{"id":1497,"date":"2018-11-20T03:37:20","date_gmt":"2018-11-20T03:37:20","guid":{"rendered":""},"modified":"2018-11-20T11:37:43","modified_gmt":"2018-11-20T03:37:43","slug":"%e7%9b%98%e7%82%b9%e6%88%91%e5%9b%bd%e5%8d%8a%e5%af%bc%e4%bd%93%e4%ba%a7%e4%b8%9a%e5%8f%91%e5%b1%95%e7%9a%84%e5%b8%82%e5%9c%ba%e6%9c%ba%e9%81%87","status":"publish","type":"post","link":"http:\/\/www.szryc.com\/?p=1497","title":{"rendered":"\u76d8\u70b9\u6211\u56fd\u534a\u5bfc\u4f53\u4ea7\u4e1a\u53d1\u5c55\u7684\u5e02\u573a\u673a\u9047"},"content":{"rendered":"
\n\t\u4e2d\u82af\u56fd\u9645\u521b\u59cb\u4eba\u5f20\u6c5d\u4eac\u5bf9\u6211\u56fd\u96c6\u6210\u7535\u8def\u4ea7\u4e1a\u66fe\u6709\u8fc7\u8fd9\u6837\u7684\u70b9\u8bc4\uff0c“\u6211\u56fd\u534a\u5bfc\u4f53\u4ea7\u4e1a\u53d1\u5c55\u6700\u8584\u5f31\u7684\u73af\u8282\u5c31\u662f\u6750\u6599\u548c\u8bbe\u5907\uff0c\u4f46\u8fd9\u4e5f\u610f\u5473\u7740\u5e02\u573a\u673a\u9047\u3002”\u7ecf\u8fc7\u957f\u671f\u53d1\u5c55\uff0c\u6211\u56fd\u4f01\u4e1a\u5728\u534a\u5bfc\u4f53\u5e94\u7528\u3001\u5c01\u88c5\u6d4b\u8bd5\u9886\u57df\u5df2\u53d1\u5c55\u5230\u5168\u7403\u9886\u5148\uff0c\u62e5\u6709\u4e86\u5b8c\u6574\u7684\u7ec8\u7aef\u4ea7\u4e1a\u94fe\uff0c\u4f46\u5728\u4ea7\u4e1a\u94fe\u524d\u7aef\u73af\u8282\u975e\u5e38\u8584\u5f31\u3002<\/p>\n
\n\t\u534a\u5bfc\u4f53\u8bbe\u5907\u662f\u534a\u5bfc\u4f53\u4ea7\u4e1a\u6700\u4e3a\u91cd\u8981\u7684\u4e00\u73af\uff0c\u662f\u751f\u4ea7\u90e8\u95e8\u4e0d\u53ef\u6216\u7f3a\u7684\u751f\u4ea7\u8d44\u6599\u3002\u4ece\u534a\u5bfc\u4f53\u4ea7\u4e1a\u94fe\u4e2d\u53ef\u4ee5\u770b\u51fa\uff0c\u65e0\u8bba\u662f\u4e0a\u6e38\u8bbe\u8ba1\u5236\u9020\uff0c\u8fd8\u662f\u4e0b\u6e38\u5c01\u88c5\u6d4b\u8bd5\uff0c\u51e0\u4e4e\u6bcf\u4e00\u4e2a\u4ea7\u4e1a\u73af\u8282\u90fd\u9700\u8981\u76f8\u5173\u8bbe\u5907\u7684\u6295\u5165\u3002\u534a\u5bfc\u4f53\u8bbe\u5907\u4e3b\u8981\u5e94\u7528\u4e8eIC\u5236\u9020\uff08\u524d\u7aef\u8bbe\u5907\uff09\u3001IC\u5c01\u6d4b\uff08\u540e\u9053\u8bbe\u5907\uff09\u4e24\u5927\u9886\u57df\u3002<\/p>\n
