{"id":11376,"date":"2023-08-23T16:28:45","date_gmt":"2023-08-23T08:28:45","guid":{"rendered":"http:\/\/www.szryc.com\/?p=11376"},"modified":"2023-08-23T16:28:45","modified_gmt":"2023-08-23T08:28:45","slug":"%e5%9f%ba%e4%ba%8espad%e7%9a%84%e8%bf%91%e7%ba%a2%e5%a4%96%e9%ab%98%e5%88%86%e8%be%a8%e7%8e%87dtof%e6%8e%a2%e6%b5%8b%e5%99%a8%e5%b7%a5%e8%89%ba%e8%ae%be%e8%ae%a1","status":"publish","type":"post","link":"http:\/\/www.szryc.com\/?p=11376","title":{"rendered":"\u57fa\u4e8eSPAD\u7684\u8fd1\u7ea2\u5916\u9ad8\u5206\u8fa8\u7387dTOF\u63a2\u6d4b\u5668\u5de5\u827a\u8bbe\u8ba1"},"content":{"rendered":"

\u57fa\u4e8e\u5355\u5149\u5b50\u96ea\u5d29\u4e8c\u6781\u7ba1<\/u>\uff08SPAD<\/u>\uff09\u7684\u5149\u5b50\u76f4\u63a5\u98de\u884c\u65f6\u95f4\uff08dTOF\uff09\u63a2\u6d4b\u5668<\/u>\u901a\u8fc7\u6d4b\u91cf\u53d1\u5c04\u5149\u4e0e\u53cd\u5c04\u5149\u4e4b\u95f4\u7684\u65f6\u95f4\u95f4\u9694\u6765\u8ba1\u7b97\u6240\u63a2\u6d4b\u7684\u8ddd\u79bb\uff0c\u5177\u6709\u4f53\u79ef\u5c0f\u3001\u529f\u8017\u4f4e\u548c\u5206\u8fa8\u7387\u9ad8\u7b49\u4f18\u70b9\uff0c\u5df2\u88ab\u5e7f\u6cdb\u5e94\u7528\u4e8e\u81ea\u52a8\u9a7e\u9a76<\/u>\u3001\u4eba\u8138\u8bc6\u522b\u3001AR\/VR<\/u>\u4ee5\u53ca3D\u6210\u50cf\u7b49\u65b0\u5174\u5e94\u7528\u9886\u57df\u3002dTOF\u63a2\u6d4b\u5668\u901a\u5e38\u91c7\u7528\u7247\u5185\u7684\u65f6\u95f4\u6570\u5b57\u8f6c\u6362\u5668<\/u>\uff08TDC\uff09\u6765\u7cbe\u786e\u6d4b\u91cf\u5149\u5b50\u98de\u884c\u65f6\u95f4\uff0c\u76f8\u6bd4\u4e8e\u95f4\u63a5\u98de\u884c\u65f6\u95f4\uff08iTOF\uff09\u6d4b\u91cf\u6280\u672f\uff0c\u5177\u6709\u66f4\u9ad8\u7684\u6297\u5e72\u6270\u80fd\u529b\u548c\u66f4\u5bbd\u7684\u52a8\u6001\u8303\u56f4\u3002\u76ee\u524ddTOF\u63a2\u6d4b\u5668\u6b63\u671d\u7740\u4e0e\u7845\u57fa\u5de5\u827a\u76f8\u517c\u5bb9\u7684\u4f4e\u6210\u672c\u548c\u9ad8\u96c6\u6210\u5ea6\u65b9\u5411\u5feb\u901f\u53d1\u5c55\uff0c\u7136\u800c\u8fd8\u5b58\u5728\u4eba\u773c\u5b89\u5168\u9608\u503c\u4f4e\u3001\u65f6\u95f4\u5206\u8fa8\u7387\u548c\u52a8\u6001\u8303\u56f4\u76f8\u5236\u7ea6\u7b49\u95ee\u9898\u3002<\/p>\n

\u636e\u9ea6\u59c6\u65af\u54a8\u8be2\u62a5\u9053\uff0c\u5357\u4eac\u90ae\u7535\u5927\u5b66\u96c6\u6210\u7535\u8def<\/u>\u79d1\u5b66\u4e0e\u5de5\u7a0b\u5b66\u9662\u3001\u5c04\u9891<\/u>\u96c6\u6210\u4e0e\u5fae\u7ec4\u88c5\u6280\u672f\u56fd\u5bb6\u5730\u65b9\u8054\u5408\u5de5\u7a0b\u5b9e\u9a8c\u5ba4\u548c\u6838\u63a2\u6d4b\u4e0e\u6838\u7535\u5b50\u5b66<\/u>\u56fd\u5bb6\u91cd\u70b9\u5b9e\u9a8c\u5ba4\u7684\u8054\u5408\u79d1\u7814\u56e2\u961f\u5728\u300a\u5149\u5b66<\/u>\u5b66\u62a5\u300b\u671f\u520a\u4e0a\u53d1\u8868\u4e86\u4ee5\u201c\u4e00\u79cd\u7845\u57fa\u9ad8\u7075\u654f\u5ea6\u8fd1\u7ea2\u5916<\/u>\u5355\u5149\u5b50dTOF\u63a2\u6d4b\u5668\u201d\u4e3a\u4e3b\u9898\u7684\u6587\u7ae0\u3002\u8be5\u6587\u7ae0\u7b2c\u4e00\u4f5c\u8005\u4e3a\u738b\u5e05\u5eb7\uff0c\u901a\u8baf\u4f5c\u8005\u4e3a\u5f90\u8dc3\u3002<\/p>\n

