{"id":3086,"date":"2020-06-05T02:26:13","date_gmt":"2020-06-05T02:26:13","guid":{"rendered":""},"modified":"2020-06-05T10:26:42","modified_gmt":"2020-06-05T02:26:42","slug":"%e5%8e%9f%e5%ad%90%e7%ba%a7%e5%b7%a5%e8%89%ba%e5%ae%9e%e7%8e%b0%e7%ba%b3%e7%b1%b3%e7%ba%a7%e5%9b%be%e5%bd%a2%e7%bb%93%e6%9e%84%e7%9a%84%e8%a6%81%e6%b1%82","status":"publish","type":"post","link":"http:\/\/www.szryc.com\/?p=3086","title":{"rendered":"\u539f\u5b50\u7ea7\u5de5\u827a\u5b9e\u73b0\u7eb3\u7c73\u7ea7\u56fe\u5f62\u7ed3\u6784\u7684\u8981\u6c42"},"content":{"rendered":"

\n\t\u3000\u539f\u5b50\u5c42\u523b\u8680\u548c\u6c89\u79ef\u5de5\u827a\u5229\u7528\u81ea\u9650\u6027\u53cd\u5e94\uff0c\u63d0\u4f9b\u539f\u5b50\u7ea7\u63a7\u5236\u3002\u6cdb\u6797\u96c6\u56e2\u5148\u8fdb\u6280\u672f\u53d1\u5c55\u4e8b\u4e1a\u90e8\u516c\u53f8\u526f\u603b\u88c1\u6f58\u9633\u535a\u58eb\u5206\u4eab\u4e86\u4ed6\u5bf9\u8fd9\u4e2a\u8bdd\u9898\u7684\u770b\u6cd5\u3002<\/p>\n

\n\t\u3000\u3000<\/p>\n

\n\t <\/div>\n

\n\t\"\u539f\u5b50\u7ea7\u5de5\u827a\u5b9e\u73b0\u7eb3\u7c73\u7ea7\u56fe\u5f62\u7ed3\u6784\u7684\u8981\u6c42\"<\/p>\n

\n\t\u3000\u3000\u56fe 1. \u539f\u5b50\u5c42\u5de5\u827a\u4e2d\u7684\u6240\u6709\u534a\u5468\u671f\u53cd\u5e94\u662f\u81ea\u9650\u6027\u53cd\u5e94\u3002<\/p>\n

\n\t\u3000\u3000\u6280\u672f\u8282\u70b9\u7684\u6bcf\u6b21\u8fdb\u6b65\u90fd\u8981\u6c42\u5bf9\u5236\u9020<\/u>\u5de5\u827a\u53d8\u5316\u8fdb\u884c\u66f4\u4e25\u683c\u7684\u63a7\u5236\u3002\u6700\u5148\u8fdb\u7684\u5de5\u827a\u73b0\u5728\u53ef\u4ee5\u8fbe\u5230\u4ec57 nm\u7684fin\u5bbd\u5ea6\uff0c\u6bd430\u4e2a\u7845\u539f\u5b50\u7a0d\u5927\u4e00\u70b9\u3002\u534a\u5bfc\u4f53\u5236\u9020\u5df2\u7ecf\u8de8\u8d8a\u4e86\u4ece\u7eb3\u7c73\u7ea7\u5230\u539f\u5b50\u7ea7\u5de5\u827a\u7684\u95e8\u69db\u3002\u5de5\u7a0b\u5e08\u73b0\u5728\u5fc5\u987b\u5173\u6ce8\u7ed3\u6784\u7684\u5c3a\u5bf8\u53d8\u5316\uff0c\u4ec5\u76f8\u5f53\u4e8e\u51e0\u4e2a\u539f\u5b50\u5927\u5c0f\u3002\u7531\u4e8e\u591a\u91cd\u56fe\u6848\u6a21\u5f0f\u7b49\u590d\u6742\u96c6\u6210\u589e\u52a0\u4e86\u5de5\u827a\u6570\u91cf\uff0c\u8fdb\u4e00\u6b65\u9650\u5236\u4e86\u6bcf\u4e2a\u6b65\u9aa4\u5141\u8bb8\u7684\u53d8\u5316\u30023D NAND\u548cfinFET\u7ed3\u6784\u7684\u590d\u6742\u6027\u4f1a\u5e26\u6765\u66f4\u9ad8\u6311\u6218\u3002<\/p>\n

\n\t\u3000\u3000<\/p>\n

\n\t\"\u539f\u5b50\u7ea7\u5de5\u827a\u5b9e\u73b0\u7eb3\u7c73\u7ea7\u56fe\u5f62\u7ed3\u6784\u7684\u8981\u6c42\"<\/p>\n

\n\t\u3000\u3000\u56fe 2. \u539f\u5b50\u5c42\u5de5\u827a\u80fd\u591f\u53bb\u9664\u6216\u6c89\u79ef\u6750\u6599\u3002\u5728\u4ee5\u4e0a\u523b\u8680\u793a\u4f8b\u4e2d\uff0c\u6c2f\u5438\u9644\u5230\u7845\u8868\u9762\uff0c\u7136\u540e\u901a\u8fc7\u6c29\u79bb\u5b50\u649e\u51fb\u53bb\u9664\u6539\u6027\u5c42\u3002\u5728\u6c89\u79ef\u793a\u4f8b\u4e2d\uff0c\u6c27\u5438\u9644\u5230\u7845\u8868\u9762\uff0c\u7845\u4e0e\u6539\u6027\u8868\u9762\u5c42\u76f8\u7ed3\u5408\uff0c\u6c89\u79ef\u4e8c\u6c27\u5316<\/u>\u7845\u3002<\/p>\n