\n\t\u5176\u4e2d\uff0cIC\u5236\u9020\u8bbe\u5907\u53c8\u5305\u62ec\u6676\u5706\u5236\u9020\u8bbe\u5907\u548c\u6676\u5706\u52a0\u5de5\u8bbe\u5907\u3002\u5176\u4e2d\u6676\u5706\u5236\u9020\u8bbe\u5907\u4e3b\u8981\u7531\u7845\u7247\u5382\uff08\u5982SUMCO\u3001\u91d1\u745e\u6cd3\u3001\u4e0a\u6d77\u65b0\u6607\uff09\u8fdb\u884c\u91c7\u8d2d\uff0c\u6700\u7ec8\u4ea7\u54c1\u4e3a\u7845\u7247\uff1b\u6676\u5706\u52a0\u5de5\u8bbe\u5907\u4e3b\u8981\u7531\u4ee3\u5de5\u5382\uff08Foundry\uff0c\u5982\u53f0\u79ef\u7535\u3001\u4e2d\u82af\u56fd\u9645\u3001\u4e0a\u6d77\u957f\u8679\uff09\u6216IDM\u4f01\u4e1a\uff08\u5982Intel<\/u>\u3001Sams<\/u>ung\uff09\u8fdb\u884c\u91c7\u8d2d\uff0c\u6700\u7ec8\u4ea7\u54c1\u4e3a\u82af\u7247\uff1bIC\u5c01\u6d4b\u8bbe\u5907\u901a\u5e38\u7531\u4e13\u95e8\u7684\u5c01\u6d4b\u5382\uff08\u5982\u65e5\u6708\u5149\u3001Amkor\u3001\u957f\u7535\u79d1\u6280\uff09\u8fdb\u884c\u91c7\u8d2d\uff0c\u5305\u62ec\u62e3\u9009\u3001\u6d4b\u8bd5\u3001\u8d34\u7247\u3001\u952e\u5408\u7b49\u591a\u4e2a\u73af\u8282\u3002<\/p>\n
\n\t<\/p>\n
\n\t\u534a\u5bfc\u4f53\u8bbe\u5907\u683c\u5c40\u4e00\u89c8<\/p>\n
\n\t\u636eGartner\u7edf\u8ba1\uff0c\u5168\u7403\u89c4\u6a21\u4ee5\u4e0a\u6676\u5706\u5236\u9020\u8bbe\u5907\u5546\u5171\u8ba158\u5bb6\uff0c\u5176\u4e2d\u65e5\u672c\u7684\u4f01\u4e1a\u6700\u591a\uff0c\u8fbe\u5230 21 \u5bb6\uff0c\u536036\uff05\uff0c\u5176\u6b21\u662f\u6b27\u6d3213\u5bb6\u3001\u5317\u7f8e10\u5bb6\u3001\u97e9\u56fd7\u5bb6\uff0c\u800c\u4e2d\u56fd\u5927\u9646\u4ec54\u5bb6\uff0c\u5206\u522b\u662f\u4e0a\u6d77\u76db\u7f8e\u3001\u4e0a\u6d77\u4e2d\u5fae\u3001Mattson\uff08\u4ea6\u5e84\u56fd\u6295\u6536\u8d2d\uff09\u548c\u5317\u65b9\u534e\u521b\uff0c\u5360\u6bd4\u4e0d\u52307\uff05\u3002<\/p>\n
\n\t\u4ece\u534a\u5bfc\u4f53\u8bbe\u5907\u9700\u6c42\u7aef\u6765\u770b\uff0c\u8fd1\u51e0\u5e74\u9500\u552e\u989d\u524d\u4e09\u5927\u5730\u533a\u5206\u522b\u662f\u97e9\u56fd\u3001\u4e2d\u56fd\u53f0\u6e7e\u548c\u5927\u9646\u3002\u4ece\u534a\u5bfc\u4f53\u8bbe\u5907\u9500\u552e\u989d\u60c5\u51b5\u770b\uff0c\u4ece2014 \u5e74\u5f00\u59cb\uff0c\u5317\u7f8e\u534a\u5bfc\u4f53\u8bbe\u5907\u6295\u8d44\u9010\u5e74\u51cf\u5c11\uff0c\u65e5\u672c\u57fa\u672c\u7ef4\u6301\u7a33\u5b9a\uff0c\u6574\u4e2a\u534a\u5bfc\u4f53\u5236\u9020\u7684\u4ea7\u80fd\u8f6c\u79fb\u5230\u4e86\u97e9\u56fd\u3001\u4e2d\u56fd\u53f0\u6e7e\u548c\u5927\u9646\u4e09\u5730\u3002\u53e6\u5916\uff0c\u4ece\u8fd9\u4e09\u4e2a\u5730\u533a\u5e02\u573a\u4efd\u989d\u5360\u6bd4\u6765\u770b\uff0c\u4e2d\u56fd\u5927\u9646\u4e70\u5bb6\u4e70\u4e0b\u4e86\u5168\u7403 15\uff05\u7684\u534a\u5bfc\u4f53\u8bbe\u5907\uff0c\u5e02\u573a\u4efd\u989d\u63d0\u5347\u4e86\u8fd1\u4e00\u500d\uff0c\u4e14\u4e00\u76f4\u5904\u4e8e\u7a33\u6b65\u4e0a\u5347\u7684\u72b6\u6001\u3002<\/p>\n