\u672c\u6587\u57fa\u4e8e0.18 \u03bcm BCD\u5de5\u827a\u7814\u7a76\u5e76\u5b9e\u73b0\u4e86\u4e00\u79cd\u8fd1\u7ea2\u5916\u9ad8\u7075\u654f\u5ea6dTOF\u63a2\u6d4b\u5668\u3002<\/p>\n

\u8fd1\u7ea2\u5916SPAD\u5668\u4ef6<\/p>\n

\u5668\u4ef6\u7ed3\u6784<\/p>\n

\u6240\u63d0\u51fa\u7684\u8fd1\u7ea2\u5916SPAD\u5668\u4ef6\u7684\u622a\u9762\u56fe\u5982\u56fe2\u6240\u793a\u3002\u8be5\u5668\u4ef6\u5229\u7528BCD\u5de5\u827a\u63d0\u4f9b\u7684\u9ad8\u538b<\/u>p\u9631\uff08HVPW\uff09\u548c\u9ad8\u538bn+\u57cb\u5c42\uff08HVBN\uff09\u4e4b\u95f4\u5f62\u6210\u7684\u6df1\u7ed3\u8017\u5c3d\u5c42\u4f5c\u4e3a\u96ea\u5d29\u500d\u589e\u533a\uff0c\u6709\u6548\u63d0\u9ad8\u5bf9\u8fd1\u7ea2\u5916\u5149\u5b50\u7684\u63a2\u6d4b\u6982\u7387\u3002\u540c\u65f6\u5728HVPW\u91cc\u8fdb\u884c\u6d45\u7ed3\u7684\u91cd\u63ba\u6742P+\u6ce8\u5165\uff0c\u5e76\u5728p+\u8868\u9762\u5916\u4fa7\u5f62\u6210\u73af\u5f62<\/u>\u7684\u9633\u6781\uff0c\u4e14\u5728p+\u533a\u8868\u9762\u4e2d\u95f4\u4e0d\u505a\u91d1\u5c5e\u7845\u5316\u7269\u6dc0\u79ef\uff0c\u5f62\u6210\u900f\u5149\u7684\u7a97\u53e3\u3002\u9ad8\u538bn\u9631\uff08HVNW\uff09\u4f5c\u4e3an+\u57cb\u5c42\u7684\u5f15\u51fa\u533a\u57df\uff0c\u5728\u5176\u8868\u9762\u8fdb\u884c\u6d45\u7ed3\u7684\u91cd\u63ba\u6742n+\u6ce8\u5165\uff0c\u5e76\u5728n+\u533a\u8868\u9762\u5f62\u6210\u73af\u5f62\u7684\u9634\u6781\u3002\u5728\u5668\u4ef6\u9634\u6781n+\u63a5\u89e6\u5b54\u548c\u9633\u6781p+\u63a5\u89e6\u5b54\u4e4b\u95f4\u8fd8\u6709\u6d45\u6c9f\u69fd\u9694\u79bb\uff08STI\uff09\uff0c\u9632\u6b62\u5668\u4ef6\u7535\u6781\u4e4b\u95f4\u53d1\u751f\u51fb\u7a7f\u3002\u7279\u522b\u662f\u5728\u96ea\u5d29\u500d\u589e\u533a\u5916\u4fa7\u6709\u4f4e\u63ba\u6742\u7684p \u578b\u5916\u5ef6\u5c42\uff08P-epi\uff09\u4f5c\u4e3a\u5668\u4ef6\u7684\u865a\u62df\u4fdd\u62a4\u73af\uff0c\u4e0d\u4f46\u80fd\u907f\u514d\u5668\u4ef6\u8868\u9762\u88ab\u8fc7\u65e9\u51fb\u7a7f\uff0c\u800c\u4e14\u80fd\u6709\u6548\u964d\u4f4e\u4fdd\u62a4\u73af\u533a\u57df\u7684\u7535\u573a\uff0c\u51cf\u5c0fSTI\u5468\u56f4\u7f3a\u9677\u5f15\u8d77\u7684\u6697\u8ba1\u6570\u566a\u58f0\u5f71\u54cd\u3002<\/p>\n

