{"id":3175,"date":"2020-12-16T07:00:12","date_gmt":"2020-12-16T07:00:12","guid":{"rendered":""},"modified":"2020-12-16T15:00:32","modified_gmt":"2020-12-16T07:00:32","slug":"gan%e5%9f%ba%e7%bb%9d%e7%bc%98%e6%a0%85hemt%e7%95%8c%e9%9d%a2%e5%a4%84%e7%90%86%e5%85%b3%e9%94%ae%e5%b7%a5%e8%89%ba%e6%b5%81%e7%a8%8b","status":"publish","type":"post","link":"http:\/\/www.szryc.com\/?p=3175","title":{"rendered":"GaN\u57fa\u7edd\u7f18\u6805HEMT\u754c\u9762\u5904\u7406\u5173\u952e\u5de5\u827a\u6d41\u7a0b"},"content":{"rendered":"

1. \u8868\u9762\u5316\u5b66\u6e05\u6d17<\/strong>

\n  \u5316\u5b66\u6e05\u6d17\u662f\u5e38\u7528\u7684\u534a\u5bfc\u4f53\u5668\u4ef6\u8868\u9762\u5904\u7406\u65b9\u6cd5\uff0c\u6709\u673a\u8bd5\u5242\u53ef\u4ee5\u53bb\u9664\u5668\u4ef6\u8868\u9762\u7684\u6cb9\u8102\u7b49\u6709\u673a\u7269\u6c61\u6e0d\uff0c\u800c\u9178\u3001\u78b1\u6eb6\u6db2\u5219\u53ef\u4ee5\u53bb\u9664\u8868\u9762\u6c27\u5316\u5c42\u7b49\u65e0\u673a\u6742\u8d28\u3002\u6805\u7edd\u7f18\u5c42\u6c89\u79ef\u524d\uff0c\u9996\u5148\u5728\u4e19\u916e\u548c\u4e59\u9187\u4e2d\u5206\u522b\u8d85\u58f0\u6e05\u6d173min\uff0c\u7136\u540e\u5728\u9178\u6027\u6216\u78b1\u6027\u6eb6\u6db2\u4e2d\u6d78\u6ce1\u79fb\u9664\u8868\u9762\u6c27\u5316\u5c42\uff0c\u6700\u540e\u7528\u53bb\u79bb\u5b50\u6c34\u51b2\u6d17\u5e76\u7528N2\u5439\u5e72\u3002\u4e3a\u4e86\u9632\u6b62\u7a7a\u6c14\u4e2d\u6c27\u548c\u78b3\u7b49\u6742\u8d28\u5bf9\u5668\u4ef6\u8868\u9762\u7684\u4e8c\u6b21\u6c61\u67d3\uff0c\u5316\u5b66\u6e05\u6d17\u7ed3\u675f\u540e\u7acb\u523b\u5c06\u6837\u54c1\u653e\u5165ALD\u53cd\u5e94\u8154\u4e2d\uff0c\u5e76\u6267\u884c\u8154\u4f53\u62bd\u771f\u7a7a\u7a0b\u5e8f\u3002

\n 

\n2. \u539f\u4f4d\u4f4e\u635f\u4f24\u7b49\u79bb\u5b50\u4f53\u9884\u5904\u7406<\/strong>