\n\t<\/p>\n
\n\t\u56fe\uff1a2017\u5168\u7403\u534a\u5bfc\u4f53\u8bbe\u5907\u5e02\u573a\u89c4\u6a21\uff08\u5355\u4f4d\uff1a\u5341\u4ebf\u7f8e\u5143\uff09<\/p>\n
\n\t\u4ece\u4f9b\u7ed9\u4fa7\u6765\u770b\uff0c\u534a\u5bfc\u4f53\u8bbe\u5907\u662f\u4e00\u4e2a\u9ad8\u5ea6\u5784\u65ad\u7684\u5e02\u573a\u3002\u6839\u636e\u5404\u7ec6\u5206\u8bbe\u5907\u5e02\u573a\u5360\u6709\u7387\u7edf\u8ba1\u6570\u636e\uff0c\u5728\u5149\u523b\u673a\u3001PVD\u3001\u523b\u8680\u673a\u3001\u6c27\u5316\uff0f\u6269\u6563\u8bbe\u5907\u4e0a\uff0c\u524d\u4e09\u5bb6\u8bbe\u5907\u5546\u7684\u603b\u5e02\u5360\u7387\u90fd\u8fbe 90\uff05\u4ee5\u4e0a\uff0c\u800c\u4e14\u884c\u4e1a\u9f99\u5934\u90fd\u80fd\u5360\u636e\u4e00\u534a\u5de6\u53f3\u7684\u5e02\u573a\uff0c\u6240\u4ee5\uff0c\u8981\u60f3\u5728\u534a\u5bfc\u4f53\u88c5\u5907\u5e02\u573a\u4e2d\u5206\u4e00\u676f\u7fb9\uff0c\u5c31\u5fc5\u987b\u5728\u7ec6\u5206\u9886\u57df\u80fd\u591f\u505a\u5230\u5168\u7403\u524d\u4e09\u3002<\/p>\n
\n\t\u7f8e\u56fd\u5904\u4e8e\u9886\u5148\u5730\u4f4d<\/p>\n
\n\t\u6765\u81eaSEMI\u7684\u6700\u65b0\u6570\u636e\u663e\u793a\uff0c\u5317\u7f8e\u534a\u5bfc\u4f53\u8bbe\u5907\u5236\u9020\u55463\u6708\u51fa\u8d27\u91d1\u989d\u4e3a24\uff0e2\u4ebf\u7f8e\u5143\uff0c\u6bd42\u6708\u5fae\u589e0\uff0e4\uff05\uff0c\u5e74\u589e16\uff0e7\uff05\uff0c\u521b17\u5e74\u6765\u65b0\u9ad8\u3002\u8fd9\u4e3b\u8981\u5f97\u76ca\u4e8e\u8fd1\u4e24\u5e74\u5185\u5b58\u53ca\u6676\u5706\u4ee3\u5de5\u6295\u8d44\u6301\u7eed\u5e26\u52a8\u3002<\/p>\n
\n\t\u7f8e\u56fd\u534a\u5bfc\u4f53\u8bbe\u5907\u7684\u53d1\u5c55\u8d77\u6e90\u4e8e\u4e8c\u6218\u540e\u671f\uff0c\u7531\u4e8e\u519b\u7528\u8ba1\u7b97\u673a\u7684\u5e26\u52a8\uff0c\u9020\u5c31\u4e86\u6700\u521d\u7684\u534a\u5bfc\u4f53\u4ea7\u4e1a\uff0c\u5728\u4e4b\u540e\u7684\u4e8c\u4e09\u5341\u5e74\u4e2d\uff0c\u7f8e\u56fd\u534a\u5bfc\u4f53\u4ea7\u4e1a\u7a33\u6b65\u53d1\u5c55\uff0c\u5960\u5b9a\u4e86\u5176\u534a\u5bfc\u4f53\u8bbe\u5907\u884c\u4e1a\u7684\u575a\u5b9e\u57fa\u7840\u3002<\/p>\n
\n\t\u6765\u81ea\u5317\u7f8e\u7684\u8bbe\u5907\u5546\u4e3b\u8981\u5305\u62ec\uff1a\u5e94\u7528\u6750\u6599\uff0c\u6cf0\u745e\u8fbe\u3001Axcelis Te<\/u>chnologies\uff0cKLA\uff0dTencor\uff0cLam Research\uff0cKulicke \uff06 Soffa\u3001Nanometrics\uff0cRave\uff0cRudolph Technologies\uff0cUltratech\uff0cUshio\u7b49\u3002<\/p>\n