SPAD\u5668\u4ef6\u5bf9\u5149\u5b50\u7684\u5438\u6536\u4e3b\u8981\u53d1\u751f\u5728\u96ea\u5d29\u500d\u589e\u533a\u548c\u9ad8\u538bp\u9631\u533a\uff0c\u7531\u4e8e\u96ea\u5d29\u500d\u589e\u533a\u88ab\u5b8c\u5168\u8017\u5c3d\u4e14\u6df1\u57cb\u4e8e\u886c\u5e95\uff0c\u56e0\u6b64\u80fd\u83b7\u5f97\u6bd4\u9ad8\u538bp\u9631\u533a\u66f4\u9ad8\u7684\u8fd1\u7ea2\u5916\u5149\u751f\u8f7d\u6d41\u5b50\u91cf\u5b50\u6548\u7387\u3002\u9ad8\u538bp\u9631\u533a\u548c\u96ea\u5d29\u500d\u589e\u533a\u5438\u6536\u5149\u5b50\u540e\u4ea7\u751f\u7684\u7535\u5b50<\/u>-\u7a7a\u7a74\u5bf9\u5728\u53cd\u5411\u7535\u573a\u4f5c\u7528\u4e0b\u5206\u522b\u5411n+\u57cb\u5c42\u548cp+\u9633\u6781\u65b9\u5411\u6f02\u79fb\u3002\u5bf9\u4e8e\u8fd1\u7ea2\u5916\u77ed\u6ce2\u5149\u5b50\uff0c\u7531\u4e8e\u80fd\u91cf\u8f83\u4f4e\u800c\u5bb9\u6613\u7a7f\u8fc7\u9ad8\u538bp\u9631\u4e2d\u6027\u5438\u6536\u533a\u8fdb\u5165\u96ea\u5d29\u500d\u589e\u533a\u88ab\u5438\u6536\u3002\u9760\u8fd1\u9ad8\u538bp\u9631\u4e00\u4fa7\u7684\u96ea\u5d29\u500d\u589e\u533a\u7531\u4e8e\u63ba\u6742\u6d53\u5ea6\u8fdc\u4f4e\u4e8en+\u57cb\u5c42\u4e00\u4fa7\u7684\u96ea\u5d29\u500d\u589e\u533a\uff0c\u5176\u8017\u5c3d\u533a\u66f4\u5bbd\uff0c\u662f\u4ea7\u751f\u5149\u751f\u8f7d\u6d41\u5b50\u7684\u4e3b\u8981\u533a\u57df\u3002\u7531\u4e8e\u96ea\u5d29\u500d\u589e\u533a\u5b58\u5728\u5f3a\u7535\u573a\uff0c\u96ea\u5d29\u500d\u589e\u533a\u5185\u4ea7\u751f\u7684\u5149\u751f\u7535\u5b50\u548c\u9ad8\u538bp\u9631\u533a\u6269\u6563\u8fc7\u6765\u7684\u5149\u751f\u7535\u5b50\u4f1a\u5728\u5f3a\u7535\u573a\u4f5c\u7528\u4e0b\u53d1\u751f\u96ea\u5d29\u500d\u589e\u6548\u5e94\uff0c\u4f7f\u9633\u6781\u7535\u6d41<\/u>\u5728\u77ed\u65f6\u95f4\u5185\u8fc5\u901f\u589e\u52a0\uff0c\u5b9e\u73b0\u5355\u5149\u5b50\u7684\u63a2\u6d4b\u3002\u7531\u4e8e\u9760\u8fd1\u9ad8\u538bp\u9631\u4e00\u4fa7\u7684\u96ea\u5d29\u500d\u589e\u533a\u7684\u5149\u751f\u7535\u5b50\u5728\u53cd\u5411\u7535\u573a\u4f5c\u7528\u4e0b\u6700\u7ec8\u8fdb\u5165\u500d\u589e\u533a\u4e2d\u5fc3\uff0c\u4ece\u800c\u4f7f\u53d1\u751f\u96ea\u5d29\u500d\u589e\u7684\u8def\u5f84\u66f4\u957f\u3001\u96ea\u5d29\u7535\u573a\u66f4\u5f3a\uff0c\u53ef\u83b7\u5f97\u66f4\u9ad8\u7684\u96ea\u5d29\u500d\u589e\u56e0\u5b50\uff0c\u76f8\u6bd4\u4e0e\u4e3b\u8981\u4f9d\u9760\u7a7a\u7a74\u78b0\u649e\u7535\u79bb\u7684\u5668\u4ef6\u6709\u66f4\u9ad8\u7684\u96ea\u5d29\u89e6\u53d1\u6982\u7387\uff0c\u80fd\u663e\u8457\u589e\u5f3a\u5668\u4ef6\u5bf9\u8fd1\u7ea2\u5916\u5149\u5b50\u7684\u63a2\u6d4b\u7075\u654f\u5ea6\u3002<\/p>\n