\n  \u867d\u7136\u5668\u4ef6\u8868\u9762\u5316\u5b66\u6e05\u6d17\u4e0e\u6837\u54c1\u8f7d\u5165\u53cd\u5e94\u8154\u4e24\u6b65\u5de5\u5e8f\u4e4b\u95f4\u95f4\u9694\u5f88\u77ed\uff0c\u6c2e\u5316\u7269\u8868\u9762\u4ecd\u6709\u53ef\u80fd\u5df2\u88ab\u7a7a\u6c14\u6742\u8d28\u6c61\u67d3\u3002\u4e3a\u4e86\u8fdb\u4e00\u6b65\u6d88\u9664\u8868\u9762\u6742\u8d28\u5bf9\u5668\u4ef6\u754c\u9762\u7279\u6027\u7684\u5f71\u54cd\uff0c\u672c\u7814\u7a76\u5728\u6805\u7edd\u7f18\u5c42\u6c89\u79ef\u4e4b\u524d\u91c7\u7528\u539f\u4f4d\u8868\u9762\u9878\u5904\u7406\u6280\u672f\uff0c\u4ee5\u4fdd\u8bc1\u6805\u7edd\u7f18\u5c42\u5728\u4f4e\u6742\u8d28\u542b\u91cf\u7684\u6c2e\u5316\u7269\u8868\u9762\u6c89\u79ef\u3002\u7b49\u79bb\u5b50\u4f53\u5904\u7406\u662f\u4e00\u79cd\u975e\u5e38\u6709\u6548\u7684\u8868\u800c\u5904\u7406\u65b9\u6cd5\uff0c\u4f46\u662fGaN\u57fa\u7edd\u7f18\u6805HEMT\u5668\u4ef6\u6c9f\u9053\u5bf9\u8868\u9762\u7279\u522b\u654f\u611f\uff0c\u7b49\u79bb\u5b50\u4f53\u8f70\u51fb\u53ef\u80fd\u5728\u8868\u9762\u4ea7\u751f\u7269\u7406\u635f\u4f24\uff0c\u4ece\u800c\u5bf9\u6c9f\u9053\u4ea7\u751f\u7535\u5b66\u635f\u4f24\uff0c\u4f7f\u5668\u4ef6\u6027\u80fd\u9000\u5316\u3002\u672c\u6587\u91c7\u7528\u8fdc\u7a0b\u7b49\u79bb\u5b50\u4f53\u8868\u9762\u5904\u7406\u6280\u672f\uff0c\u5373\u7b49\u79bb\u5b50\u53d1\u751f\u5668\u4e0e\u53cd\u5e94\u8154\u5ba4\u662f\u7a7a\u95f4\u9694\u79bb\u7684\uff0c\u5229\u7528\u6c14\u4f53\u5439\u626b\u5c06\u7b49\u79bb\u5b50\u4f53\u8f93\u8fd0\u81f3\u53cd\u5e94\u8154\u5ba4\u3002\u8fd9\u662f\u4e00\u79cd\u4f4e\u635f\u4f24\u7684\u7b49\u79bb\u5b50\u4f53\u6280\u672f\uff0c\u4ece\u800c\u907f\u514d\u4e86\u7b49\u79bb\u5b50\u4f53\u8f70\u51fb\u5f15\u8d77\u7684\u5668\u4ef6\u6027\u80fd\u9000\u5316\u3002