\n\t\u867d\u7136\u5728\u6240\u6709\u534a\u5bfc\u4f53\u8bbe\u5907\u5382\u5546\u548c\u5e02\u573a\u4e2d\uff0c\u7f8e\u56fd\u8ddf\u968f\u5728\u65e5\u672c\u548c\u6b27\u6d32\u4e4b\u540e\uff0c\u5904\u4e8e\u7b2c\u4e09\u7684\u4f4d\u7f6e\u3002\u4f46\u5c31\u6676\u5706\u5904\u7406\u8bbe\u5907\u800c\u8a00\uff0c\u5176\u5b9e\u529b\u975e\u5e38\u5f3a\u52b2\uff0c\u5728\u5168\u7403\u6676\u5706\u5904\u7406\u8bbe\u5907\u4f9b\u5e94\u5546\u524d5\u540d\u4e2d\uff0c\u7f8e\u56fd\u5c31\u5360\u636e\u4e863\u5e2d\uff0c\u5206\u522b\u662f\u6392\u540d\u7b2c\u4e00\u7684\u5e94\u7528\u6750\u6599\uff08AMAT\uff09\uff0c\u5e02\u5360\u738719\uff05\u5de6\u53f3\uff1b\u7b2c\u4e8c\u7684Lam Research\uff0c\u5e02\u5360\u738713\uff05\u5de6\u53f3\uff1b\u4ee5\u53ca\u6392\u540d\u7b2c5\u7684KLA\uff0dTencor\uff0c\u5e02\u5360\u73876\uff05\u5de6\u53f3\u3002<\/p>\n
\n\t\u5177\u4f53\u800c\u8a00\uff0c\u6676\u5706\u5904\u7406\u8bbe\u5907\u4e2d\uff0c\u51e0\u4e2a\u4e3b\u8981\u5de5\u5e8f\u7684\u8bbe\u5907\u4e5f\u90fd\u57fa\u672c\u5904\u4e8e\u884c\u4e1a\u9f99\u5934\u7684\u9ad8\u5ea6\u5784\u65ad\u4e4b\u4e2d\u3002\u5176\u4e2d\uff0c\u5728PVD\u9886\u57df\uff0c\u5e94\u7528\u6750\u6599\u516c\u53f8\u5360\u636e\u4e86\u8fd1 85\uff05\u7684\u5e02\u573a\u4efd\u989d\uff0cCVD\u536030\uff05\uff1b\u523b\u8680\u8bbe\u5907\u65b9\u9762\uff0cLam Research\u6700\u591a\uff0c\u5e02\u5360\u7387\u8fbe53\uff05\uff0c\u800cKLA\uff0dTencor\u5728\u534a\u5bfc\u4f53\u5149\u5b66\u68c0\u6d4b\u9886\u57df\uff0c\u5168\u7403\u5e02\u5360\u5c45\u51a0\u3002\u5728\u5404\u4e2a\u9886\u57df\u4e2d\uff0c\u524d\u4e09\u5927\u5de8\u5934\u7684\u5e02\u573a\u4efd\u989d\u76f8\u52a0\u5747\u8d85\u8fc770\uff05\uff0c\u6574\u4e2a\u5e02\u573a\u5448\u73b0\u5f3a\u8005\u6052\u5f3a\u3001\u9ad8\u5ea6\u5784\u65ad\u7684\u72b6\u6001\u3002<\/p>\n
\n\t\u5e94\u7528\u6750\u6599\u53ef\u4ee5\u8bf4\u662f\u5168\u7403\u6700\u5927\u7684\u534a\u5bfc\u4f53\u8bbe\u5907\u516c\u53f8\u4e86\uff0c\u4ea7\u54c1\u6a2a\u8de8CVD\u3001 PVD\u3001\u523b\u8680\u3001CMP\u3001RTP\u7b49\u9664\u5149\u523b\u673a\u5916\u7684\u51e0\u4e4e\u6240\u6709\u534a\u5bfc\u4f53\u8bbe\u5907\u3002\u5e94\u7528\u6750\u65992017\u8d22\u5e74\u8425\u6536\u4e3a145\uff0e3\u4ebf\u7f8e\u5143\uff0c\u5176\u4e2d\uff0c\u534a\u5bfc\u4f53\u8bbe\u5907\u6536\u516595\uff0e2\u4ebf\u7f8e\u5143\u3002<\/p>\n