\"384ebf28-4106-11ee-a2ef-92fbcf53809c\"<\/p>\n

\u56fe1 SPAD\u622a\u9762\u56fe<\/p>\n

TCAD\u4eff\u771f<\/u>\u5206\u6790<\/p>\n

\u57fa\u4e8e0.18 \u03bcm BCD\u5de5\u827a\u5bf9\u6240\u63d0\u51fa\u7684SPAD\u5668\u4ef6\u4f7f\u7528SILVAC<\/u>O Atlas\u5de5\u5177\u8fdb\u884c\u4e86\u76d6\u9769\u6a21\u5f0f\u4e0b\u7684\u4e8c\u7ef4\u5668\u4ef6\u4eff\u771f\u3002\u4eff\u771f\u91c7\u7528\u4e86Shock-Read-Hall\u8f7d\u6d41\u5b50\u4ea7\u751f-\u590d\u5408\u3001Conmob\u548cFldmob\u8fc1\u79fb\u7387\u3001Selberherr\u78b0\u649e\u7535\u79bb\u548cGeiger\u7b49\u7269\u7406\u6a21\u578b\u4ee5\u83b7\u5f97\u63a5\u8fd1\u5b9e\u9645\u7684\u5668\u4ef6\u7535\u5b66\u7279\u6027\u3002\u4e3a\u4e86\u80fd\u4f7f\u6240\u8bbe\u8ba1\u7684SPAD\u5668\u4ef6\u65e2\u6ee1\u8db3\u5c0f\u5c3a\u5bf8\u8981\u6c42\u53c8\u4fdd\u8bc1\u4e0d\u53d1\u751f\u8fb9\u7f18\u51fb\u7a7f\uff0c\u9700\u8981\u4f18\u5316\u6700\u4f73\u4fdd\u62a4\u73af\u95f4\u8ddd\u3002\u56fe2\uff08a\uff09\u663e\u793a\u4e86\u4eff\u771f\u5f97\u5230\u7684\u56db\u79cd\u4e0d\u540c\u4fdd\u62a4\u73af\u95f4\u8ddd\u7684\u5668\u4ef6I-V\u7279\u6027\u66f2\u7ebf\u3002\u53ef\u4ee5\u770b\u51fa\uff0c\u4fdd\u62a4\u73af\u95f4\u8ddd\u4e3aGRW=0.5 \u03bcm\u548cGRW=1.5 \u03bcm\u5668\u4ef6\u7684\u96ea\u5d29\u51fb\u7a7f\u7535\u538b\u5206\u522b\u4e3a19 V\u548c31.7 V\uff0c\u800c\u4fdd\u62a4\u73af\u95f4\u8ddd\u4e3aGRW=2.5 \u03bcm\u4e0e3.5 \u03bcm\u5668\u4ef6\u7684\u96ea\u5d29\u51fb\u7a7f\u7535\u538b\u5747\u4e3a42 V\uff0c\u8fd9\u8bf4\u660e\u5f53\u95f4\u8ddd\u8fc7\u5c0f\u65f6\uff0c\u4f1a\u5728\u4fdd\u62a4\u73af\u8fb9\u7f18\u533a\u57df\u63d0\u524d\u53d1\u751f\u96ea\u5d29\u51fb\u7a7f\uff0c\u4ece\u800c\u4f7fSPAD\u5668\u4ef6\u4e0d\u80fd\u6b63\u5e38\u5de5\u4f5c\u3002\u7efc\u5408\u8003\u8651\u5668\u4ef6\u5c3a\u5bf8\u53ca\u6027\u80fd\uff0c\u672c\u6587\u9009\u75282.5 \u03bcm\u7684\u4fdd\u62a4\u73af\u95f4\u8ddd\u3002\u56fe2\uff08b\uff09\u4e3aGRW=2.5 \u03bcm\u5668\u4ef6\u5728\u8fc7\u504f\u538b\u4e3a3 V\u4e0b\u7684\u4e8c\u7ef4\u7535\u573a\u5206\u5e03\u60c5\u51b5\u3002\u53ef\u4ee5\u770b\u5230\u5668\u4ef6\u96ea\u5d29\u533a\u4e2d\u5fc3\u8ddd\u8868\u9762\u6df1\u5ea6\u7ea6\u4e3a4 \u03bcm\uff0c\u96ea\u5d29\u533a\u5bbd\u5ea6\u7ea6\u4e3a1 \u03bcm\uff0c\u7535\u573a\u5206\u5e03\u5747\u5300\u3001\u96c6\u4e2d\uff0c\u7535\u573a\u5f3a\u5ea6\u5cf0\u503c\u8fbe\u52303.75\u00d710\u2075 V\/cm\uff0c\u4ece\u800c\u4fdd\u8bc1\u4e86\u5bf9\u8fd1\u7ea2\u5916\u5149\u5b50\u6709\u66f4\u9ad8\u7684\u63a2\u6d4b\u6982\u7387\u3002\u7531\u4e8e\u865a\u62df\u4fdd\u62a4\u73af\u533a\u57df\u63ba\u6742\u6d53\u5ea6\u4f4e\uff0c\u7535\u573a\u5f3a\u5ea6\u660e\u663e\u5c0f\u4e8e\u96ea\u5d29\u533a\u4e2d\u5fc3\u7535\u573a\uff0c\u80fd\u591f\u6709\u6548\u9632\u6b62\u5668\u4ef6\u8fb9\u7f18\u8fc7\u65e9\u51fb\u7a7f\uff0c\u540c\u65f6\u907f\u514dSTI\u754c\u9762\u7f3a\u9677\u4ea7\u751f\u7684\u8f7d\u6d41\u5b50\u88ab\u5f3a\u7535\u573a\u9a71\u5165\u96ea\u5d29\u500d\u589e\u533a\u800c\u5f15\u53d1\u4e25\u91cd\u7684\u6697\u8ba1\u6570\u566a\u58f0\u3002<\/p>\n

\u00a0<\/p>\n

\"38877af2-4106-11ee-a2ef-92fbcf53809c-1\"<\/div>\n

 <\/p>\n

\u56fe2 TCAD\u4eff\u771f\uff1a\uff08a\uff09I-V\u7279\u6027\u66f2\u7ebf\uff1b\uff08b\uff09\u4e8c\u7ef4\u7535\u573a\u5206\u5e03<\/p>\n

\u5355\u5149\u5b50dTOF\u63a2\u6d4b\u5668\u8bfb\u51fa\u7535\u8def<\/p>\n

\u63a2\u6d4b\u5668\u7ed3\u6784<\/p>\n

\u5355\u5149\u5b50dTOF\u63a2\u6d4b\u5668\u8bfb\u51fa\u7535\u8def\u7ed3\u6784\u5982\u56fe3\u6240\u793a\uff0c\u4e3b\u8981\u7531\u6a21\u62df<\/u>\u524d\u7aef\uff08AFE<\/u>\uff09\u3001\u6216\u903b\u8f91\u6811\uff08OR<\/u>tree\uff09\u3001TDC\u7535\u8def\u4ee5\u53ca\u5e76\u4e32\u8f6c\u6362\u7535\u8def\uff08PI<\/u>SO\uff09\u7ec4\u6210\u3002\u4e3a\u4e86\u63d0\u9ad8\u5355\u5149\u5b50\u63a2\u6d4b\u6548\u7387\uff0c\u753116\u4e2aSPAD\u5668\u4ef6\u6784\u6210\u4e00\u4e2a\u63a2\u6d4b\u5668\u9635\u5217\u6765\u589e\u52a0\u6709\u6548\u7684\u611f\u5149\u9762\u79ef\uff0c\u6bcf\u4e2aSPAD\u90fd\u63a51\u4e2a\u7531\u6dec\u706d\u548c\u8109\u51b2\u6574\u5f62\u7535\u8def\u6784\u6210\u7684\u6a21\u62df\u524d\u7aef\u8fdb\u884c\u96ea\u5d29\u6dec\u706d\u548c\u8109\u5bbd\u538b\u7f29\u3002dTOF\u63a2\u6d4b\u5668\u7684\u5de5\u4f5c\u539f\u7406<\/u>\u5982\u4e0b\uff1aSPAD\u5668\u4ef6\u5de5\u4f5c\u5728\u76d6\u9769\u6a21\u5f0f\u4e0b\uff0c\u6fc0\u5149\u53d1\u5c04\u540e\u88ab\u76ee\u6807\u7269\u53cd\u5c04\u56de\u7684\u5149\u5b50\u88abSPAD\u63a2\u6d4b\u5230\u7acb\u5373\u4ea7\u751f\u96ea\u5d29\u7535\u6d41\u3002<\/p>\n