\n\t\u3000\u3000\u5bf9\u4e8e\u534a\u5bfc\u4f53\u884c\u4e1a\u800c\u8a00\uff0c\u63a7\u5236\u5de5\u827a\u53d8\u5316\u59cb\u7ec8\u90fd\u662f\u4e00\u5927\u5173\u952e\u6311\u6218\uff0c\u56e0\u4e3a\u5b83\u4f1a\u76f4\u63a5\u5f71\u54cd\u5230\u4ea7\u54c1\u7684\u6027\u80fd\u3001\u826f\u7387\u548c\u53ef\u9760\u6027\uff0c\u8fdb\u800c\u4ea7\u751f\u91cd\u5927\u7ecf\u6d4e\u540e\u679c\u3002\u5de5\u827a\u8bf1\u751f\u7684\u53d8\u5316\u6709\u591a\u4e2a\u6765\u6e90\uff0c\u5305\u62ec\u6676\u7c92\u3001\u6676\u5706\u548c\u5de5\u5177\u3002\u8981\u63a7\u5236\u8fd9\u4e9b\u53d8\u5316\uff0c\u4e00\u79cd\u65b9\u5f0f\u662f\u901a\u8fc7\u8fd0\u7528\u539f\u5b50\u5c42\u6c89\u79ef \uff08ALD\uff09 \u548c\u539f\u5b50\u5c42\u523b\u8680 \uff08ALE\uff09 \u7b49\u6280\u672f\uff0c\u8fd9\u4e9b\u6280\u672f\u672c\u8eab\u6bd4\u4f20\u7edf\u7b49\u79bb\u5b50\u4f53\u65b9\u6cd5\u66f4\u52a0\u7cbe\u786e\u3002<\/p>\n

\n\t\u3000\u3000\u539f\u5b50\u5c42\u5de5\u827a<\/strong><\/p>\n

\n\t\u3000\u3000\u539f\u5b50\u5c42\u5de5\u827a\u5305\u62ec\u6c89\u79ef\u548c\u523b\u8680\u89e3\u51b3\u65b9\u6848\uff0c\u5b83\u4eec\u5177\u6709\u4e00\u4e9b\u5171\u540c\u7684\u7279\u5f81\u3002\u4e0e\u8fde\u7eed\u5de5\u827a\u4e0d\u540c\uff0c\u5b83\u4eec\u5206\u5468\u671f\u8fdb\u884c\uff0c\u6bcf\u4e2a\u5468\u671f\u90fd\u4f1a\u6dfb\u52a0\u6216\u53bb\u9664\u6709\u9650\u56fa\u5b9a\u6570\u91cf\u7684\u5206\u5b50\u5c42\u3002\u6bcf\u4e2a\u5468\u671f\u53c8\u5206\u4e3a\u82e5\u5e72\u534a\u5468\u671f\uff0c\u6bcf\u4e2a\u534a\u5468\u671f\u5206\u522b\u662f\u4e0d\u540c\u7684\u81ea\u9650\u6027\u5de5\u827a\uff0c\u4e3a\u4e0b\u4e2a\u534a\u5468\u671f\u51c6\u5907\u8868\u9762\u3002\u4f8b\u5982\uff0c\u5728 SiO2 \u6c89\u79ef\u4e2d\uff08\u56fe1\u548c2\uff09\uff0c\u7b2c\u4e00\u4e2a\u534a\u5468\u671f\u4f1a\u5438\u9644\u6c27\u539f\u5b50\uff0c\u8fd9\u4e2a\u8fc7\u7a0b\u662f\u81ea\u9650\u6027\u7684\uff0c\u53d7\u5230\u7ed3\u5408\u4f4d\u70b9\u7684\u9650\u5236\u3002\u7136\u540e\uff0c\u591a\u4f59\u7684\u6c27\u88ab\u4ece\u8154\u5ba4\u4e2d\u6e05\u9664\uff0c\u8868\u9762\u66b4\u9732\u5728\u7845\u539f\u5b50\u6e90\u4e0b\uff0c\u7845\u539f\u5b50\u4e0e\u5438\u9644\u7684\u6c27\u53d1\u751f\u53cd\u5e94\uff0c\u5f62\u6210\u4e00\u5c42 SiO2\u3002\u8fd9\u4e2a\u534a\u5468\u671f\u5de5\u827a\u4e5f\u662f\u81ea\u9650\u6027\u7684\uff0c\u5728\u8fd9\u79cd\u60c5\u51b5\u4e0b\uff0c\u5b83\u53d7\u5230\u6c27\u7684\u9650\u5236\u3002\u539f\u5b50\u5c42\u6c89\u79ef\u7684\u81ea\u9650\u548c\u6709\u5e8f\u7684\u7279\u6027\u5728\u5148\u8fdb\u903b\u8f91\u548c\u5b58\u50a8\u5668<\/u>\u82af\u7247HVM\u4e2d\u5f97\u5230\u4e86\u5e7f\u6cdb\u5e94\u7528\u3002<\/p>\n