\n\t\u534a\u5bfc\u4f53\u8bbe\u5907\u884c\u4e1a\u6280\u672f\u58c1\u5792\u975e\u5e38\u9ad8\uff0c\u968f\u7740\u5236\u7a0b\u8d8a\u6765\u8d8a\u5148\u8fdb\uff0c\u5bf9\u534a\u5bfc\u4f53\u8bbe\u5907\u7684\u6027\u80fd\u548c\u7a33\u5b9a\u6027\u63d0\u51fa\u4e86\u8d8a\u6765\u8d8a\u9ad8\u7684\u8981\u6c42\uff0c\u9700\u8981\u6295\u5165\u5927\u91cf\u7684\u7814\u53d1\u8d44\u91d1\u3002\u5e94\u7528\u6750\u6599\u516c\u53f8\u4e00\u76f4\u4fdd\u6301\u7740\u5728\u7814\u53d1\u4e0a\u7684\u9ad8\u6295\u5165\uff0c\u517630\uff05\u7684\u5458\u5de5\u4e3a\u4e13\u4e1a\u7814\u53d1\u4eba\u5458\uff0c\u62e5\u6709\u8fd112000 \u9879\u4e13\u5229\uff0c\u5e73\u5747\u6bcf\u5929\u7533\u8bf74\u4e2a\u4ee5\u4e0a\u7684\u65b0\u4e13\u5229\u3002\u6b63\u662f\u8fd9\u79cd\u6301\u7eed\u7684\u9ad8\u7814\u53d1\u6295\u5165\uff0c\u4fc3\u6210\u4e86\u5e94\u7528\u6750\u6599\u7684\u5185\u90e8\u521b\u65b0\uff0c\u6784\u6210\u4e86\u8f83\u9ad8\u7684\u6280\u672f\u58c1\u5792\uff0c\u4f7f\u5176\u81ea1992\u5e74\u4ee5\u6765\u4e00\u76f4\u4fdd\u6301\u7740\u4e16\u754c\u6700\u5927\u534a\u5bfc\u4f53\u8bbe\u5907\u516c\u53f8\u7684\u5730\u4f4d\u3002<\/p>\n
\n\t\u4e2d\u56fd\u5e02\u573a\u73b0\u72b6<\/p>\n
\n\t\u636eSemi\u9884\u6d4b\uff0c2018\u5e74\u4e2d\u56fd\u7684\u8bbe\u5907\u9500\u552e\u589e\u957f\u7387\u5c06\u521b\u65b0\u9ad8\uff0c\u4e3a49\uff0e3\uff05\uff0c\u8fbe\u5230113\u4ebf\u7f8e\u5143\uff0c\u4e2d\u56fd\u5927\u9646\u5c06\u7d27\u968f\u97e9\u56fd\uff0c\u6210\u4e3a\u4e16\u754c\u7b2c\u4e8c\u5927\u534a\u5bfc\u4f53\u8bbe\u5907\u9700\u6c42\u5e02\u573a\u3002<\/p>\n
\n\t<\/p>\n
\n\t\u56fe\uff1a\u4e2d\u56fd\u5927\u9646\u534a\u5bfc\u4f53\u8bbe\u5907\u5e02\u573a\u89c4\u6a21\uff08\u5355\u4f4d\uff1a\u5341\u4ebf\u7f8e\u5143\uff09<\/p>\n
\n\t2017\uff5e2020\u5e74\uff0c\u4e2d\u56fd\u5927\u9646\u5c06\u670926\u5ea7\u65b0\u6676\u5706\u5382\u6295\u4ea7\uff0c\u6210\u4e3a\u5168\u7403\u65b0\u5efa\u6676\u5706\u5382\u6700\u79ef\u6781\u7684\u5730\u533a\uff0c\u6574\u4e2a\u6295\u8d44\u8ba1\u5212\u5360\u5168\u7403\u65b0\u5efa\u6676\u5706\u5382\u9ad8\u8fbe 42\uff05\uff0c\u6210\u4e3a\u5168\u7403\u65b0\u5efa\u6295\u8d44\u6700\u5927\u7684\u5730\u533a\u3002\u76ee\u524d\uff0c\u4e2d\u56fd12\u82f1\u5bf8\u6676\u5706\u5382\u5171\u670922\u5ea7\uff0c\u5176\u4e2d\u5728\u5efa11\u5ea7\uff0c\u89c4\u5212\u4e2d1\u5ea7\uff1b8\u82f1\u5bf8\u6676\u5706\u538218\u5ea7\uff0c\u5176\u4e2d\u5728\u5efa5\u5ea7\u3002<\/p>\n