\"38addaf8-4106-11ee-a2ef-92fbcf53809c-1\"<\/p>\n

\u56fe3 \u5355\u5149\u5b50dTOF\u63a2\u6d4b\u5668\u7535\u8def\u7ed3\u6784\u56fe<\/p>\n

TDC\u7535\u8def<\/p>\n

\u4e3a\u4e86\u5b9e\u73b0\u9ad8\u5206\u8fa8\u7387\u548c\u5bbd\u52a8\u6001\u8303\u56f4\u7684TOF\u503c\u6d4b\u91cf\uff0c\u672c\u6587\u63d0\u51fa\u4e86\u4e00\u79cd\u7531\u7c97\u8ba1\u6570\u5668\uff08CoarseCounte<\/u>r\uff09\u3001\u7cbe\u8ba1\u6570\u5668\uff08Fine Counter\uff09\u3001\u63d2\u503c\u5668\uff08Interpolator\uff09\u4ee5\u53ca\u9501\u76f8\u73afPLL \u6784\u6210\u7684\u5177\u6709\u5185\u7f6e\u65f6\u949f<\/u>\u7684\u4e09\u6b65\u5f0f\u6df7\u5408\u7ed3\u6784TDC\uff0c\u5982\u56fe4\u6240\u793a\u3002\u8003\u8651\u5230\u53c2\u8003\u65f6\u949f\u9891\u7387\u4f1a\u5f71\u54cd\u7cfb\u7edf\u7684\u5206\u8fa8\u7387\u548c\u52a8\u6001\u8303\u56f4\uff0c\u5f53\u5206\u8fa8\u7387\u8fbe\u5230\u76ae\u79d2\u6c34\u5e73\u65f6\uff0c\u65f6\u949f\u7684\u6296\u52a8\u4f1a\u76f4\u63a5\u5f71\u54cd\u6d4b\u91cf\u7684\u7cbe\u5ea6\u548c\u7ebf\u6027\u5ea6\uff0c\u4e3a\u6b64\u672c\u6587\u91c7\u7528\u57fa\u4e8e\u538b\u63a7\u632f\u8361\u5668<\/u>\uff08VCO\uff09\u7684\u4e09\u9636II\u578b\u9501\u76f8\u73af\u4e3a\u7cfb\u7edf\u63d0\u4f9b\u7a33\u5b9a\u7684\u65f6\u949f\u3002\u5176\u4e2d\uff0cVCO\u91c7\u7528\u4f2a\u5dee\u5206\u5ef6\u65f6\u5355\u5143\uff08Delay\uff09\u7ed3\u6784\u6765\u6291\u5236\u7535\u6e90<\/u>\u53ca\u886c\u5e95\u5171\u6a21\u566a\u58f0\u7684\u5f71\u54cd\uff0c\u5e76\u5728\u4f20\u7edf\u4f2a\u5dee\u5206\u5ef6\u65f6\u5355\u5143\u7684\u57fa\u7840\u4e0a\u589e\u52a0MP5\u548cMP6\u7ba1\uff0c\u5176\u6805\u538b\u7531\u5916\u90e8\u504f\u7f6eVb\u8fdb\u884c\u63a7\u5236\uff0c\u4e0d\u4ec5\u80fd\u591f\u62d3\u5bbdVCO\u7684\u9891\u7387\u8c03\u8c10\u8303\u56f4\uff0c\u800c\u4e14\u6709\u5229\u4e8e\u964d\u4f4e\u63a7\u5236\u7535\u538bVc\u6ce2\u52a8\u9020\u6210\u7684\u65f6\u949f\u6296\u52a8\u3002\u6b64\u5916\uff0c\u5728\u6bcf\u7ea7\u5ef6\u65f6\u5355\u5143\u7684\u8f93\u51fa\u7aef\u63a5\u5165\u7f13\u51b2BUF\u7535\u8def\u63d0\u9ad8\u65f6\u949f\u9a71\u52a8\u80fd\u529b\uff0c\u53ef\u4ee5\u5f97\u5230\u5177\u6709\u4f4e\u6296\u52a8\u3001\u4f4e\u76f8\u4f4d\u566a\u58f0\u548c\u5360\u7a7a\u6bd4\u63a5\u8fd150%\u7684\u56db\u901a\u9053\u9ad8\u9891\u5206\u76f8\u65f6\u949f\uff08P1\u3001P2\u3001P3\u3001P4\uff09\u3002<\/p>\n