\n\t\u3000\u3000\u4e0e\u6c89\u79ef\u6280\u672f\u76f8\u540c\uff0c\u539f\u5b50\u5c42\u523b\u8680\u540c\u6837\u5206\u4e3a\u82e5\u5e72\u534a\u5468\u671f\u8fdb\u884c\uff0c\u8fd9\u4e9b\u534a\u5468\u671f\u4e5f\u662f\u81ea\u9650\u6027\u7684\u3002\u4f8b\u5982\uff0c\u5728\u7845\u523b\u8680\u5de5\u827a\u4e2d\uff0c\u7b2c\u4e00\u4e2a\u534a\u5468\u671f\u5c06\u7845\u8868\u9762\u66b4\u9732\u5728\u6c2f\u4e0b\uff0c\u6c2f\u4e0e\u7b2c\u4e00\u5c42\u7845\u539f\u5b50\u7ed3\u5408\uff0c\u5f31\u5316\u5b83\u4eec\u4e0e\u5e95\u5c42\u539f\u5b50\u7684\u952e\u5408\uff08\u56fe2\uff09\u3002\u5f53\u8868\u9762\u9971\u548c\u65f6\uff0c\u8be5\u8fc7\u7a0b\u505c\u6b62\uff0c\u7136\u540e\u6e05\u9664\u672a\u4f7f\u7528\u7684\u6c2f\u3002\u7b2c\u4e8c\u4e2a\u534a\u5468\u671f\u4f7f\u7528\u6c29\u79bb\u5b50\u6765\u649e\u51fb\u6539\u6027\u8868\u9762\uff0c\u53bb\u6389\u6c2f\u6fc0\u6d3b\u7684\u7845\u9876\u5c42\uff0c\u800c\u4e0d\u662f\u5e95\u5c42\u7845\u3002\u6c2f\u5316\u5c42\u53bb\u6389\u4e4b\u540e\uff0c\u5468\u671f\u5b8c\u6210\uff0c\u8584\u6750\u6599\u5c42\u5df2\u7cbe\u786e\u53bb\u9664\u3002<\/p>\n

\n\t\u3000\u3000\u8fc7\u53bb\uff0c\u8981\u5c06\u539f\u5b50\u5c42\u523b\u8680\u5de5\u827a\u96c6\u6210\u5230\u5927\u89c4\u6a21\u534a\u5bfc\u4f53\u751f\u4ea7\u4e2d\uff0c\u6211\u4eec\u4f1a\u53d7\u5236\u4e8e\u76f8\u5bf9\u8fde\u7eed\u523b\u8680\u5de5\u827a\u6765\u8bf4\u8f83\u4f4e\u7684\u523b\u8680\u901f\u7387\u3002\u4ee5\u4e0b\u4e24\u4e2a\u56e0\u7d20\u7ed3\u5408\u5728\u4e00\u8d77\uff0c\u51cf\u5c11\u4e86\u8f83\u4f4e\u523b\u8680\u901f\u7387\u5bf9\u6574\u4f53\u4ea7\u91cf\u7684\u5f71\u54cd\u3002\u7b2c\u4e00\u4e2a\u56e0\u7d20\u662f\u7279\u5f81\u5c3a\u5bf8\u6301\u7eed\u51cf\u5c0f\uff0c\u4ece\u800c\u51cf\u5c11\u4e86\u8981\u53bb\u9664\u7684\u6750\u6599\u6570\u91cf\uff0c\u4ee5\u53ca\u6240\u9700\u7684ALE\u5468\u671f\u6570\u3002\u7b2c\u4e8c\u4e2a\u56e0\u7d20\u662fALE\u6280\u672f\u7684\u8fdb\u6b65\uff0c\u4f8b\u5982\u5feb\u901f\u6c14\u4f53\u4ea4\u6362\u6280\u672f\uff0c\u5b83\u4eec\u663e\u8457\u63d0\u9ad8\u4e86\u5faa\u73af\u901f\u5ea6\u3002\u968f\u7740\u6211\u4eec\u8d8a\u6765\u8d8a\u591a\u5730\u9700\u8981\u5bf9\u8f83\u5c0f\u7ed3\u6784\u5b9e\u73b0\u539f\u5b50\u7ea7\u63a7\u5236\uff0c\u8fd9\u79cd\u6280\u672f\u5f15\u8d77\u4e86\u66f4\u591a\u5173\u6ce8\u3002\u539f\u5b50\u5c42\u523b\u8680\u8fd8\u63d0\u4f9b\u4e86\u5176\u4ed6\u4e00\u4e9b\u91cd\u8981\u4f18\u52bf\uff0c\u5305\u62ec\u6539\u8fdb\u7684\u65b9\u5411\u6027\uff08\u5f02\u5411\u6027\uff09\u3001\u66f4\u5149\u6ed1\u7684\u8868\u9762\u3001\u66f4\u597d\u7684\u6750\u6599\u9009\u62e9\u6027\u3001\u66f4\u5747\u5300\u7684\u523b\u8680\u8868\u9762\u3001\u8f83\u5c11\u7684\u8868\u9762\u635f\u574f\u548c\u6df7\u5408\uff0c\u6d88\u9664\u4e86\u56fe\u6848\u5bc6\u5ea6\u5f15\u8d77\u7684\u975e\u5747\u5300\u6548\u5e94\uff0c\u5e76\u6539\u8fdb\u4e86\u6676\u5706\u95f4\u7684\u5747\u5300\u6027\u3002<\/p>\n

\n\t\u3000\u3000\u521b\u65b0\u7684\u539f\u5b50\u5c42\u523b\u8680\u4e0e\u539f\u5b50\u5c42\u6c89\u79ef\u6280\u672f\u89e3\u51b3\u65b9\u6848<\/h2>\n

\n\t\u3000\u3000EUV<\/u> \u5149\u523b\u6280\u672f\u4e2d\u7684\u968f\u673a\u7f3a\u9677<\/strong><\/p>\n