\n 

\n  \u56fe1\u7ed9\u51fa\u4e86\u539f\u4f4d\u8fdc\u7a0b\u7b49\u79bb\u5b50\u4f53\u9884\u5904\u7406\u5bf9Al2O3\/AlGaN\/ GaN MOS\u5f02\u8d28\u7ed3\u6784C-V\u66f2\u7ebf\u7684\u5f71\u54cd\u3002\u6837\u54c1\u8868\u9762\u5316\u5b66\u6e05\u6d17\u540e\uff0c\u653e\u5165PEALD\u8bbe\u5907\u53cd\u5e94\u8154\u5ba4\u4e2d\u8fdb\u884c\u539f\u4f4d\u7b49\u79bb\u4e86\u4f53\u8868\u9762\u9884\u5904\u7406\uff0c\u7136\u540e\u5728\u70ed\u578bALD\u6a21\u5f0f\u4e0b\u6c89\u79ef23nm\u539a\u7684Al2O3\u7edd\u7f18\u5c42\u3002\u9884\u5904\u7406RF\u529f\u7387\u8bbe\u7f6e\u4e3a200W\uff0c\u73af\u5883\u6c14\u4f53\u4e3a20sccm-NH3\/90sccm-N2\u6df7\u5408\u6c14\u4f53\uff0cAl2O3\u7edd\u7f18\u5c42\u6c89\u79ef\u524d\u8eaf\u4f53\u6e90\u4e3aTMA\u548cH2O\uff0c\u5de5\u827a\u6e29\u5ea6\u4e3a300\u2103\u3002C-V\u66f2\u7ebf\u91c7\u7528\u6c5e\u63a2\u9488\u8fde\u63a5C-V\u5206\u6790\u4eea\u6d4b\u5f97\uff0c\u5206\u522b\u6d4b\u8bd5\u4e86100KHz\u548c1MHz\u4e24\u4e2a\u9891\u7387\u70b9\u5904\u7684\u56de\u6ede\u66f2\u7ebf\u3002\u672a\u7ecf\u539f\u4f4d\u7b49\u79bb\u5b50\u4f53\u9884\u5904\u7406\u6837\u54c1\u7684\u66f2\u7ebf\u56de\u6ede\u5927\u4e8e0.5V\uff0c\u800c\u4e14100KHz\u4e0e1MHz\u4e4b\u95f4\u7684\u9608\u503c\u7535\u538b\u9891\u6563\u8d85\u8fc7\u4e861V\uff1b\u4f46\u662f\u91c7\u7528\u539f\u4f4d\u7b49\u79bb\u5b50\u4f53\u8868\u9762\u9884\u5904\u7406\u540e\uff0c\u66f2\u7ebf\u56de\u6ede\u5c0f\u4e8e0.1V\uff0c\u4e14\u9891\u6563\u5927\u5e45\u51cf\u5c0f\uff0c\u8fd9\u8bf4\u660e\u539f\u4f4d\u8868\u9762\u9884\u5904\u7406\u6709\u6548\u51cf\u5c11\u4e86\u754c\u9762\u7535\u8377\u3002\u53e6\u5916\u53ef\u4ee5\u6ce8\u610f\u5230\uff0c\u5bf9\u4e8e\u7ecf\u8fc7\u539f\u4f4d\u7b49\u79bb\u5b50\u4f53\u9884\u5904\u7406\u7684\u6837\u54c1\uff0cC-V\u66f2\u7ebf\u57281-2V\u8303\u56f4\u5185\u51fa\u73b0\u7b2c\u4e8c\u4e2a\u4e0a\u5347\u533a\u57df\uff0c\u8fd9\u5bf9\u5e94\u4e8eAl2O3\/\u6c2e\u5316\u7269\u754c\u9762\u7684\u7535\u8377\u79ef\u7d2f\uff1b\u800c\u5bf9\u4e8e\u672a\u7ecf\u539f\u4f4d\u7b49\u79bb\u5b50\u4f53\u8868\u9762\u9884\u5904\u7406\u7684\u6837\u54c1\uff0c\u5927\u91cf\u754c\u9762\u7535\u8377\u7684\u5b58\u5728\u8865\u507f\u4e86\u79ef\u7d2f\u5728Al2O3\/\u6c2e\u5316\u7269\u754c\u9762\u7684\u7535\u5b50\uff0c\u5bfc\u81f4\u57284V\u504f\u538b\u65f6\u4ecd\u672a\u51fa\u73b0C-V\u66f2\u7ebf\u7684\u7b2c\u4e8c\u4e2a\u4e0a\u5347\u533a\u57df\u3002<\/span><\/p>\n

\n\t\"\u539f\u4f4d\u7b49\u79bb\u5b50\u4f53\u9884\u5904\u7406\u5bf9Al2O3\/AlGaN\/GaN <\/span><\/div>\n
\n\t\u56fe1 \u539f\u4f4d\u7b49\u79bb\u5b50\u4f53\u9884\u5904\u7406\u5bf9Al2O3\/AlGaN\/GaN MOS\u5f02\u8d28\u7ed3\u6784C-V\u66f2\u7ebf\u7684\u5f71\u54cd<\/span><\/div>\n

 

\n  \u63a5\u4e0b\u6765\u6211\u4eec\u91c7\u7528XPS\u5206\u6790\u5bf9\u7b49\u79bb\u5b50\u4f53\u8868\u9762\u9884\u5904\u7406\u6280\u672f\u8fdb\u884c\u4e86\u66f4\u6df1\u5165\u7684\u7814\u7a76\uff0c\u6c2e\u5316\u7269\u5f02\u8d28\u7ed3\u8868\u9762\u7684Ga3d\u9ad8\u5206\u8fa8\u7387\u626b\u63cf\u7ed3\u679c\u5982\u56fe2\u6240\u793a\u3002\u7531\u4e8e\u7a7a\u6c14\u6c27\u5316\u7684\u539f\u56e0\uff0c(Al)GaN\u8868\u9762\u5b58\u5728\u4e00\u5c42\u8584\u7684\u6c27\u5316\u7269\uff0c\u6240\u4ee5\u56fe2(a)\u4e2d\u89c2\u5bdf\u5230\u4e86\u660e\u663e\u7684Ga-O\u952e\u5cf0\u3002\u91c7\u7528\u8fdc\u7a0b\u6c2e\u5316\u7b49\u79bb\u5b50\u4f53\u8868\u9762\u5904\u7406\u540e\uff0cGa-O\u952e\u76f8\u5bf9Ga-N\u952e\u7684\u542b\u91cf\u51cf\u5c11\uff0c\u8fd9\u6b63\u662fMOS\u5f02\u8d28\u7ed3\u6784\u754c\u9762\u7279\u6027\u6539\u5584\u7684\u539f\u56e0\u3002<\/span><\/p>\n

