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\n\t\u5e73\u5747\u8212\u9002\u89c2\u770b\u8ddd\u79bb\uff1a\u8fd9\u662f\u5927\u591a\u6570\u4eba\u5bf9\u4e8e\u8212\u9002\u89c2\u770b\u8ddd\u79bb\u7684\u4f30\u8ba1\u3002\u8fd9\u662f\u4e00\u4e2a\u4e3b\u89c2\u7684\u4f30\u7b97\uff0c\u5e76\u5c06\u8003\u8651\u5230\u4eba\u773c\u89c6\u7ebf\u3001\u5185\u5bb9\u5206\u8fa8\u7387\u53ca\u5185\u5bb9\u7c7b\u578b\u7b49\u53d8\u91cf\u3002<\/p>\n \n\t\u5c3d\u7ba1\u8fd9\u4e9b\u65b9\u6cd5\u90fd\u5177\u6709\u4e00\u5b9a\u6307\u5bfc\u6027\uff0c\u4f46\u5728\u786e\u5b9a\u89c2\u770b\u8ddd\u79bb\u65f6\u5176\u5b9e\u5e76\u6ca1\u6709\u6240\u8c13\u7684\u6b63\u786e\u7b54\u6848\u3002\u5c4f\u5e55\u7684\u89c2\u770b\u8ddd\u79bb\u6700\u7ec8\u8fd8\u662f\u8981\u53d6\u51b3\u4e8e\u5c4f\u5e55\u7684\u6240\u6709\u8005\u662f\u5426\u611f\u5230\u8212\u9002\u3002<\/p>\n \n\t\u4e0b\u8868\u53ef\u4ee5\u4f5c\u4e3a\u9009\u578b<\/u>\u65f6\u7684\u53c2\u8003\uff1a<\/p>\n \n\t<\/p>\n \n\t\u5c31\u5728\u5e74\u524d\uff0c\u56fe\u50cf\u4f20\u611f\u5668\u7684\u50cf\u7d20\u95f4\u8ddd\u57287µm\u4ee3\u3002\u4f9b\u5e94\u5546\u4eec\u5df2\u7ecf\u51cf\u5c11\u4e86\u5ba3\u4f20\uff0c\u4f46\u4e5f\u51fa\u73b0\u4e86\u4e00\u4e9b\u95ee\u9898\u3002<\/p>\n \n\t\u56fe\u50cf\u4f20\u611f\u5668\u672c\u8eab\u662f\u4e00\u4e2a\u590d\u6742\u7684\u82af\u7247\u3002\u9876\u5c42\u79f0\u4e3a\u5fae\u900f\u955c\u9635\u5217\uff0c\u4e0b\u4e00\u5c42\u662f\u4e00\u4e2a\u57fa\u4e8e\u7eff\u8272\u3001\u7ea2\u8272\u548c\u84dd\u8272\u7684\u9a6c\u8d5b\u514b\u9635\u5217\u7684\u989c\u8272\u8fc7\u6ee4\u5668\u3002\u518d\u4e0b\u4e00\u5c42\u662f\u4e00\u4e2a\u6709\u6e90\u50cf\u7d20\u9635\u5217\uff0c\u5b83\u7531\u5149\u6355\u6349\u5143\u4ef6\uff08\u79f0\u4e3a\u5149\u7535\u4e8c\u6781\u7ba1\uff09\u548c\u5176\u4ed6\u7535\u8def<\/u>\u7ec4\u6210\u3002<\/p>\n \n\t<\/p>\n \n\tCMOS\u56fe\u50cf\u4f20\u611f\u5668\u65b9\u6846\u56fe<\/p>\n \n\t\u8be5\u6709\u6e90\u50cf\u7d20\u9635\u5217\u88ab\u7ec6\u5206\u4e3a\u5fae\u5c0f\u7684\u548c\u72ec\u7acb\u7684\u5149\u654f\u50cf\u7d20\u3002\u5b9e\u9645\u7684\u50cf\u7d20\u7531\u4e00\u4e2a\u5149\u7535\u4e8c\u6781\u7ba1\u3001\u6676\u4f53<\/u>\u7ba1\u548c\u5176\u4ed6\u5143\u4ef6\u7ec4\u6210\uff0c\u5e76\u4ee5µm\u50cf\u7d20\u5927\u5c0f\u8ba1\u7b97\u3002<\/p>\n \n\t\u4e00\u4e2a\u50cf\u7d20\u8f83\u5927\u7684\u56fe\u50cf\u4f20\u611f\u5668\u53ef\u4ee5\u6536\u96c6\u66f4\u591a\u7684\u5149\uff0c\u8fd9\u5c31\u76f8\u5f53\u4e8e\u4e00\u4e2a\u66f4\u5f3a\u7684\u4fe1\u53f7\u3002\u8f83\u5927\u7684\u56fe\u50cf\u4f20\u611f\u5668\u4f1a\u5360\u7528\u677f\u5b50\u4e0a\u66f4\u591a\u7684\u7a7a\u95f4\u3002\u50cf\u7d20\u8d8a\u5c0f\u7684\u56fe\u50cf\u4f20\u611f\u5668\u6536\u96c6\u7684\u5149\u8d8a\u5c11\uff0c\u4f46\u662f\u4f60\u53ef\u4ee5\u5728\u4e00\u4e2adie\u4e0a\u88c5\u66f4\u591a\u7684\u4f20\u611f\u5668\u3002\u8fd9\u53cd\u8fc7\u6765\u53c8\u63d0\u9ad8\u4e86\u5206\u8fa8\u7387\u3002<\/p>\n \n\t\u5728\u6676\u5706\u5382\u5236\u4f5c\u56fe\u50cf\u4f20\u611f\u5668\u6709\u8fd9\u6837\u51e0\u79cd\u65b9\u6cd5\u3002\u4f8b\u5982\u50cf\u7d20\u9635\u5217\u5f62\u6210\u3002\u6d41\u4f53\u4ece\u886c\u5e95\u4e0a\u7684\u4e00\u4e2a\u6b63\u9762\u8fc7\u7a0b\u5f00\u59cb\uff0c\u5c06\u6676\u5706\u7247\u7ed3\u5408\u5230\u8f7d\u4f53\u6216\u5904\u7406\u6676\u7247\u4e0a\u3002\u4e0a\u534a\u90e8\u5206\u7ecf\u5386\u4e86\u690d\u5165\u6b65\u9aa4\uff0c\u7136\u540e\u662f\u9000\u706b\u8fc7\u7a0b\u3002\u5728\u9876\u90e8\u6d82\u4e0a\u4e00\u5c42\u6297\u53cd\u5c04\u6d82\u5c42\uff0c\u5f69\u8272\u80f6\u5377\u548c\u5fae\u900f\u955c\u5c31\u8fd9\u6837\u4ea7\u751f\u4e86\u3002<\/p>\n \n\t\u5728\u53e6\u4e00\u79cd\u5355\u72ec\u7684\u7b80\u5355\u751f\u4ea7\u4e2d\uff0c\u7845\u886c\u5e95\u7684\u8868\u9762\u8981\u7ecf\u8fc7\u4e00\u4e2a\u690d\u5165\u6b65\u9aa4\u3002\u5728\u5176\u4e0a\u5f62\u6210\u6269\u6563\u5b54\u548c\u91d1\u5c5e\u5316\u5c42\u3002\u80cc\u9762\u8680\u523b<\/u>\u6709\u6c9f\u75d5\u3002\u886c\u677f\u6c89\u79ef\u5728\u6c9f\u69fd\u7684\u4fa7\u58c1\u4e0a\uff0c\u5176\u4e2d\u5145\u6ee1\u4e86\u7535\u4ecb\u8d28\u6750\u6599\uff0c\u7136\u540e\u5728\u9876\u90e8\u5236\u4f5c\u6ee4\u5149\u7247\u548c\u5fae\u900f\u955c\u3002<\/p>\n \n\t<\/p>\n \n\t\u5c3d\u7ba1\u5982\u6b64\uff0c\u76f4\u52302009\u5e74\uff0c\u4e3b\u6d41CMOS\u56fe\u50cf\u4f20\u611f\u5668\u90fd\u662f\u57fa\u4e8e\u6b63\u9762\u7167\u660e\uff08FSI\uff09\u50cf\u7d20\u9635\u5217\u7ed3\u6784\u3002\u5728\u8fd9\u79cd\u6280\u672f\u4e2d\uff0c\u5982\u540c\u4eba\u773c\u9e70\u4e00\u6837\uff0c\u5149\u843d\u5728IC\u7684\u524d\u9762\uff0c\u7136\u540e\u901a\u8fc7\u8bfb\u53d6\u7535\u8def\u548c\u4e92\u8fde\uff0c\u6700\u540e\u88ab\u6c47\u805a\u5230\u5149\u7535\u68c0\u6d4b\u5668\u4e2d\u3002FSI\u4e3a\u76ee\u524d\u56fe\u50cf\u4f20\u611f\u5668\u6240\u91c7\u7528\u7684\u4e3b\u6d41\u6280\u672f\uff0c\u5177\u6709\u5df2\u83b7\u8bc1\u5b9e\u7684\u5927\u6279\u91cf\u751f\u4ea7\u80fd\u529b\u3001\u9ad8\u53ef\u9760\u6027\u548c\u9ad8\u826f\u7387\u4ee5\u53ca\u9887\u5177\u5438\u5f15\u529b\u7684\u6027\u4ef7\u6bd4\u7b49\u4f18\u52bf\uff0c\u5927\u5927\u63a8\u52a8\u4e86\u5176\u5728\u624b\u673a\u3001\u7b14\u8bb0\u672c\u7535\u8111\u3001\u6570\u7801\u6444\u50cf\u673a\u548c\u6570\u7801\u76f8\u673a\u7b49\u4f17\u591a\u9886\u57df\u7684\u5e94\u7528\u3002\u8fd9\u4e9b\u4f18\u52bf\uff0c\u518d\u52a0\u4e0a\u9ad8\u6027\u80fd\u7279\u6027\uff0c\u4f7f\u5f97\u8fd9\u79cd\u6280\u672f\u5177\u6709\u72ec\u7279\u7684\u6210\u672c\u3001\u6027\u80fd\u548c\u4ef7\u503c\u5b9a\u4f4d\uff0c\u672a\u6765\u5e94\u7528\u6709\u671b\u8fdb\u4e00\u6b65\u6269\u5c55\u3002<\/p>\n \n\t\u591a\u5e74\u6765\uff0cFSI\u67b6\u6784\u4f7f\u4f9b\u5e94\u5546\u80fd\u591f\u5728\u51e0\u4ee3\u4eba\u7684\u65f6\u95f4\u5185\u51cf\u5c11\u95f4\u8ddd\u3002\u4ece2006\u5e74\u76842\uff0e2µm\u5230 2007\u5e74\u76841\uff0e75µm\u3002<\/p>\n \n\t2008\u5e74\uff0c\u8be5\u884c\u4e1aFSI\u67b6\u6784\u57281\uff0e4µm\u7684\u65f6\u5019\u78b0\u58c1\u4e86\u3002\u56e0\u6b64\uff0c\u4ece2009\u5e74\u5f00\u59cb\uff0c\u4f9b\u5e94\u5546\u8f6c\u5411\u4e86\u4e00\u79cd\u65b0\u7684\u67b6\u6784——\u80cc\u9762\u7167\u660e\uff08BSI\uff09\u3002BSI\u67b6\u6784\u5c06\u56fe\u50cf\u4f20\u611f\u5668\u98a0\u5012\u8fc7\u6765\u3002\u5149\u4ece\u