\n\t\u3000\u3000\u57287nm\u548c10nm\u8282\u70b9\u91c7\u7528EUV\u5149\u523b\u6280\u672f\u7684\u5236\u9020\u5546\u9762\u4e34\u7740\u968f\u673a\u7f3a\u9677\u7684\u6311\u6218\u3002EUV\u5149\u7684\u8f83\u77ed\u6ce2\u957f\u4f7f\u5176\u80fd\u591f\u805a\u7126\u81f3\u66f4\u7cbe\u7ec6\u56fe\u6848\uff0c\u4f46\u4e5f\u610f\u5473\u7740\u6bcf\u4e2a\u5149\u5b50\u5177\u6709\u66f4\u591a\u80fd\u91cf\uff0c\u4ea7\u751f\u66f4\u591a\u5149\u81f4\u9178\uff0c\u540c\u65f6\u66dd\u5149\u66f4\u5927\u91cf\u7684\u5149\u523b\u80f6\u3002EUV\u7cfb\u7edf\u975e\u5e38\u6602\u8d35\uff0c\u800c\u4e14\u5fc5\u987b\u5b9e\u73b0\u8f83\u9ad8\u7684\u4ea7\u91cf\u624d\u80fd\u5728\u6210\u672c\u57fa\u7840\u4e0a\u4e0e\u4f20\u7edf \uff08i193\uff09 \u5149\u523b\u6280\u672f\u8fdb\u884c\u7ade\u4e89\uff0c\u56e0\u6b64\u5b83\u4eec\u91c7\u7528\u77ed\u66dd\u5149\u3001\u4f4e\u5149\u5b50\u5242\u91cf\u4ee5\u53ca\u4ee5\u6700\u5c0f\u91cf\u5149\u5b50\u5c31\u53ef\u4ee5\u5b9e\u73b0\u66dd\u5149\u7684\u5316\u5b66\u653e\u5927\u5149\u523b\u80f6\uff08CAR\uff09\u3002\u5149\u523b\u80f6\u4e2d\u5149\u5b50\u4e0e\u5149\u81f4\u9178\u5728\u7a7a\u95f4\u4e0e\u65f6\u95f4\u5206\u5e03\u4e0a\u7684\u968f\u673a\u53d8\u5316\u6027\u4f1a\u5bfc\u81f4\u968f\u673a\u7f3a\u9677\uff0c\u8fd9\u672c\u8d28\u4e0a\u662f\u4e00\u79cd\u7edf\u8ba1\u5757\u5ea6\uff0c\u5728\u5df2\u521b\u5efa\u7684\u5149\u523b\u80f6\u56fe\u6848\u4e2d\u4f53\u73b0\u4e3a\u8fb9\u7f18\u548c\u8868\u9762\u7c97\u7cd9\u5ea6\u3002\u5706\u5f62\u8fb9\u7f18\u7c97\u7cd9\u5ea6 \uff08CER\uff09 \u4ee5\u53ca\u7ebf\u8fb9\u7f18\u7c97\u7cd9\u5ea6 \uff08LER\uff09 \u5747\u662f\u8fb9\u7f18\u5b9a\u4f4d\u8bef\u5dee\uff08EPE\uff09 \u7684\u7ec4\u6210\u90e8\u5206\uff0c\u6700\u7ec8\u9650\u5236\u4e86\u7279\u5f81\u5c3a\u5bf8\u53ef\u80fd\u51cf\u5c11\u7684\u7a0b\u5ea6\u3002\u5728\u5148\u8fdb\u8282\u70b9\u4e2d\uff0c50% \u4ee5\u4e0a\u7684BEOL\u533a\u57df\u662f\u4e3aEPE\u4fdd\u7559\u7684\uff1b\u8bbe\u5907\u6269\u5c55\u53d7\u5230EPE\u6269\u5c55\u7684\u9650\u5236\u800c\u4e14\u9700\u8981\u8282\u70b9\u5bf9\u8282\u70b9EPE\u4e0b\u964d30%\uff08\u56fe 3\uff09\u3002<\/p>\n

\n\t\u3000\u3000<\/p>\n

\n\t\"\u539f\u5b50\u7ea7\u5de5\u827a\u5b9e\u73b0\u7eb3\u7c73\u7ea7\u56fe\u5f62\u7ed3\u6784\u7684\u8981\u6c42\"<\/p>\n

\n\t\u3000\u3000\u56fe 3. \u8fb9\u7f18\u653e\u7f6e\u8bef\u5dee \uff08EPE\uff09 \u6700\u7ec8\u9650\u5236\u7a7a\u95f4\u6269\u5c55\u300250%\u7684BEOL\u533a\u57df\u662f\u4e3aEPE\u4fdd\u7559\u7684\u3002\u56e0EUV\u5149\u523b\u6280\u672f\u4e2d\u968f\u673a\u7f3a\u9677\u5f15\u8d77\u7684\u7ebf\u548c\u5706\u5f62\u8fb9\u7f18\u7c97\u7cd9\u5ea6\u6781\u5927\u5730\u4fc3\u8fdb\u4e86EPE\u7684\u4ea7\u751f\u3002<\/p>\n