\n\t\u5728\u8fd9\u6837\u5927\u5174\u571f\u6728\u7684\u884c\u4e1a\u80cc\u666f\u4e0b\uff0c\u5bf9\u534a\u5bfc\u4f53\u8bbe\u5907\u7684\u9700\u6c42\u548c\u6295\u8d44\u5fc5\u7136\u5de8\u5927\u3002\u7c97\u7565\u8ba1\u7b97\uff0c\u5df2\u7ecf\u516c\u5e03\u7684\u534a\u5bfc\u4f53\u4ea7\u7ebf\u6295\u8d44\u91d1\u989d\u5c06\u8d85\u8fc71000\u4ebf\u7f8e\u5143\u3002\u6309\u7167\u884c\u4e1a\u89c4\u5f8b\uff0c\u5728\u603b\u6295\u8d44\u4e2d80\uff05\u7528\u4e8e\u8bbe\u5907\u6295\u8d44\uff0c\u4ece\u800c\u53ef\u8ba1\u7b97\u51fa\u8bbe\u5907\u6295\u8d44\u989d\u4e3a800 \u4ebf\u7f8e\u5143\u3002<\/p>\n
\n\t\u5728\u6676\u5706\u5382\u8bbe\u5907\u6784\u6210\u4e2d\uff0c\u5149\u523b\u673a\u5360\u6bd4\u6700\u5927\uff0c\u536039\uff05\uff0c\u5176\u6b21\u662f\u6c89\u79ef\u8bbe\u5907\uff0c\u5360\u6bd4\u4e3a 24\uff05\uff0c\u523b\u8680\u8bbe\u5907\u7b2c\u4e09\uff0c\u5360\u6bd4\u4e3a14\uff05\uff0c\u6750\u6599\u5236\u5907\u5360\u6bd48\uff05\uff0c\u8868\u9762\u5904\u7406\u8bbe\u5907\u548c\u5b89\u88c5\u8bbe\u5907\u5206\u522b\u5360\u6bd42\uff05\uff0c\u5176\u4ed6\u8bbe\u5907\u5360\u6bd411\uff05\u3002<\/p>\n
\n\t\u636e\u6b64\uff0c\u53ef\u4ee5\u8ba1\u7b97\u51fa\uff0c2017\uff0d2019\u5e74\u56fd\u5185\u96c6\u6210\u7535\u8def\u5149\u523b\u8bbe\u5907\u5e02\u573a\u7a7a\u95f4\u4e3a312\u4ebf\u7f8e\u5143\uff0c\u6c89\u79ef\u8bbe\u5907\u5e02\u573a\u7a7a\u95f4\u4e3a192\u4ebf\u7f8e\u5143\uff0c\u523b\u8680\u8bbe\u5907\u5e02\u573a\u7a7a\u95f4\u4e3a112\u4ebf\u7f8e\u5143\uff0c\u6750\u6599\u5236\u5907\u8bbe\u5907\u5e02\u573a\u7a7a\u95f4\u4e3a64\u4ebf\u7f8e\u5143\u3002<\/p>\n
\n\t\u6211\u56fd\u4e0e\u5148\u8fdb\u56fd\u9645\u6c34\u5e73\u76f8\u6bd4\u5b58\u5728\u8f83\u5927\u5dee\u8ddd<\/p>\n
\n\t\u672a\u6765\u51e0\u5e74\uff0c\u6211\u56fd\u5bf9\u534a\u5bfc\u4f53\u8bbe\u5907\u7684\u9700\u6c42\u91cf\u5de8\u5927\u3002\u4e2d\u56fd\u534a\u5bfc\u4f53\u8bbe\u5907\u4f01\u4e1a\u867d\u7136\u5728\u8fd1\u5e74\u5185\u5448\u73b0\u51fa\u4e86\u9ad8\u589e\u957f\u6001\u52bf\uff0c\u4f46\u662f\u6bd5\u7adf\u53d1\u5c55\u65f6\u95f4\u6709\u9650\uff0c\u4e0e\u7f8e\u3001\u65e5\u7b49\u56fd\u5bb6\u6bd4\u8d77\u6765\u8fd8\u662f\u5b58\u5728\u660e\u663e\u5dee\u8ddd\u3002<\/p>\n
