{"id":1178,"date":"2018-10-09T01:47:44","date_gmt":"2018-10-09T01:47:44","guid":{"rendered":""},"modified":"2018-10-09T09:47:59","modified_gmt":"2018-10-09T01:47:59","slug":"euv%e6%8a%80%e6%9c%af%e7%9a%84%e9%a6%96%e6%ac%be7%ef%bc%8b%e7%ba%b3%e7%b1%b3%e8%8a%af%e7%89%87%e6%98%8e%e5%b9%b4%e9%87%8f%e4%ba%a7%ef%bc%8c%e5%8f%b0%e7%a7%af%e7%94%b5%e5%b0%86%e6%88%90","status":"publish","type":"post","link":"http:\/\/www.szryc.com\/?p=1178","title":{"rendered":"EUV\u6280\u672f\u7684\u9996\u6b3e7\uff0b\u7eb3\u7c73\u82af\u7247\u660e\u5e74\u91cf\u4ea7\uff0c\u53f0\u79ef\u7535\u5c06\u6210"},"content":{"rendered":"

\u6676\u5706\u4ee3\u5de5\u9f99\u5934\u53f0\u79ef\u7535\u91c7\u7528\u6781\u7d2b\u5916\u5149\uff08EUV\uff09\u5fae\u5f71\u6280\u672f\u7684\u9996\u6b3e7\uff0b\u7eb3\u7c73\u82af\u7247\u5df2\u7ecf\u5b8c\u6210\u8bbe\u8ba1\u5b9a\u6848\uff0c\u652f\u63f4\u6700\u591a4\u5c42EUV\u5149\u7f69\u3002<\/span>

\n

\n\u53f0\u79ef\u7535\u540c\u65f6\u4e5f\u5728\u52a0\u901f5\u7eb3\u7c73\u5236\u7a0b\u63a8\u8fdb\uff0c\u9884\u8ba1\u660e\u5e744\u6708\u53ef\u5f00\u59cb\u8fdb\u884c\u98ce\u9669\u8bd5\u4ea7\uff0c\u652f\u63f4\u7684EUV\u5149\u7f69\u5c42\u5c06\u4e0a\u770b14\u5c42\uff0c5\u7eb3\u7c73\u53ef\u671b\u5982\u671f\u57282020\u5e74\u4e0a\u534a\u5e74\u8fdb\u5165\u91cf\u4ea7\u3002<\/span>

\n

\n\u76f8\u5173\u4eba\u58eb\u8ba4\u4e3a\uff0c\u53f0\u79ef\u7535\u5728\u6676\u5706\u5148\u8fdb\u5236\u7a0b\u6301\u7eed\u63a8\u8fdb\uff0c\u63a8\u51fa\u53ef\u6574\u5408\u591a\u79cd\u5f02\u8d28\u82af\u7247\u7684\u5148\u8fdb\u5c01\u88c5\u6280\u672f\uff0c\u6700\u5927\u7684\u7ade\u4e89\u5bf9\u624b\u97e9\u56fd\u4e09\u661f\u77ed\u671f\u5185\u6050\u96be\u4e0e\u4e4b\u6297\u8861\u3002<\/span>

\n

\n\u7531\u6b64\u6765\u770b\uff0c\u82f9\u679c\u660e\u540e\u4e24\u5e74\u5c06\u63a8\u51fa\u76847\uff0b\u7eb3\u7c73A13\u53ca5\u7eb3\u7c73A14\u5e94\u7528\u5904\u7406\u5668\uff0c\u53ef\u80fd\u5c06\u7ee7\u7eed\u7531\u53f0\u79ef\u7535\u62ff\u4e0b\u72ec\u5bb6\u4ee3\u5de5\u8ba2\u5355\u3002<\/span>

\n

\n\u968f\u7740\u53f0\u79ef\u75357\u7eb3\u7c73\u6301\u7eed\u63d0\u5347\u4ea7\u80fd\u4e14\u826f\u7387\u9010\u6b65\u6539\u5584\uff0c\u53f0\u79ef\u7535\u9996\u6b3e\u91c7\u7528EUV\u6280\u672f\u76847\uff0b\u7eb3\u7c73\u5236\u7a0b\u5df2\u5b8c\u6210\u7814\u53d1\u5e76\u8fdb\u5165\u8bd5\u4ea7\uff0c\u4e0e7\u7eb3\u7c73\u76f8\u8f83\u62e5\u6709\u66f4\u4f4e\u529f\u8017\u8868\u73b0\u53ca\u66f4\u9ad8\u96c6\u79ef\u5bc6\u5ea6\u3002<\/span>

\n

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\n

\n\u7b2c\u4e09\u5b63\u521d\u987a\u5229\u5b8c\u6210\u5ba2\u6237\u9996\u6b3e\u82af\u7247\u7684\u8bbe\u8ba1\u5b9a\u6848\uff0c\u9884\u8ba1\u5e74\u5e95\u524d\u4f1a\u6709\u66f4\u591a\u5ba2\u6237\u82af\u7247\u5b8c\u6210\u8bbe\u8ba1\u5b9a\u6848\uff0c\u660e\u5e74\u7b2c\u4e8c\u5b63\u540e\u5c06\u53ef\u987a\u5229\u8fdb\u5165\u91cf\u4ea7\uff0c\u5c4a\u65f6\u53f0\u79ef\u7535\u5c06\u6210\u4e3a\u5168\u7403\u9996\u5bb6\u91c7\u7528EUV\u6280\u672f\u91cf\u4ea7\u7684\u6676\u5706\u4ee3\u5de5\u5382\u3002<\/span>

