{"id":3146,"date":"2020-09-24T07:36:01","date_gmt":"2020-09-24T07:36:01","guid":{"rendered":""},"modified":"2020-09-24T15:37:32","modified_gmt":"2020-09-24T07:37:32","slug":"%e9%ab%98%e5%8f%af%e9%9d%a0%e6%80%a7gpp%e8%8a%af%e7%89%87%e5%88%b6%e5%a4%87%e6%96%b9%e6%b3%95%e4%b8%8e%e6%b5%81%e7%a8%8b","status":"publish","type":"post","link":"http:\/\/www.szryc.com\/?p=3146","title":{"rendered":"\u9ad8\u53ef\u9760\u6027GPP\u82af\u7247\u5236\u5907\u65b9\u6cd5\u4e0e\u6d41\u7a0b"},"content":{"rendered":"

\n\t\u672c\u53d1\u660e\u6d89\u53ca\u534a\u5bfc\u4f53\u82af\u7247\u6280\u672f\u9886\u57df\uff0c\u5177\u4f53\u6d89\u53ca\u4e00\u79cd\u9ad8\u53ef\u9760\u6027\u73bb\u7483\u949d\u5316(GPP)\u82af\u7247\u5236\u5907\u65b9\u6cd5\u3002<\/p>\n

\n\t

\n\t

\n\t\u80cc\u666f\u6280\u672f\uff1a<\/span><\/p>\n

\n\tGPP(\u73bb\u7483\u949d\u5316)\u82af\u7247\u662f\u76ee\u524d\u9ad8\u65b0\u6280\u672f\u7684\u4e3b\u6d41\u3002GPP\u5de5\u827a\u5206\u4e3a\u4e09\u79cd\u5de5\u827a\u5b9e\u73b0\u65b9\u6cd5\uff1a\u2460\u5200\u522e\u6cd5\u2461\u5149\u963b\u6cd5\u2462\u7535\u6cf3\u6cd5\uff0c\u7136\u800c\u8fd9\u4e09\u79cd\u65b9\u6cd5\u5747\u6709\u4f18\u7f3a\u70b9\uff0c\u5200\u522e\u6cd5\u6210\u672c\u4f4e\u4f46\u6f0f\u7535\u4e0d\u5747\u5300\uff1b\u5149\u963b\u6cd5\u53c2\u6570\u4e00\u81f4\u6027\u867d\u8f83\u597d\u4f46\u6210\u672c\u8f83\u9ad8\uff1b\u7535\u6cf3\u6cd5\u4e00\u6b21\u6027\u6295\u8d44\u5927\uff0c\u73af\u4fdd\u6210\u672c\u9ad8\uff0c\u5e9f\u5f03\u7269\u4e0d\u6613\u5904\u7406\u3002<\/p>\n