\n\t2008 \u5e74\u4e4b\u524d\u6211\u56fd\u534a\u5bfc\u4f53\u8bbe\u5907\u57fa\u672c\u5168\u9760\u8fdb\u53e3\uff0c\u56e0\u6b64\u56fd\u5bb6\u8bbe\u7acb\u4e86\u56fd\u5bb6\u79d1\u6280\u91cd\u5927\u4e13\u9879——\u6781\u5927\u89c4\u6a21\u96c6\u6210\u7535\u8def\u5236\u9020\u88c5\u5907\u53ca\u6210\u5957\u5de5\u827a\u79d1\u6280\u9879\u76ee\uff08\u7b80\u79f0 02\u4e13\u9879\uff09\u7814\u53d1\u56fd\u4ea7\u5316\u8bbe\u5907\u3002\u4f46\u662f\uff0c\u7531\u4e8e\u8bbe\u5907\u5236\u9020\u5bf9\u6280\u672f\u548c\u8d44\u91d1\u9700\u6c42\u8981\u6c42\u6bd4\u8f83\u9ad8\uff0c\u53ea\u6709\u5317\u65b9\u534e\u521b\u3001\u4e2d\u5fae\u534a\u5bfc\u4f53\u3001\u4e0a\u6d77\u5fae\u7535\u5b50\u7b49\u5c11\u6570\u91cd\u70b9\u4f01\u4e1a\u80fd\u591f\u627f\u62c5 02\u4e13\u9879\u7814\u53d1\u5de5\u4f5c\uff0c\u6574\u4e2a\u884c\u4e1a\u96c6\u4e2d\u5ea6\u76f8\u5bf9\u8f83\u9ad8\u3002<\/p>\n
\n\t\u867d\u7136\u572802\u4e13\u9879\u7684\u652f\u6301\u4e0b\uff0c\u6211\u56fd\u534a\u5bfc\u4f53\u8bbe\u5907\u5b9e\u73b0\u4e86\u4ece\u65e0\u5230\u6709\uff0c\u4f46\u76f8\u6bd4\u56fd\u5185\u5e9e\u5927\u7684\u5e02\u573a\u89c4\u6a21\u800c\u8a00\uff0c\u81ea\u7ed9\u7387\u4e0d\u8db315\uff05\u3002<\/p>\n
\n\t\u5373\u4f7f\u5728\u53d1\u5c55\u6c34\u5e73\u76f8\u5bf9\u8f83\u9ad8\u7684 IC \u5c01\u88c5\u6d4b\u8bd5\u9886\u57df\uff0c\u6211\u56fd\u4e0e\u5148\u8fdb\u56fd\u9645\u6c34\u5e73\u76f8\u6bd4\u4ecd\u7136\u5b58\u5728\u8f83\u5927\u5dee\u8ddd\u3002\u5c24\u5176\u662f\u5355\u6676\u7089\u3001\u6c27\u5316\u7089\u3001 CVD \u8bbe\u5907\u3001\u78c1\u63a7\u6e85\u5c04\u9540\u819c\u8bbe\u5907\u3001 CMP \u8bbe\u5907\u3001\u5149\u523b\u673a\u3001\u6d82\u5e03\uff0f\u663e\u5f71\u8bbe\u5907\u3001 ICP \u7b49\u79bb\u5b50\u4f53\u523b\u8680\u7cfb\u7edf\u3001\u63a2\u9488\u53f0\u7b49\u8bbe\u5907\u5e02\u573a\u51e0\u4e4e\u88ab\u56fd\u5916\u4f01\u4e1a\u6240\u5360\u636e\u3002<\/p>\n
\n\t\u6211\u56fd\u672c\u571f\u534a\u5bfc\u4f53\u8bbe\u5907\u4f01\u4e1a\u4e0d\u7b97\u5c11\uff0c\u4f46\u603b\u4f53\u4e0d\u5f3a\uff0c\u9500\u552e\u989d\u5360\u6bd4\u5728\u56fd\u5185\u5e02\u573a\u8fd8\u4e0d\u8db315\uff05\uff0c\u5728\u56fd\u9645\u5e02\u573a\u51e0\u4e4e\u4e3a 0\u3002\u7a76\u5176\u539f\u56e0\uff0c\u8fd8\u662f\u6280\u672f\u4e0a\u7684\u843d\u540e\u3002<\/p>\n
\n\t\u76ee\u524d\uff0c\u56fd\u4ea7\u534a\u5bfc\u4f53\u8bbe\u5907\u5904\u4e8e\u5c40\u90e8\u6709\u6240\u7a81\u7834\uff0c\u4f46\u6574\u4f53\u8f83\u4e3a\u843d\u540e\u7684\u72b6\u6001\u3002\u5c24\u5176\u4e0e\u56fd\u9645\u534a\u5bfc\u4f53\u8bbe\u5907\u5de8\u5934\u5e94\u7528\u6750\u6599\u3001 ASML\u3001LAM