\n\t\u3000\u3000\u539f\u5b50\u5c42\u523b\u8680\u6709\u52a9\u4e8e\u51cf\u5c11\u8fd9\u4e9b\u968f\u673a\u7f3a\u9677\u7684\u5f71\u54cd\u3002\u56e0\u4e3a\u5b83\u5728\u81ea\u9650\u6027\u6b65\u9aa4\u4e2d\u9010\u5c42\u8fdb\u884c\uff0c\u800c\u4e14\u56e0\u4e3a\u5de5\u827a\u6b65\u9aa4\u5c06\u5316\u5b66\u6d3b\u6027\u7269\u8d28\u4e0e\u9ad8\u80fd\u79bb\u5b50\u76f8\u5206\u79bb\uff0c\u56e0\u6b64\u539f\u5b50\u5c42\u523b\u8680\u4e0d\u4f1a\u4ea7\u751f\u4f20\u7edf\u7684\u523b\u8680\u5de5\u827a\u4e2d\u51fa\u73b0\u7684\u7c97\u7cd9\u7684\u9576\u8fb9\u5c42\u3002\u66f4\u91cd\u8981\u7684\u662f\uff0c\u539f\u5b50\u5c42\u523b\u8680\u4e0e\u539f\u5b50\u5c42\u6c89\u79ef\u7684\u91cd\u590d\u5faa\u73af\uff0c\u80fd\u591f\u964d\u4f4eEUV\u4e2d\u968f\u673a\u7f3a\u9677\u5f15\u8d77\u7684\u7c97\u7cd9\u5ea6\u3002\u51f9\u51f8\u8868\u9762\u6bd4\u5e73\u9762\u5177\u6709\u8f83\u9ad8\u7684\u8868\u9762\u4f53\u79ef\u6bd4\uff0c\u8fd9\u5c31\u5bfc\u81f4\u5728\u539f\u5b50\u5c42\u523b\u8680\u7684\u8fc7\u7a0b\u4e2d\u51f8\u9762\u88ab\u6574\u5e73\uff0c\u800c\u5728\u539f\u5b50\u5c42\u6c89\u79ef\u7684\u8fc7\u7a0b\u4e2d\u51f9\u9762\u88ab\u586b\u5145\u3002\u4e0d\u4ec5\u968f\u673a\u7f3a\u9677\u975e\u5e38\u5c0f\uff0c\u800c\u4e14\u5728\u8fd9\u4e00\u5e73\u6574\u5de5\u827a\u8fc7\u7a0b\u4e2d\u53bb\u9664\u548c\u6c89\u79ef\u7684\u5c42\u4e5f\u975e\u5e38\u8584\uff0c\u5927\u7ea6\u4e3a\u534a\u7eb3\u7c73\u3002\u4e8b\u5b9e\u8868\u660e\uff0c\u8fd9\u4e00\u5de5\u827a\u964d\u4f4e\u4e86CER\u5e76\u63d0\u9ad8\u4e86\u5c0f\u5c3a\u5bf8\u5b54\u7684CD\u5747\u5300\u5ea6\u3002\u540c\u6837\uff0c\u5b83\u4e5f\u964d\u4f4e\u4e86LER\u3001\u6539\u8fdb\u4e86CDU\uff0c\u6e05\u9664\u4e86\u7ec6\u5c0f\u7684\uff08\u5c0f\u4e8e10nm\uff09\u7ebf\u5bbd<\/u>\u548c\u8ddd\u79bb\u4e2d\u68d8\u624b\u7684\u77ed\u8def<\/u>\u7f3a\u9677\uff08\u56fe 4\uff09\u3002<\/p>\n

\n\t\u3000\u3000<\/p>\n

\n\t\"\u539f\u5b50\u7ea7\u5de5\u827a\u5b9e\u73b0\u7eb3\u7c73\u7ea7\u56fe\u5f62\u7ed3\u6784\u7684\u8981\u6c42\"<\/p>\n

\n\t\u3000\u3000\u56fe 4. \u5de6\u56fe – \u9ec4\u8272\u8f6e\u5ed3\u7ebf\u8868\u793aEUV\u5149\u523b\u6280\u672f\u4e2d\u968f\u673a\u53d8\u5316\u5f15\u8d77\u7684\u5149\u523b\u80f6\u4e2d\u5b54\u7684\u5c40\u90e8\u4e0d\u5747\u5300\u3002\u53f3\u56fe – \u539f\u5b50\u5c42\u523b\u8680\u4e0e\u539f\u5b50\u5c42\u6c89\u79ef\u91cd\u590d\u5faa\u73af\u80fd\u591f\u663e\u8457\u964d\u4f4e\u5149\u523b\u80f6\u7ebf\u7684\u7c97\u7cd9\u5ea6\u3002\uff08Imec\u6d4b\u8bd5<\/u>\u7ed3\u6784\uff09<\/p>\n

\n\t\u3000\u3000\u81ea\u5bf9\u51c6\u63a5\u89e6\u5b54\u523b\u8680<\/strong><\/p>\n