\n\t\u76ee\u524d\u5bf9\u534a\u5bfc\u4f53\u8868\u9762\u949d\u5316\u7684\u8981\u6c42\u8d8a\u6765\u8d8a\u9ad8\uff0cGPP\u82af\u7247\u5e94\u5177\u5907\uff1a1\u3001\u826f\u597d\u7684\u7535\u6c14\u6027\u80fd\u548c\u53ef\u9760\u6027\uff0c\u5305\u62ec\u7535\u963b\u7387\u3001\u4ecb\u7535\u5f3a\u5ea6\u3001\u79bb\u5b50\u8fc1\u79fb\u7387\u7b49\uff0c\u6750\u6599\u7684\u5f15\u5165\u4e0d\u5e94\u7ed9\u5668\u4ef6\u5e26\u6765\u526f\u4f5c\u7528\uff1b\u4e8c\u662f\u826f\u597d\u7684\u5316\u5b66\u7a33\u5b9a\u6027\uff0c\u5177\u6709\u4e00\u5b9a\u7684\u6297\u5316\u5b66\u8150\u8680\u80fd\u529b\uff1b\u4e09\u662f\u53ef\u64cd\u4f5c\u6027\uff0c\u5de5\u827a\u7b80\u5355\u3001\u91cd\u590d\u6027\u597d\uff0c\u80fd\u4e0e\u5668\u4ef6\u5236\u9020\u5de5\u827a\u76f8\u5bb9\uff0c\u6750\u6599\u7684\u81a8\u80c0\u7cfb\u6570\u8981\u4e0e\u7845\u6750\u6599\u76f8\u4e00\u81f4\u6216\u63a5\u8fd1\uff1b\u56db\u662f\u7ecf\u6d4e\u6027\uff0c\u53ef\u5927\u6279\u91cf\u751f\u4ea7\uff0c\u5236\u9020\u6210\u672c\u8981\u4f4e\uff0c\u6709\u5e02\u573a\u7ade\u4e89\u529b\uff0c\u6750\u6599\u548c\u5de5\u827a\u6709\u5f3a\u5927\u7684\u751f\u547d\u529b\u548c\u5f00\u53d1\u6f5c\u529b\u3002\u7136\u800c\u73b0\u5728\u5e02\u9762\u4e0a\u7684\u65b9\u6cd5\u5236\u5907\u7684GPP\u82af\u7247\u5b58\u5728\u8fd9\u6837\u90a3\u6837\u7684\u95ee\u9898\uff0c\u4e0d\u80fd\u6ee1\u8db3\u9700\u8981\u3002
\n\t\u6280\u672f\u7279\u5f81\uff1a<\/span><\/p>\n

\n\t1.\u4e00\u79cd\u9ad8\u53ef\u9760\u6027GPP\u82af\u7247\u5236\u5907\u65b9\u6cd5\uff0c\u5176\u7279\u5f81\u5728\u4e8e\uff0c\u5305\u62ec\u5982\u4e0b\u6b65\u9aa4\uff1a<\/p>\n

\n\t1)\u5c06\u6269\u6563\u597d\u7684PN\u7ed3\u7845\u7247\u4e0a\u6d82\u4e0a\u5149\u523b\u80f6\uff1b<\/p>\n

\n\t2)\u91c7\u7528HF:HNO3:HAC\u6df7\u5408\u7684\u8150\u8680\u6db2\u8fdb\u884c\u8150\u8680\u6c9f\u69fd\uff1b<\/p>\n

\n\t3)\u91c7\u7528LPCVD\u751f\u957f\u65b9\u5f0f\u5728\u6c9f\u69fd\u5185\u8fdb\u884c\u63ba\u6c27\u63ba\u6c2e\uff1b<\/p>\n

\n\t4)\u522e\u6d82\u73bb\u7483\u7c89\uff0c\u70e7\u7ed3\u73bb\u7483\uff1b<\/p>\n

\n\t5)\u5728\u6b65\u9aa44)\u70e7\u7ed3\u540e\u91c7\u7528PECVD\u751f\u957f\u8f6fSi3N4\uff1b<\/p>\n

\n\t6)\u8fdb\u884c\u4e8c\u6b21\u5149\u523b\u5e76\u9540Ni\uff0c\u7136\u540e\u9540Ni-Si\u5408\u91d1\uff0c\u9540\u5b8cNi-Si\u5408\u91d1\u540e\u518d\u6b21\u9540Ni\uff1b<\/p>\n

\n\t7)\u6d4b\u8bd5\uff1b<\/p>\n

\n\t8)\u80cc\u9762\u6fc0\u5149\u5212\u7247\u3002<\/p>\n

\n\t2.\u5982\u6743\u5229\u8981\u6c421\u6240\u8ff0\u7684\u9ad8\u53ef\u9760\u6027GPP\u82af\u7247\u5236\u5907\u65b9\u6cd5\uff0c\u5176\u7279\u5f81\u5728\u4e8e\uff0c\u6240\u8ff0\u6b65\u9aa42)\u4e2dHF:HNO3:HAC\u7684\u4f53\u79ef\u6bd4\u4e3a0.8\uff5e1.2:0.8\uff5e1.2:1.8\uff5e2.2\uff0c\u6240\u8ff0HF\u3001HNO3\u3001HAC\u7684\u8d28\u91cf\u5206\u6570\u6d53\u5ea6\u5206\u522b\u4e3a40\uff5e45\uff05\u300183\uff5e93\uff05\u300133\uff5e45\uff05\u3002<\/p>\n