Research\u3001KLA\uff0dTencor\u7b49\u76f8\u6bd4\uff0c\u56fd\u4ea7\u534a\u5bfc\u4f53\u8bbe\u5907\u516c\u53f8\u7684\u5b9e\u529b\u4ecd\u7136\u504f\u5f31\uff0c\u7edd\u5927\u90e8\u5206\u4f01\u4e1a\u65e0\u6cd5\u8fbe\u5230\u56fd\u9645\u4e0a\u5df2\u7ecf\u5b9e\u73b0\u91cf\u4ea7\u768410nm\u5de5\u827a\uff0c\u90e8\u5206\u4f01\u4e1a\u7a81\u7834\u523028nm\u621614nm\u5de5\u827a\uff0c\u4f46\u5728\u4f7f\u7528\u7684\u7a33\u5b9a\u6027\u4e0a\u4e0e\u56fd\u9645\u5de8\u5934\u5dee\u8ddd\u8f83\u5927\uff0c\u8f83\u96be\u5927\u6279\u91cf\u8fdb\u5165\u91cf\u4ea7\u7ebf\uff0c\u4e5f\u8f83\u96be\u8fdb\u5165\u56fd\u9645\u4ee3\u5de5\u5de8\u5934\u7684\u751f\u4ea7\u7ebf\u3002<\/p>\n
\n\t\u867d\u7136\u6211\u56fd\u6574\u4f53\u4e0a\u4e0e\u56fd\u9645\u9886\u5148\u6c34\u5e73\u5b58\u5728\u4e00\u5b9a\u7684\u5dee\u8ddd\uff0c\u4f46\u4e5f\u4e0d\u4e4f\u8868\u73b0\u76f8\u5bf9\u7a81\u51fa\u7684\u8bbe\u5907\u4f01\u4e1a\uff0c\u5982\u8bbe\u5907\u5236\u9020\u9f99\u5934\u5317\u65b9\u534e\u521b\u3001\u5728\u523b\u8680\u673a\u9886\u57df\u505a\u51fa\u7a81\u7834\u7684\u4e2d\u5fae\u534a\u5bfc\u4f53\u3001\u5c01\u6d4b\u9886\u57df\u9f99\u5934\u957f\u5ddd\u79d1\u6280\u3001\u4ece\u4e8b\u9ad8\u7eaf\u5de5\u827a\u7cfb\u7edf\u7684\u81f3\u7eaf\u79d1\u6280\u4ee5\u53ca\u56fd\u5185\u5355\u6676\u751f\u957f\u8bbe\u5907\u7a00\u7f3a\u6807\u7684\u6676\u76db\u673a\u7535\u7b49\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"
\u4e2d\u82af\u56fd\u9645\u521b\u59cb\u4eba\u5f20\u6c5d\u4eac\u5bf9\u6211\u56fd\u96c6\u6210\u7535\u8def\u4ea7\u4e1a\u66fe\u6709\u8fc7\u8fd9\u6837\u7684\u70b9\u8bc4\uff0c\u6211\u56fd\u534a\u5bfc\u4f53\u4ea7\u4e1a\u53d1\u5c55\u6700\u8584\u5f31\u7684\u73af\u8282\u5c31\u662f\u6750\u6599\u548c\u8bbe\u5907\uff0c\u4f46\u8fd9\u4e5f\u610f\u5473\u7740\u5e02\u573a\u673a\u9047\u3002\u7ecf\u8fc7\u957f\u671f\u53d1\u5c55\uff0c\u6211\u56fd\u4f01\u4e1a\u5728\u534a\u5bfc\u4f53\u5e94\u7528\u3001\u5c01<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[10],"tags":[],"_links":{"self":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/1497"}],"collection":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=1497"}],"version-history":[{"count":0,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/1497\/revisions"}],"wp:attachment":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=1497"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=1497"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=1497"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}