\n\t\"(a)\u672a\u5904\u7406\u548c(b)\u8fdc\u7a0b\u7b49\u79bb\u5b50\u4f53\u5904\u7406\u540eAlGaN\/GaN\u5f02\u8d28\u7ed3\u8868\u9762Ga3d\u9ad8\u5206\u8fa8\u7387XPS\u5206\u6790\" <\/span><\/div>\n
\n\t\u56fe2 (a)\u672a\u5904\u7406\u548c(b)\u8fdc\u7a0b\u7b49\u79bb\u5b50\u4f53\u5904\u7406\u540eAlGaN\/GaN\u5f02\u8d28\u7ed3\u8868\u9762Ga3d\u9ad8\u5206\u8fa8\u7387XPS\u5206\u6790<\/span><\/div>\n

 

\n3. \u70ed\u9000\u706b\u5904\u7406<\/strong>

\n  \u70ed\u9000\u706b\u5904\u7406\u662f\u534a\u5bfc\u4f53\u5668\u4ef6\u5de5\u827a\u4e2d\u5e38\u7528\u7684\u8584\u819c\u7f3a\u9677\u548c\u523b\u8680\u635f\u4f24\u4fee\u590d\u6280\u672f\uff0c\u53ef\u4ee5\u51cf\u5c11\u7edd\u7f18\u5c42\u4f53\u6750\u6599\u53ca\u5176\u4e0e\u534a\u5bfc\u4f53\u754c\u9762\u7684\u7f3a\u9677\u5bc6\u5ea6\u3002\u672c\u6587\u5229\u7528\u5feb\u901f\u70ed\u9000\u706b\u7089\u8fdb\u884c\u70ed\u5904\u7406\uff0c\u9000\u706b\u5904\u7406\u5728N2\u6c14\u6c1b\u4e2d\u8fdb\u884c\u3002\u56fe3\u7ed9\u51fa\u4e86600\u2103\u5feb\u901f\u70ed\u9000\u706b1min\u5bf9100KHz\u4e0b\u6d4b\u5f97\u7684Al2O3\/ AlGaN\/ GaN MOS\u5f02\u8d28\u7ed3\u6784C-V\u66f2\u7ebf\u7684\u5f71\u54cd\u3002\u70ed\u9000\u706b\u5904\u7406\u4f7fC-V\u66f2\u7ebf\u56de\u6ede\u8fdb\u4e00\u6b65\u51cf\u5c0f\uff0c\u5e76\u5bfc\u81f4\u66f2\u7ebf\u6574\u4f53\u6b63\u5411\u6f02\u79fb\u7ea61V\uff0c\u8bf4\u660eRTA\u5904\u7406\u5927\u5e45\u51cf\u5c11\u4e86\u7edd\u7f18\u5c42\u4f53\u6750\u6599\u7f3a\u9677\u548c\u754c\u9762\u7535\u8377\u3002\u53e6\u5916\uff0cRTA\u5904\u7406\u540e\u79ef\u7d2f\u533a\u7535\u5bb9\u503c\u5347\u9ad8\uff0c\u8fd9\u662f\u56e0\u4e3a\u70ed\u9000\u706b\u63d0\u9ad8\u4e86\u7edd\u7f18\u5c42\u6750\u6599\u8d28\u91cf\uff0c\u4ecb\u7535\u5e38\u6570\u589e\u5927\u3002<\/span><\/p>\n

\n\t\"\u70ed\u9000\u706b\u5904\u7406\u5bf9Al2O3\/AlGaN\/GaN <\/span><\/div>\n
\n\t\u56fe3 \u70ed\u9000\u706b\u5904\u7406\u5bf9Al2O3\/AlGaN\/GaN MOS\u5f02\u8d28\u7ed3\u6784C-V\u66f2\u7ebf\u7684\u5f71\u54cd<\/span><\/div>\n

 