\n\t3.\u5982\u6743\u5229\u8981\u6c421\u6240\u8ff0\u7684\u9ad8\u53ef\u9760\u6027GPP\u82af\u7247\u5236\u5907\u65b9\u6cd5\uff0c\u5176\u7279\u5f81\u5728\u4e8e\uff0c\u6240\u8ff0\u6b65\u9aa43)\u91c7\u7528LPCVD\u751f\u957f\u65b9\u5f0f\u5728\u6c9f\u69fd\u5185\u8fdb\u884c\u63ba\u6c27\u63ba\u6c2e\u7684\u6761\u4ef6\u4e3a650\u2103\uff5e750\u2103\uff0c<\/p>\n

\n\t4.\u5982\u6743\u5229\u8981\u6c421\u6240\u8ff0\u7684\u9ad8\u53ef\u9760\u6027GPP\u82af\u7247\u5236\u5907\u65b9\u6cd5\uff0c\u5176\u7279\u5f81\u5728\u4e8e\uff0c\u6240\u8ff0\u6b65\u9aa44)\u5728820\u2103\uff5e850\u2103\uff0cN2+O2\u6761\u4ef6\u4e0b\u8fdb\u884c\u70e7\u7ed3\u73bb\u7483\u3002<\/p>\n

\n\t5.\u5982\u6743\u5229\u8981\u6c421\u6240\u8ff0\u7684\u9ad8\u53ef\u9760\u6027GPP\u82af\u7247\u5236\u5907\u65b9\u6cd5\uff0c\u5176\u7279\u5f81\u5728\u4e8e\uff0c\u6240\u8ff0\u6b65\u9aa45)PECVD\u7684\u5de5\u4f5c\u6761\u4ef6\u4e3a380\u2103\uff5e420\u2103\uff0c<\/p>\n

\n\t6.\u5982\u6743\u5229\u8981\u6c421\u6240\u8ff0\u7684\u9ad8\u53ef\u9760\u6027GPP\u82af\u7247\u5236\u5907\u65b9\u6cd5\uff0c\u5176\u7279\u5f81\u5728\u4e8e\uff0c\u6240\u8ff0\u6b65\u9aa46)\u4e2d\u5728580\uff5e620\u2103\u3001N2+H2\u6761\u4ef6\u4e0b\u9540Ni-Si\u5408\u91d1\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

\u672c\u53d1\u660e\u6d89\u53ca\u534a\u5bfc\u4f53\u82af\u7247\u6280\u672f\u9886\u57df\uff0c\u5177\u4f53\u6d89\u53ca\u4e00\u79cd\u9ad8\u53ef\u9760\u6027\u73bb\u7483\u949d\u5316(GPP)\u82af\u7247\u5236\u5907\u65b9\u6cd5\u3002 \u80cc\u666f\u6280\u672f\uff1a GPP(\u73bb\u7483\u949d\u5316)\u82af\u7247\u662f\u76ee\u524d\u9ad8\u65b0\u6280\u672f\u7684\u4e3b\u6d41\u3002GPP\u5de5\u827a\u5206\u4e3a\u4e09\u79cd\u5de5\u827a\u5b9e\u73b0\u65b9\u6cd5\uff1a\u2460\u5200\u522e\u6cd5\u2461<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[13],"tags":[],"_links":{"self":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/3146"}],"collection":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=3146"}],"version-history":[{"count":0,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/3146\/revisions"}],"wp:attachment":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=3146"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=3146"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=3146"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}