TDC\u7684\u5206\u8fa8\u7387\u7531\u5206\u76f8\u65f6\u949f\u7684\u9891\u7387\u548c\u63d2\u503c\u5668\u51b3\u5b9a\uff0c\u63d2\u503c\u5668\u5305\u542b\u5bf9Start\u548cStop\u4fe1\u53f7<\/u>\u4e0a\u5347\u6cbf\u5206\u522b\u91c7\u6837\u7684\u4e24\u4e2a\u6a21\u5757\uff0c\u6bcf\u4e2a\u6a21\u5757\u90fd\u7531\u56db\u4e2a\u57fa\u672c\u7684\u63d2\u503c\u5355\u5143\uff08Unit\uff09\u7ec4\u6210\uff0c\u63d2\u503c\u5355\u5143\u5185\u90e8\u91c7\u7528\u7531\u4f20\u8f93\u95e8\uff08TG\uff09\u3001D\u89e6\u53d1\u5668\uff08DFF\uff09\u548c\u5ef6\u65f6\u7ebf\uff08Delay line\uff09\u6784\u6210\u7684\u76f8\u4f4d\u63d2\u503c\u7ed3\u6784\uff0c\u901a\u8fc7Start\/Stop\u4fe1\u53f7\u63a7\u5236\u4f20\u8f93\u95e8\u7684\u6805\u6781\u5b9e\u73b0\u5bf9\u76f8\u4f4d\u72b6\u6001\u7684\u9501\u5b58\uff0c\u5e76\u4e14Start\/Stop\u4fe1\u53f7\u7ecf\u8fc7\u77ed\u6682\u5ef6\u65f6\u540e\u63a7\u5236DFF\u5bf9\u4f20\u8f93\u95e8\u7684\u6570\u636e\u8fdb\u884c\u518d\u6b21\u9501\u5b58\uff0c\u907f\u514d\u4e86\u566a\u58f0\u5f15\u8d77\u7684DFF\u72b6\u6001\u7ffb\u8f6c\u3002\u572830MHz\u8f93\u5165\u65f6\u949f\u9a71\u52a8\u4e0b\uff0cVCO\u53ef\u8f93\u51fa960 MHz\u7684\u56db\u901a\u9053\u9ad8\u9891\u5206\u76f8\u65f6\u949f\u3002\u5206\u76f8\u65f6\u949fP1~P4\u5c06\u65f6\u949f\u5468\u671f\u5206\u62108\u4e2a\u65f6\u95f4\u95f4\u9694\u5b9e\u73b0130 ps\u7684\u65f6\u95f4\u5206\u8fa8\u7387\uff0c\u5176\u4e2d\u6bcf\u4e2a\u65f6\u95f4\u95f4\u9694\u5bf9\u5e94\u4e00\u4e2a\u76f8\u4f4d\u72b6\u6001\uff0c\u5f53Start\u6216Stop\u4fe1\u53f7\u5230\u6765\u65f6\uff0c\u63d2\u503c\u5668\u53ef\u4ee5\u76f4\u63a5\u9501\u5b58\u5176\u4e0a\u5347\u6cbf\u6240\u5904\u7684\u76f8\u4f4d\u72b6\u6001\u3002\u800cTDC\u7684\u52a8\u6001\u8303\u56f4\u53d6\u51b3\u4e8e\u7c97\u8ba1\u6570\u5668\u91cf\u7a0b\uff0c\u7c97\u8ba1\u6570\u5668\u91c7\u7528\u53cd\u9988\u79fb\u5b58\u578b\u540c\u6b65\u8ba1\u6570\u5668\uff0c\u5728\u53c2\u8003\u65f6\u949f\u5468\u671f\u4e0d\u53d8\u7684\u60c5\u51b5\u4e0b\u53ef\u4ee5\u901a\u8fc7\u589e\u52a0\u8ba1\u6570\u5668\u4f4d\u6570\u63d0\u9ad8\u6ee1\u91cf\u7a0b\u8303\u56f4\u3002\u4f46\u540c\u6b65\u8ba1\u6570\u5668\u4f4d\u6570\u7684\u589e\u52a0\u4f1a\u5bfc\u81f4\u65f6\u949f\u9a71\u52a8\u80fd\u529b\u7684\u4e0d\u8db3\uff0c\u56e0\u6b64\u589e\u52a0\u4e86\u7531\u5f02\u6b65\u8ba1\u6570\u5668\u6784\u6210\u7684\u7cbe\u8ba1\u6570\u5668\u3002\u7cbe\u8ba1\u6570\u5668\u5728\u5bf9\u5206\u76f8\u65f6\u949f\u8fdb\u884c\u8ba1\u6570\u7684\u540c\u65f6\u5b8c\u6210\u5bf9\u9ad8\u9891\u65f6\u949f\u7684\u5206\u9891\uff0c\u5229\u7528\u5e26\u8d1f\u8f7d\u80fd\u529b\u66f4\u5f3a\u7684\u4f4e\u9891\u65f6\u949f\u53ef\u4ee5\u9a71\u52a8\u66f4\u591a\u4f4d\u6570\u7684\u7c97\u8ba1\u6570\uff0c\u5e76\u4e14\u91c7\u7528\u540c\u6b65\u52a0\u5f02\u6b65\u7684\u8ba1\u6570\u65b9\u5f0f\u76f8\u8f83\u4e8e\u5355\u4e00\u7ed3\u6784\u7684\u5f02\u6b65\u8ba1\u6570\u5668\u80fd\u83b7\u5f97\u66f4\u5feb\u7684\u54cd\u5e94\u901f\u5ea6\u3002\u5982\u56fe4\u6240\u793a\uff0c\u8bbe\u8ba1\u76842 bit\u7cbe\u8ba1\u6570\u5668\u53ef\u5bf9960 MHz\u65f6\u949f\u4fe1\u53f7\uff08P1\uff09\u8fdb\u884c\u56db\u5206\u9891\u5904\u7406\u4ea7\u751f\u9a71\u52a8\u80fd\u529b\u66f4\u5f3a\u7684240 MHz\u7684\u4f4e\u9891\u65f6\u949fCP\u7528\u4e8e\u9a71\u52a86 bit\u7c97\u8ba1\u6570\u5668\u3002TDC\u5171\u8f93\u51fa16 bit\u6570\u636e\uff0c\u5305\u542b6 bit\u7c97\u8ba1\u6570D[15:10]\u30012 bit\u7cbe\u8ba1\u6570D[9:8]\u30014 bit Stop\u76f8\u4f4d\u72b6\u6001D[7:4]\u4ee5\u53ca4 bit Start\u76f8\u4f4d\u72b6\u6001D[3:0]\u3002TDC\u7535\u8def\u5177\u4f53\u7684\u91cf\u5316\u8fc7\u7a0b\u5982\u56fe5\u6240\u793a\u3002<\/p>\n