\n\t\u3000\u3000\u81ea\u5bf9\u51c6\u63a5\u89e6\u5b54 \uff08SAC\uff09 \u901a\u8fc7\u5c06\u6e90\u6781\u548c\u6f0f\u6781\u63a5\u70b9\u5b9a\u4f4d\u5230\u8ddd\u79bb\u6805\u6781\u66f4\u8fd1\u7684\u4f4d\u7f6e\u800c\u5b9e\u73b0\u6301\u7eed\u7684\u7f29\u653e\u3002\u5728\u8fd9\u4e00\u5de5\u827a\u4e2d\uff0c\u6805\u6781\u901a\u8fc7\u6a2a\u5411\u6c2e\u5316\u7845\u95f4\u9694\u5c42\u548c\u4e0a\u8986\u7684\u8986\u76d6\u5c42\u4e0e\u6e90\u6781\u548c\u6f0f\u6781\u63a5\u70b9\u5b9e\u73b0\u9694\u79bb\u3002SAC\u523b\u8680\u662f\u6700\u5177\u6311\u6218\u6027\u7684\u523b\u8680\u5de5\u827a\u4e4b\u4e00\uff0c\u5b83\u53ef\u4ee5\u5728\u63a5\u89e6\u70b9<\/u>\u6c89\u79ef\u4e4b\u524d\u53bb\u9664\u76f8\u90bb\u7684\u4e8c\u6c27\u5316\u7845\u3002\u5b83\u5fc5\u987b\u5177\u6709\u9ad8\u5ea6\u9009\u62e9\u6027\uff0c\u4ece\u800c\u6e05\u9664\u6c27\u5316\u7269\u5e76\u4f7f\u6c2e\u5316\u7845\u57ab\u7247<\/u>\u4fdd\u6301\u5b8c\u6574\u3002\u5728\u8fde\u7eed\u523b\u8680\u5de5\u827a\u4e2d\uff0c\u9009\u62e9\u6027\u662f\u901a\u8fc7\u6c89\u79ef\u4e00\u4e2a\u8584\u7684\u6c1f\u78b3\u805a\u5408\u7269\u6d82\u5c42\u6765\u5b9e\u73b0\u7684\u3002\u5728\u523b\u8680\u8fc7\u7a0b\u4e2d\uff0c\u6c27\u5316\u7269\u4e2d\u7684\u53ef\u7528\u6c27\u5206\u4f1a\u70e7\u6389\u805a\u5408\u7269\u4e2d\u7684\u78b3\uff0c\u4ece\u800c\u4f7f\u523b\u8680\u7ee7\u7eed\u8fdb\u884c\u3002\u800c\u5f53\u805a\u5408\u7269\u8986\u76d6\u6c2e\u5316\u7269\u65f6\uff0c\u6ca1\u6709\u6c27\u5206\u53ef\u7528\uff0c\u800c\u523b\u8680\u5219\u88ab\u6291\u5236\u3002\u95ee\u9898\u5b58\u5728\u4e8e\u6c2e\u5316\u7845\u57ab\u7247\u7684\u9876\u5904\u3002\u5728\u66b4\u9732\u89d2\u5ea6\u4e3a45\u02da-70\u02da\u65f6\uff0c\u6e85\u5c04\u901f\u7387\u6700\u5927\uff1b\u56e0\u6b64\uff0c\u5728\u62d0\u89d2\u5904\u7684\u523b\u8680\u901f\u5ea6\u6bd4\u5728\u5e73\u9762\u4e0a\u5feb\uff0c\u800c\u4e14\u968f\u7740\u62d0\u89d2\u53d8\u5f97\u66f4\u52a0\u5706\u6ed1\uff0c\u9632\u62a4\u805a\u5408\u7269\u5c31\u66f4\u96be\u7c98\u9644\u3002\u62d0\u89d2\u5904\u7684\u8fc7\u5ea6\u5706\u6ed1\u548c\u8150\u8680\u6700\u7ec8\u5c06\u5bfc\u81f4\u6805\u6781\u4e0e\u6e90\u6781\/\u6f0f\u6781\u4e4b\u95f4\u7684\u77ed\u8def\u3002<\/p>\n

\n\t\u3000\u3000\u539f\u5b50\u5c42\u523b\u8680 \uff08ALE\uff09 \u901a\u8fc7\u5c06\u9632\u62a4\u5c42\u7684\u6c89\u79ef\u4e0e\u523b\u8680\u6b65\u9aa4\u8fdb\u884c\u9694\u79bb\uff0c\u4ece\u800c\u89e3\u51b3\u8fd9\u4e00\u95ee\u9898\uff08\u56fe 5\uff09\u3002\u6c89\u79ef\u8fc7\u7a0b\u4e2d\u4e0d\u5b58\u5728\u79bb\u5b50\uff0c\u56e0\u6b64\u5728\u6c89\u79ef\u8fc7\u7a0b\u4e2d\u5b58\u5728\u6700\u5c0f\u6e85\u5c04\uff0c\u4e14\u805a\u5408\u7269\u53ef\u4ee5\u5747\u5300\u5730\u6c89\u79ef\u5728\u5305\u542b\u62d0\u89d2\u7684\u4f4d\u7f6e\u4e0a\u3002\u5728\u523b\u8680\u5faa\u73af\u8fc7\u7a0b\u4e2d\uff0c\u53ea\u6709\u79bb\u5b50 \uff08Ar+\uff09\u5b58\u5728\uff0c\u6c27\u5316\u7269\u4e2d\u7684\u6c27\u70e7\u6389\u805a\u5408\u7269\uff0c\u800c\u6c1f\u78b3\u805a\u5408\u7269\u4e2d\u7684\u6c1f\u8150\u8680\u6c27\u5316\u7269\u3002\u5f53\u805a\u5408\u7269\u6d88\u5931\u65f6\uff0c\u6c1f\u4e5f\u968f\u4e4b\u6d88\u5931\uff0c\u5982\u679c\u504f\u538b\u529f\u7387\u4f4e\u4e8e\u6c2e\u5316\u7845\u7684\u6e85\u5c04\u9608\u503c\uff0c\u5219\u523b\u8680\u505c\u6b62\u3002\u5728\u6c2e\u5316\u7269\u4e0a\uff0c\u6ca1\u6709\u6c27\u6c14\u5b58\u5728\uff0c\u4f7f\u805a\u5408\u7269\u57fa\u672c\u4fdd\u6301\u5b8c\u6574\uff0c\u6c1f\u7684\u542b\u91cf\u6781\u4f4e\uff0c\u4f7f\u523b\u8680\u5f97\u5230\u6291\u5236\u3002ALE\u964d\u4f4e\u4e86\u62d0\u89d2\u7684\u5706\u6ed1\u5ea6\uff0c\u4f7f\u805a\u5408\u7269\u539a\u5ea6\u53d8\u8584\uff0c\u56e0\u6b64\u53ef\u4ee5\u4f7f\u7528\u66f4\u8584\u7684\u57ab\u7247\u3002ALE\u4f7f\u7528\u81ea\u9650\u6027\u534a\u5faa\u73af\u5c06\u8868\u9762\u6539\u6027\u6b65\u9aa4\u4e0e\u4e3b\u52a8\u523b\u8680\u6b65\u9aa4\u76f8\u5206\u79bb\uff0c\u4e0e\u8fde\u7eed\u523b\u8680\u5de5\u827a\u76f8\u6bd4\u63d0\u4f9b\u4e86\u66f4\u5927\u7684\u7075\u6d3b\u6027\u548c\u66f4\u597d\u7684\u63a7\u5236\u3002\uff08\u503c\u5f97\u4e00\u63d0\u7684\u662f\uff0c\u901a\u8fc7\u8c03\u8282\u5404\u79cd\u5de5\u827a\u53c2\u6570\uff0c\u53ef\u4ee5\u5bf9\u9009\u62e9\u6027\u8fdb\u884c\u9006\u8f6c\uff0c\u4f18\u5148\u523b\u8680\u6c2e\u5316\u7269\u800c\u975e\u6c27\u5316\u7269\u3002\uff09<\/p>\n