\n\u53e6\u5916\u53f0\u79ef\u7535\u65b012\u82f1\u5bf8\u6676\u5706\u5382Fab 18\uff0c\u7b2c\u4e00\u671f\u5de5\u7a0b\u5e0c\u671b\u62a2\u5728\u5e74\u5e95\u524d\u5b8c\u5de5\uff0c\u660e\u5e74\u5f00\u59cb\u8fdb\u5165\u88c5\u673a\uff0c\u7b2c\u4e8c\u671f\u5de5\u7a0b\u4e5f\u5df2\u5f00\u59cb\u52a8\u5de5\u5174\u5efa\u3002<\/span>

\n

\n\u5173\u4e8e\u53f0\u79ef\u75355\u7eb3\u7c73\u7684\u7814\u53d1\u8fdb\u5ea6\uff0c\u9884\u8ba1\u660e\u5e74\u4e0a\u534a\u5e74\u53ef\u83b7\u5f97\u5ba2\u6237\u9996\u6b3e\u82af\u7247\u7684\u8bbe\u8ba1\u5b9a\u6848\uff0c\u660e\u5e744\u6708\u53ef\u671b\u8fdb\u5165\u98ce\u9669\u8bd5\u4ea7\u3002\u4ee5\u8fdb\u5ea6\u6765\u770b\uff0c2020\u5e74\u4e0a\u534a\u5e74\u5c06\u8fdb\u5165\u91cf\u4ea7\u9636\u6bb5\u3002<\/span>

\n

\n\u4e0e\u521d\u4ee37nm\u5de5\u827a\u76f8\u6bd4\uff0c\u53f0\u79ef\u7535\u76845nm\u5de5\u827a\u5927\u6982\u80fd\u518d\u964d\u4f4e20%\u7684\u80fd\u8017\uff0c\u6676\u4f53\u7ba1\u5bc6\u5ea6\u518d\u63d0\u9ad81.8\u500d\uff0c\u81f3\u4e8e\u6027\u80fd\uff0c\u9884\u8ba1\u6027\u80fd\u63d0\u534715%\uff0c\u5982\u679c\u4f7f\u7528\u65b0\u8bbe\u5907\u7684\u8bdd\u53ef\u80fd\u4f1a\u63d0\u534725%\u3002<\/span>

\n

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\n

\n\u9762\u5bf9\u4e09\u661f\u53ca\u683c\u82af\u572822\u7eb3\u7c73\u5168\u8017\u5c3d\u578b\u7edd\u7f18\u5c42\u4e0a\u8986\u7845\uff08FD-SOI\uff09\u5236\u7a0b\u4e0a\u6301\u7eed\u83b7\u5f97\u8ba2\u5355\uff0c\u53f0\u79ef\u7535\u4f18\u531628\u7eb3\u7c73\u63a8\u51fa\u768422\u7eb3\u7c73\u8d85\u4f4e\u529f\u8017\uff08ULP\uff09\u5236\u7a0b\u5df2\u7ecf\u8fdb\u5165\u8bd5\u4ea7\u9636\u6bb5\u3002<\/span>

\n\u76ee\u524d\u5df2\u6709\u8d85\u8fc740\u4e2a\u5ba2\u6237\u4ea7\u54c1\u5b8c\u6210\u8bbe\u8ba1\u5b9a\u6848\uff0c\u660e\u5e74\u5c06\u987a\u5229\u8fdb\u5165\u91cf\u4ea7\uff0c\u8d85\u4f4e\u6f0f\u7535\uff08ULL\uff09\u5236\u7a0b\u9884\u671f\u660e\u5e74\u4e0a\u534a\u5e74\u83b7\u5f97\u5ba2\u6237\u82af\u7247\u8bbe\u8ba1\u5b9a\u6848\u3002<\/span>

\n

\n\u53e6\u5916\u6839\u636e\u56fd\u9645\u7535\u5b50\u5546\u60c5\u4e4b\u524d\u7684\u62a5\u9053\uff0c\u53f0\u79ef\u7535\u5df2\u7ecf\u516c\u5e03\u4e863nm\u5236\u7a0b\u5de5\u827a\u8ba1\u5212\uff0c\u53f0\u5357\u56ed\u533a\u76843nm\u6676\u5706\u5de5\u5382\u5df2\u7ecf\u901a\u8fc7\u4e86\u73af\u8bc4\u521d\u5ba1\uff0c\u53f0\u79ef\u7535\u8ba1\u5212\u6295\u8d446000\u4ebf\u65b0\u53f0\u5e01\uff08\u7ea6\u4e3a194\u4ebf\u7f8e\u5143\uff09\uff0c2020\u5e74\u5f00\u59cb\u5efa\u5382\uff0c2021\u5e74\u5b8c\u6210\u8bbe\u5907\u5b89\u88c5\uff0c\u9884\u8ba1\u6700\u5feb2022\u5e74\u5e95\u52302023\u5e74\u521d\u6295\u4ea7\uff0c3nm\u5382\u5b8c\u6210\u540e\u9884\u8ba1\u96c7\u7528\u5458\u5de5\u8fbe\u56db\u5343\u4eba\u3002<\/span>

\n

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