7845\u57fa\u677f<\/u>\u7684\u80cc\u9762\u8fdb\u5165\u3002\u5149\u5b50\u5230\u5149\u7535\u4e8c\u6781\u7ba1\u7684\u8def\u5f84\u66f4\u77ed\uff0c\u4ece\u800c\u63d0\u9ad8\u4e86\u91cf\u5b50\u6548\u7387\u3002\u7531\u4e8eBSI\u6676\u5706\u662f\u7ffb\u8f6c\uff08inverted\uff09\u7684\uff0c\u6545\u5165\u5c04\u5149\u9996\u5148\u4f1a\u5165\u5c04\u5230\u5149\u7535\u4e8c\u6781\u7ba1\u9644\u8fd1\u7684\u7845\u4f53\u6750\u6599\u3002\u8fd9\u65f6\uff0c\u7531\u4e8e\u6f2b\u5c04\u5230\u90bb\u8fd1\u50cf\u7d20\u6216\u5728\u80cc\u9762\u754c\u9762\u7684\u6f2b\u5c04\u4e0e\u91cd\u65b0\u6c47\u5408\uff0c\u5149\u7ebf\u4f1a\u5f62\u6210\u4e32\u6270\u800c\u4ea7\u751f\u635f\u8017\u3002\u84dd\u5149\u5c24\u5176\u5bb9\u6613\u53d1\u751f\u8fd9\u79cd\u73b0\u8c61\uff0c\u5bfc\u81f4\u84dd\u8272QE\u51cf\u5c0f\uff0c\u800c\u4e32\u6270\u589e\u52a0\u3002\u53ef\u559c\u7684\u662f\uff0c\u901a\u8fc7\u5229\u7528\u5148\u8fdb\u7684\u80cc\u9762\u5904\u7406\u548c\u66f4\u6df1\u7684\u5149\u7535\u4e8c\u6781\u7ba1\u6765\u6355\u83b7\u84dd\u5149\uff0c\u53ef\u4ee5\u89e3\u51b3\u8fd9\u4e9b\u95ee\u9898\u3002<\/p>\n \n\tBSI\u4e5f\u542f\u52a8\u4e86\u50cf\u7d20\u7f29\u653e\u3002Lam\u7684 Haynes \uff1a“\u5c31\u50cf\u7d20\u6bd4\u4f8b\u800c\u8a00\uff0cBSI\u4f20\u611f\u5668\u6280\u672f\u5141\u8bb8\u6700\u4f18\u50cf\u7d20\u5c3a\u5bf8\u57281\uff0e2µm 1\uff0e4µm\uff0c\u5e76\u4e14\u5806\u53e0BSI\u5141\u8bb8\u4f20\u611f\u5668\u7684\u5f15\u811a\u4ecd\u4f4e\u4e8e30\u5e73\u65b9\u6beb\u7c73\uff0c\u4e9a\u5fae\u7c73\u5c3a\u5bf8\u7684\u50cf\u7d20\u53ef\u4ee5\u4f7f\u7528\u56db\u50cf\u7d20\u67b6\u6784\uff0c\u4f7f\u5206\u8fa8\u7387\u8d85\u8fc748MP\u3002”<\/p>\n \n\t\u9664\u4e86BSI\uff0c\u8fd9\u4e2a\u884c\u4e1a\u8fd8\u9700\u8981\u5176\u4ed6\u7684\u6539\u53d8\u3002\u5728\u50cf\u7d20\u7f29\u653e\u4e2d\uff0c\u5149\u4e8c\u6781\u7ba1\uff08\u5173\u952e\u7684\u5149\u6355\u83b7\u5143\u4ef6\uff09\u5728\u56fe\u50cf\u4f20\u611f\u5668\u4e2d\u6536\u7f29\uff0c\u4f7f\u5176\u6548\u7387\u964d\u4f4e\u3002\u4e8c\u6781\u7ba1\u9760\u5f97\u66f4\u8fd1\uff0c\u4ea7\u751f\u4e86\u4e32\u6270\u3002<\/p>\n \n\t\u6240\u4ee5\u5927\u7ea6\u57282010\u5e74\u95f4\u8ddd\u5230\u4e861\uff0e4µm\u65f6\uff0c\u53e6\u4e00\u4e2a\u521b\u65b0\u7684\u6280\u672f\u8bde\u751f\u4e86——\u6df1\u6c9f\u9694\u79bb\uff08DTI<\/u>\uff09\u3002DTI\u4f7f\u5149\u7535\u4e8c\u6781\u7ba1\u66f4\u9ad8\uff0c\u4ece\u800c\u589e\u52a0\u5355\u4f4d\u9762\u79ef\u7684\u5bb9\u91cf\u3002\u4e3a\u4e86\u5728\u6676\u5706\u4e2d\u5b9e\u73b0DTI\uff0c\u4f9b\u5e94\u5546\u91c7\u7528\u4e86BSI\u67b6\u6784\uff0c\u5e76\u4f7f\u7528\u5404\u79cd\u5de5\u827a\u6b65\u9aa4\u4f7f\u5149\u7535\u4e8c\u6781\u7ba1\u66f4\u9ad8\uff0c\u4f46\u66f4\u9ad8\u7684\u4e8c\u6781\u7ba1\u4e5f\u9700\u8981\u66f4\u539a\u7684\u7845\u7ed3\u6784\u3002<\/p>\n \n\t\u5c3d\u7ba1\u5982\u6b64\uff0c\u50cf\u7d20\u7f29\u653e\u901f\u5ea6\u8fd8\u662f\u6162\u4e86\u4e0b\u6765\u3002\u66fe\u7ecf\u6709\u4e00\u6bb5\u65f6\u95f4\uff0c\u4f9b\u5e94\u5546\u6bcf\u5e74\u90fd\u8981\u642c\u5230\u4e00\u4e2a\u65b0\u7684\u5730\u65b9\u3002\u6839\u636eTechInsights\u6570\u636e\uff0c\u4ed6\u4eec\u82b1\u4e86\u4e09\u5e74\u65f6\u95f4\u4ece1\uff0e4µm\uff082008\uff09 1\uff0e12µm\uff082011\uff09\uff0c\u56db\u5e74\u4e4b\u540e\u8fbe\u52301µm\uff082015\uff09\uff0c\u548c\u53e6\u5916\u4e09\u4e2a\u8fbe\u5230\u4e860\uff0e9µm\uff082018\uff09\u3002<\/p>\n \n\tRay Fontaine \uff1a“\u603b\u800c\u8a00\u4e4b\uff0c\u6211\u4eec\u76f8\u4fe1\u53d1\u5c55DTI\u548c\u76f8\u5173\u949d\u5316\u5904\u7406\u662f\u62d6\u5ef61\uff0e12µm\u964d\u52300\uff0e9µm\u50cf\u7d20\u7684\u4e3b\u8981\u56e0\u7d20\u3002”<\/p>\n \n\t\u6700\u8fd1\uff0c\u4f9b\u5e94\u5546\u5df2\u7ecf\u89e3\u51b3\u4e86\u8fd9\u4e2a\u95ee\u9898\uff0c\u50cf\u7d20\u7f29\u653e\u7ade\u8d5b\u53c8\u91cd\u65b0\u5f00\u59cb\u4e86\u30022018\u5e74\uff0c\u4e09\u661f\u6253\u7834\u4e861\u4e0e0\uff0e9µm\u5c4f\u969c\uff0c\u7d22\u5c3c\u7d27\u968f\u5176\u540e\uff0c2019\u5e74\u5b9e\u73b0\u4e860\uff0e8µm\uff0c\u4e09\u661f\u4e0d\u7518\u843d\u540e\uff0c\u4e09\u661f2020\u5e74\u5b9e\u73b0\u4e860\uff0e7µm\u3002<\/p>\n 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