u7535\u538b\uff0c\u5c3d\u7ba1\u968f\u7740\u8bbe\u8ba1\u7684\u6539\u8fdb\uff0c\u8fd9\u79cd\u60c5\u51b5\u6b63\u5728\u53d1\u751f\u53d8\u5316\u3002<\/p>\n SiC \u5668\u4ef6\u9700\u8981 18 \u5230 20 V \u7684\u6805\u6781\u9a71\u52a8\u7535\u538b\u6765\u5f00\u542f\u5177\u6709\u4f4e\u5bfc\u901a\u7535\u963b\u7684\u5668\u4ef6\u3002\u6807\u51c6 Si MOSFET \u9700\u8981\u5c0f\u4e8e 10 V \u7684\u6805\u6781\u624d\u80fd\u5b8c\u5168\u5bfc\u901a\u3002\u6b64\u5916\uff0cSiC \u5668\u4ef6\u9700\u8981 \u20133- \u81f3 \u20135-V\u00a0\u6805\u6781\u9a71\u52a8\u5668<\/u>\u4ee5\u5207\u6362\u5230\u201c\u5173\u95ed\u201d\u72b6\u6001\u3002\u7136\u800c\uff0c\u5df2\u7ecf\u5f00\u53d1\u4e86\u7279\u6b8a\u7684\u6805\u6781\u9a71\u52a8 IC \u6765\u6ee1\u8db3\u8fd9\u79cd\u9700\u6c42\u3002\u78b3\u5316\u7845 MOSFET \u901a\u5e38\u6bd4\u5176\u4ed6\u66ff\u4ee3\u54c1\u6210\u672c\u66f4\u9ad8\uff0c\u4f46\u5b83\u4eec\u7684\u9ad8\u7535\u538b\u3001\u9ad8\u7535\u6d41\u80fd\u529b\u4f7f\u5176\u975e\u5e38\u9002\u5408\u6c7d\u8f66\u7535\u6e90\u7535\u8def\u3002<\/p>\n WBG\u6676\u4f53\u7ba1\u7ade\u8d5b<\/strong><\/p>\n GaN \u548c SiC \u5668\u4ef6\u90fd\u4e0e\u5176\u4ed6\u6210\u719f\u7684\u534a\u5bfc\u4f53\u7ade\u4e89\uff0c\u7279\u522b\u662f Si LDMOS MOSFET\u3001\u8d85\u7ea7\u7ed3 MOSFET \u548c\u00a0IGBT<\/u>\u3002\u5728\u8bb8\u591a\u5e94\u7528\u4e2d\uff0c\u8fd9\u4e9b\u8f83\u65e7\u7684\u5668\u4ef6\u6b63\u9010\u6e10\u88ab GaN \u548c SiC \u6676\u4f53\u7ba1\u6240\u53d6\u4ee3\u3002<\/p>\n \u4f8b\u5982\uff0c\u5728\u8bb8\u591a\u5e94\u7528\u4e2d\uff0cIGBT \u6b63\u5728\u88ab SiC \u5668\u4ef6\u53d6\u4ee3\u3002SiC \u5668\u4ef6\u53ef\u4ee5\u5728\u66f4\u9ad8\u7684\u9891\u7387\uff08100 kHz \u6216\u66f4\u9ad8\uff0c\u76f8\u5bf9\u4e8e 20 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