\"38d7bc10-4106-11ee-a2ef-92fbcf53809c-1\"<\/p>\n

\u56fe4 TDC\u8bfb\u51fa\u7535\u8def\u7ed3\u6784<\/p>\n

\"38f2fd5e-4106-11ee-a2ef-92fbcf53809c\"<\/p>\n

\u56fe5 TDC\u7535\u8def\u91cf\u5316\u539f\u7406<\/p>\n

\u6d4b\u8bd5\u7ed3\u679c\u5206\u6790\u4e0e\u8ba8\u8bba<\/p>\n

\u63d0\u51fa\u7684\u8fd1\u7ea2\u5916dTOF\u63a2\u6d4b\u5668\u57fa\u4e8e0.18 \u03bcm\u5de5\u827a\u5b9e\u73b0\u6d41\u7247\uff0c\u82af\u7247<\/u>\u7684\u663e\u5fae\u7167\u7247\u5982\u56fe6\uff08a\uff09\u6240\u793a\u3002\u4e3a\u4fdd\u8bc1\u82af\u7247\u6b63\u5e38\u7a33\u5b9a\u5de5\u4f5c\uff0c\u5728\u6838\u5fc3\u7535\u8def\u53ca\u5668\u4ef6\u5468\u56f4\u52a0\u5165\u5927\u91cf\u6ee4\u6ce2\u7535\u5bb9<\/u>CAP\u7a33\u538b\u3001\u964d\u566a\uff0c\u5e76\u6dfb\u52a0ESD<\/u>\u4fdd\u62a4\u7535\u8def<\/u>\u9632\u6b62\u9759\u7535\u6548\u5e94\u7684\u5f71\u54cd\u3002\u82af\u7247\u5305\u542b16\u4e2aSPAD\u548c\u6a21\u62df\u524d\u7aef\u7535\u8def\u4ee5\u53caTDC<\/u>\uff0c\u6574\u4f53\u5c3a\u5bf8\u4e3a1.2 \u00d7 0.84 mm\u00b2\u3002\u4e3a\u4e86\u8bc4\u4f30\u63a2\u6d4b\u5668\u82af\u7247\u7684\u7535\u5b66\u548c\u5149\u5b66\u7279\u6027\uff0c\u642d\u5efa\u4e86\u5982\u56fe6\uff08b\uff09\u6240\u793a\u7684\u6d4b\u8bd5\u5e73\u53f0\uff0c\u4e3b\u8981\u9488\u5bf9\u5668\u4ef6\u7684\u96ea\u5d29\u51fb\u7a7f\u7535\u538b\u3001PDP\u3001DCR\u548c\u540e\u8109\u51b2\u6982\u7387\uff08AP\uff09\u4ee5\u53ca\u8bfb\u51fa\u7535\u8def\u7684\u5206\u8fa8\u7387\u548c\u5149\u5b50\u98de\u884c\u65f6\u95f4\u6d4b\u91cf\u7cbe\u5ea6\u8fdb\u884c\u4e86\u6d4b\u8bd5\u3002<\/p>\n

\"3919bb38-4106-11ee-a2ef-92fbcf53809c\"<\/p>\n

\u56fe6 \u82af\u7247\u53ca\u6d4b\u8bd5\u73af\u5883\uff1a\uff08a\uff09\u82af\u7247\u663e\u5fae\u7167\u7247\uff1b\uff08b\uff09\u6d4b\u8bd5\u5e73\u53f0<\/p>\n

SPAD\u5668\u4ef6\u6d4b\u8bd5<\/p>\n

\u4f7f\u7528Keithley 4200A-SCS\u534a\u5bfc\u4f53<\/u>\u53c2\u6570\u5206\u6790\u4eea\u6d4b\u91cf\u5f97\u5230\u7684SPAD\u53cd\u5411I-V\u7279\u6027\u5982\u56fe7\u6240\u793a\u3002\u5728\u65e0\u5149\u6761\u4ef6\u4e0b\uff0cSPAD\u53cd\u5411\u9971\u548c\u7535\u6d41\u5373\u6697\u7535\u6d41\u4ec5\u67093.7\u00d710\u207b\u00b9\u00b9 A\uff0c\u800c\u5728\u6709\u5149\u6761\u4ef6\u4e0b\uff0c\u7531\u4e8e\u5149\u751f\u8f7d\u6d41\u5b50\u7684\u4ea7\u751f\uff0c\u5668\u4ef6\u53cd\u5411\u9971\u548c\u7535\u6d41\u6bd4\u65e0\u5149\u65f6\u660e\u663e\u9ad8\u51fa\u4e00\u4e2a\u6570\u91cf\u7ea7\u3002\u5728\u6709\u5149\u548c\u65e0\u5149\u6761\u4ef6\u4e0bSPAD\u5668\u4ef6\u7684\u96ea\u5d29\u51fb\u7a7f\u7535\u538b\u90fd\u572842.5 V\u5de6\u53f3\uff0c\u800c\u6709\u5149\u65f6\u5668\u4ef6\u96ea\u5d29\u7535\u6d41\u968f\u504f\u538b\u4e0a\u5347\u7684\u66f4\u52a0\u9661\u5ced\uff0c\u6d4b\u8bd5\u7ed3\u679c\u4e0e\u4eff\u771f\u7ed3\u679c\u663e\u793a\u51fa\u5f88\u597d\u7684\u4e00\u81f4\u6027\u3002<\/p>\n