\n  \u6805\u91d1\u5c5e\u540e\u9000\u706b(PMA)\u5904\u7406\u6539\u5584\u4e86MIS-HEMT\u5668\u4ef6\u6f0f\u7535\u548c\u754c\u9762\u7279\u6027\u3002PMA\u5904\u7406\u65f6\uff0c\u70ed\u9000\u706b\u4e0d\u4ec5\u5bf9\u6805\u7edd\u7f18\u5c42\u6750\u6599\u548c\u7edd\u7f18\u5c42\/\u534a\u5bfc\u4f53\u754c\u9762\u4ea7\u751f\u5f71\u54cd\uff0c\u8fd8\u6709\u53ef\u80fd\u4f1a\u5f71\u54cd\u5230\u6805\u91d1\u5c5e\u63a5\u89e6\u7279\u6027\uff0c\u6240\u4ee5\u672c\u7814\u5b84\u5229\u7528\u8096\u7279\u57fa\u67f5HEMT\u5668\u4ef6\u7ed3\u6784\u5206\u6790\u4e86\u70ed\u9000\u706b\u5bf9\u6805\u91d1\u5c5e\u63a5\u89e6\u7279\u6027\u7684\u5f71\u54cd\u3002\u7814\u7a76\u4e2d\u91c7\u7528\u7684\u5f02\u8d28\u7ed3\u6750\u6599\u52bf\u5792\u5c42\u4e3a12nm-Al0.55<\/sub>Ga0.45<\/sub>N\uff0c\u6805\u91d1\u5c5e\u5316\u540e\u9000\u706b\u6e29\u5ea6\u8bbe\u5b9a\u4e3a450\u2103\uff0c\u9632\u6b62\u6e29\u5ea6\u8fc7\u9ad8\u5bfc\u81f4\u6805\u63a5\u89e6\u9000\u5316\uff0c\u5904\u7406\u65f6\u95f4\u4e3a2min\u3002<\/span><\/p>\n

\n\t\"PMA\u5904\u7406\u5bf9Al0.55Ga0.45N\/GaN <\/span><\/div>\n
\n\t\u56fe4 PMA\u5904\u7406\u5bf9Al0.55<\/sub>Ga0.45<\/sub>N\/GaN HEMT\u5668\u4ef6(a)\u6f0f\u7535\u548c(b)\u51fb\u7a7f\u7279\u6027\u7684\u5f71\u54cd<\/span><\/div>\n

 

\n  \u56fe4\u7ed9\u51fa\u4e86PMA\u5904\u7406\u5bf9\u5668\u4ef6\u6f0f\u7535\u548c\u51fb\u7a7f\u7279\u6027\u7684\u5f71\u54cd\u3002PMA\u5904\u7406\u4f7f\u5668\u4ef6\u6b63\u53cd\u5411\u5173\u6001\u6805\u6f0f\u7535\u964d\u4f4e\u4e86\u4e24\u4e2a\u6570\u91cf\u7ea7\uff0c\u6805\u6f0f\u7535\u7684\u51cf\u5c0f\u4e5f\u4f7f\u5668\u4ef61mA\/mm\u51fb\u7a7f\u7535\u538b\u4ece90V\u63d0\u9ad8\u5230\u4e86140V\u3002\u6805\u6f0f\u7535\u964d\u4f4e\u548c\u51fb\u7a7f\u7279\u6027\u63d0\u9ad8\u5f97\u76ca\u4e8e\u754c\u9762\u7279\u6027\u7684\u6539\u5584\uff0c\u8fd9\u53ef\u4ee5\u4ecePMA\u5904\u7406\u540e\u5668\u4ef6\u4e9a\u9608\u503c\u7279\u6027\u7684\u6539\u5584\u5f97\u5230\u9a8c\u8bc1\uff0c\u5982\u56fe5\u6240\u793a\u3002PMA\u5904\u7406\u4f7fHEMT\u5668\u4ef6\u4e9a\u9608\u503c\u7535\u6d41\u51cf\u5c0f\uff0c\u8f6c\u79fb\u66f2\u7ebf\u6b63\u5411\u6f02\u79fb0.21V\u3002\u6839\u636e\u4ee5\u4e0b\u8868\u8fbe\u5f0f<\/span><\/p>\n

\n\t\"\u8ba1\u7b97\u516c\u5f0f\" <\/span><\/div>\n

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