\n\t\u3000\u3000<\/p>\n

\n\t\"\u539f\u5b50\u7ea7\u5de5\u827a\u5b9e\u73b0\u7eb3\u7c73\u7ea7\u56fe\u5f62\u7ed3\u6784\u7684\u8981\u6c42\"<\/p>\n

\n\t\u3000\u3000\u56fe 5. \u81ea\u5bf9\u51c6\u63a5\u89e6\u5b54\u91c7\u7528\u4e00\u4e2a\u6a2a\u5411\u57ab\u7247\u5c06\u6805\u6781\u4e0e\u6e90\u6f0f\u63a5\u89e6\u5b54\u76f8\u9694\u79bb\u3002ALE\u907f\u514d\u5728\u57ab\u7247\u4e0a\u89d2\u8fc7\u5ea6\u523b\u8680\uff0c\u8fd9\u5728\u8fde\u7eed\u523b\u8680\u5de5\u827a\u4e2d\u5f88\u5e38\u89c1\u3002<\/p>\n

\n\t\u3000\u30003D NAND\u5b57\u7ebf\u7684\u94a8\u6c89\u79ef<\/strong><\/p>\n

\n\t\u3000\u30003D NAND\u5229\u7528\u5782\u76f4\u6574\u5408\u6781\u5927\u5730\u589e\u52a0\u4e86\u5b58\u50a8<\/u>\u8bbe\u5907\u7684\u5b58\u50a8\u5bc6\u5ea6\u3002\u4ee5\u5f80\uff0c\u7ed3\u6784\u5c40\u9650\u4e8e\u4e24\u4e2a\u7ef4\u5ea6\uff0c\u901a\u8fc7\u51cf\u5c0f\u5c3a\u5bf8\u4ece\u800c\u9650\u5236\u5bc6\u5ea6\uff1b\u5982\u4eca\uff0c\u7ed3\u6784\u5728\u7b2c\u4e09\u4e2a\u7ef4\u5ea6\u4e2d\u5f97\u4ee5\u6269\u5c55\u3002\u8fd9\u4e9b\u8bbe\u5907\u5305\u62ec\u975e\u5e38\u89c4\u51e0\u4f55\u56fe\u5f62<\/u>\u4ee5\u53ca\u6781\u9ad8\u7684\u6df1\u5bbd\u6bd4\u7279\u5f81\uff0c\u8fd9\u5e26\u6765\u4e86\u72ec\u6709\u7684\u5de5\u827a\u6311\u6218\u3002<\/p>\n

\n\t\u3000\u3000\u5176\u4e2d\u6700\u5177\u6311\u6218\u6027\u7684\u662f\u5411\u5b57\u7ebf\u4e2d\u586b\u5145\u5bfc\u7535\u94a8\u30023D NAND\u4ea4\u66ff\u5806\u53e0\u6c27\u5316\u7269\u548c\u6c2e\u5316\u7269\u4ecb\u7535\u5c42\uff0c\u5f53\u524d\u4e00\u4ee3\u4e2d\u6709\u591a\u8fbe96\u5c42\uff0c\u66f4\u9ad8\u5c42\u6570<\/u>\u8fd8\u5728\u7814\u53d1\u4e2d\uff08\u56fe 6\uff09\u3002\u5bc6\u96c6\u6392\u5217\u4e14\u5177\u6709\u9ad8\u6df1\u5bbd\u6bd4\u7684\u5b54\u6e17\u900f\u81f3\u8fd9\u4e9b\u5c42\u4e2d\uff0c\u6309\u7167\u9ad8\u6df1\u5bbd\u6bd4\u901a\u9053\u5c06\u6392\u5217\u5206\u4e3a\u5b57\u7ebf\u3002\u4e3a\u4e86\u521b\u5efa\u5b58\u50a8\u5355\u5143\uff0c\u5fc5\u987b\u79fb\u9664\u6c2e\u5316\u7269\u5c42\u5e76\u4ee5\u94a8\u8fdb\u884c\u66ff\u6362\u3002\u8fd9\u79cd\u94a8\u5fc5\u987b\u901a\u8fc7\u6df1\uff08\u5782\u76f4\u6df1\u5ea6 50:1\uff09\u901a\u9053\u5f15\u5165\uff0c\u7136\u540e\u6a2a\u5411\u6269\u6563\uff0c\u4ece\u800c\u4ee5\u65e0\u7a7a\u6d1e\u7684\u8d85\u5171\u5f62\u6c89\u79ef\u65b9\u5f0f\u586b\u5145\uff08\u4e4b\u524d\u7684\uff09\u6c2e\u5316\u7269\u6c34\u5e73\u9762\uff08\u6a2a\u5411\u6bd4\u7ea6 10:1\uff09\u3002\u539f\u5b50\u5c42\u6c89\u79ef\u80fd\u591f\u4e00\u6b21\u6c89\u79ef\u4e00\u4e2a\u8584\u5c42\uff0c\u8fd9\u5c31\u786e\u4fdd\u4e86\u5747\u5300\u586b\u5145\uff0c\u5e76\u9632\u6b62\u56e0\u5835\u585e\u800c\u4ea7\u751f\u7684\u7a7a\u9699\u3002<\/p>\n

\n\t\u3000\u3000\u4e00\u79cd\u6210\u529f\u7684\u65b9\u6cd5\u5c31\u662f\u5728\u586b\u5145\u5de5\u827a\u4e2d\u6dfb\u52a0\u5f62\u72b6\u9009\u62e9\u6027\u6291\u5236\u5242\uff0c\u9632\u6b62\u5728\u586b\u5145\u8f83\u9ad8\u6df1\u5bbd\u6bd4\u7ed3\u6784\u4e4b\u524d\uff0c\u51fa\u73b0\u8f83\u4f4e\u6df1\u5bbd\u6bd4\u7ed3\u6784\u4e2d\u7684\u8fc7\u5ea6\u6c89\u79ef\u3002\u7531\u5185\u800c\u5916\u7684ALD\u5de5\u827a\u53ef\u4ee5\u5b8c\u5168\u586b\u5145\u6a2a\u5411\uff08\u6c34\u5e73\uff09\u7ebf\u4e14\u4e0d\u7559\u7a7a\u9699\uff0c\u540c\u65f6\u6700\u5927\u9650\u5ea6\u5730\u51cf\u5c11\u4e86\u5782\u76f4\u901a\u9053\u4e2d\u7684\u6c89\u79ef\uff0c\u4ece\u800c\u63d0\u5347\u4e86\u7535\u6c14\u6027\u80fd\u548c\u5de5\u827a\u6210\u54c1\u7387\u3002<\/p>\n

\n\t\u3000\u3000<\/p>\n

\n\t\"\u539f\u5b50\u7ea7\u5de5\u827a\u5b9e\u73b0\u7eb3\u7c73\u7ea7\u56fe\u5f62\u7ed3\u6784\u7684\u8981\u6c42\"<\/p>\n

\n\t\u3000\u3000\u56fe 6. 3D NAND\u91c7\u7528\u590d\u6742\u7684\u9ad8\u6df1\u5bbd\u6bd4\u7ed3\u6784\u3002\u521b\u5efa\u5b57\u7ebf\u9700\u8981\u8d85\u5171\u5f62\u94a8\u6c89\u79ef\uff0c\u800c\u8fd9\u5fc5\u987b\u586b\u5145\u5782\u76f4\u548c\u6c34\u5e73\u7a7a\u95f4\u4e14\u4e0d\u7559\u7a7a\u9699\u3002<\/p>\n

\n\t\u3000\u3000\u7ed3\u8bed<\/h2>\n

\n\t\u3000\u3000\u539f\u5b50\u5c42\u523b\u8680\u4e0e\u6c89\u79ef\u5de5\u827a\u5229\u7528\u81ea\u9650\u6027\u53cd\u5e94\uff0c\u63d0\u4f9b\u539f\u5b50\u7ea7\u7684\u63a7\u5236\u3002\u5de5\u827a\u4ea7\u91cf\u63d0\u5347\u3001\u4ece\u66f4\u5c0f\u7684\u7ed3\u6784\u4e2d\u79fb\u9664\u7684\u6750\u6599\u51cf\u5c11\u3001\u4ee5\u53ca\u5bf9\u539f\u5b50\u7ea7\u63a7\u5236\u7684\u9700\u6c42\u4e0d\u65ad\u589e\u957f\uff0c\u8fd9\u4e9b\u56e0\u7d20\u90fd\u91cd\u65b0\u5f15\u8d77\u4e86\u4eba\u4eec\u5bf9\u539f\u5b50\u5c42\u523b\u8680\u7684\u5174\u8da3\u3002\u539f\u5b50\u5c42\u5de5\u827a\u63d0\u4f9b\u7684\u63a7\u5236\u6c34\u5e73\uff0c\u786e\u4fdd\u5176\u5728\u5f53\u524d\u4e43\u81f3\u672a\u6765\u7684\u534a\u5bfc\u4f53\u5236\u9020\u4e1a\u4e2d\u5c06\u53d1\u6325\u8d8a\u6765\u8d8a\u91cd\u8981\u7684\u4f5c\u7528\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

\u539f\u5b50\u5c42\u523b\u8680\u548c\u6c89\u79ef\u5de5\u827a\u5229\u7528\u81ea\u9650\u6027\u53cd\u5e94\uff0c\u63d0\u4f9b\u539f\u5b50\u7ea7\u63a7\u5236\u3002\u6cdb\u6797\u96c6\u56e2\u5148\u8fdb\u6280\u672f\u53d1\u5c55\u4e8b\u4e1a\u90e8\u516c\u53f8\u526f\u603b\u88c1\u6f58\u9633\u535a\u58eb\u5206\u4eab\u4e86\u4ed6\u5bf9\u8fd9\u4e2a\u8bdd\u9898\u7684\u770b\u6cd5\u3002 \u56fe 1. \u539f\u5b50\u5c42\u5de5\u827a\u4e2d\u7684\u6240\u6709\u534a\u5468\u671f\u53cd\u5e94\u662f\u81ea\u9650<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[12],"tags":[],"_links":{"self":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/3086"}],"collection":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=3086"}],"version-history":[{"count":0,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/3086\/revisions"}],"wp:attachment":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=3086"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=3086"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=3086"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}