\u00a0<\/p>\n

\"3939d6d4-4106-11ee-a2ef-92fbcf53809c-1\"<\/div>\n

 <\/p>\n

\u56fe7 I-V\u76f4\u6d41\u7279\u6027\u66f2\u7ebf<\/p>\n

SPAD\u5668\u4ef6\u7684DCR\u548cAP\u7684\u6d4b\u8bd5\u5747\u5728\u65e0\u5149\u73af\u5883\u4e0b\u901a\u8fc7FPGA<\/u>\u7edf\u8ba1SPAD\u8f93\u51fa\u7684\u96ea\u5d29\u8109\u51b2\u4e2a\u6570\u5f97\u5230\u3002\u5176\u4e2d\uff0cDCR\u7531\u591a\u6b211\u79d2\u5185\u8ba1\u6570\u5f97\u5230\u7684\u96ea\u5d29\u8109\u51b2\u7684\u5e73\u5747\u6570\u786e\u5b9a\uff0c\u800c\u5927\u591a\u6570\u540e\u8109\u51b2\u4e8b\u4ef6\u51fa\u73b0\u5728\u96ea\u5d29\u53d1\u751f\u540e\u7684\u6700\u521d\u51e0\u5fae\u79d2\u5185\uff0c\u5176\u6982\u7387\u53ef\u4ee5\u901a\u8fc7\u8bb0\u5f55\u6570\u767e\u4e07\u6b21\u96ea\u5d29\u8109\u51b2\u7684\u65f6\u95f4\u95f4\u9694\u5f62\u6210\u7684\u76f4\u65b9\u56fe\u7edf\u8ba1\u83b7\u5f97\u3002\u5668\u4ef6\u7684\u6697\u8ba1\u6570\u566a\u58f0\u4e3b\u8981\u7531\u975e\u5e73\u8861\u8f7d\u6d41\u5b50\u70ed\u4ea7\u751f-\u590d\u5408\u3001\u7f3a\u9677\u8f85\u52a9\u96a7\u7a7f\u548c\u5e26-\u5e26\u96a7\u7a7f\u4e09\u79cd\u673a\u5236\u4ea7\u751f\uff0c\u5e26-\u5e26\u96a7\u7a7f\u4ec5\u57285 V\u4ee5\u4e0a\u7684\u9ad8\u8fc7\u504f\u538b\u4e0b\u624d\u4f1a\u53d1\u751f\uff0c\u800c\u70ed\u4ea7\u751f-\u590d\u5408\u548c\u7f3a\u9677\u8f85\u52a9\u96a7\u7a7f\u673a\u5236\u5206\u522b\u4e0e\u6e29\u5ea6\u548c\u8fc7\u504f\u538b\u5448\u6b63\u76f8\u5173\u3002\u56fe8\uff08a\uff09\u663e\u793a\u4e86\u5668\u4ef6\u5728\u4e0d\u540c\u6e29\u5ea6\u53ca\u8fc7\u504f\u538b\u4e0b\u7684DCR\u53d8\u5316\u66f2\u7ebf\uff0c\u53ef\u4ee5\u770b\u51fa\uff0c\u968f\u7740\u8fc7\u504f\u538b\u7684\u5347\u9ad8\uff0c\u5668\u4ef6\u7684DCR\u6ca1\u6709\u53d1\u751f\u660e\u663e\u7684\u9000\u5316\uff0c\u8868\u660e\u96a7\u7a7f\u6548\u5e94\u5bf9\u6697\u8ba1\u6570\u7684\u8d21\u732e\u8f83\u5c0f\u3002\u5728\u7ed9\u5b9a\u7684\u8fc7\u504f\u538b\u4e0b\uff0c\u5f53\u6e29\u5ea6\u753124oC\u5347\u81f370oC\u65f6\uff0cDCR\u663e\u8457\u589e\u5927\u8bf4\u660e\u8be5\u5668\u4ef6\u7684\u4e3b\u8981\u6697\u8ba1\u6570\u566a\u58f0\u6765\u6e90\u662f\u4e0e\u6e29\u5ea6\u76f8\u5173\u7684\u70ed\u4ea7\u751f-\u590d\u5408\u673a\u5236\u3002\u4ece\u6574\u4f53\u4e0a\u770b\uff0c\u8be5\u5668\u4ef6\u5728\u6e29\u5ea6\u4f4e\u4e8e70 oC\u65f6\uff0cDCR\u6574\u4f53\u4f4e\u4e8e1.3 KHz\uff0c\u5e76\u4e14\u57285 V\u9ad8\u7684\u8fc7\u504f\u538b\u4e0b\uff0c24 oC\u5ba4\u6e29\u65f6DCR\u5c0f\u4e8e200 Hz\uff0c\u8868\u73b0\u51fa\u8f83\u4f4e\u7684\u6697\u8ba1\u6570\u6c34\u5e73\u3002\u540e\u8109\u51b2\u4e8b\u4ef6\u4e0e\u5668\u4ef6\u81ea\u8eab\u56fa\u6709\u7684\u6df1\u80fd\u7ea7\u7f3a\u9677\u6709\u5173\uff0c\u7531\u4e8e\u672c\u6587\u63d0\u51fa\u7ed3\u6784\u91c7\u7528\u8f83\u6df1\u7684\u96ea\u5d29\u533a\uff0c\u96ea\u5d29\u533a\u9644\u8fd1\u7684\u7f3a\u9677\u5bc6\u5ea6\u4f4e\uff0c\u540c\u65f6\u5176\u53d7\u5230\u8868\u9762\u9ad8\u6d53\u5ea6\u754c\u9762\u6001\u7684\u5f71\u54cd\u975e\u5e38\u5c0f\uff0c\u540e\u8109\u51b2\u4e8b\u4ef6\u53d1\u751f\u7684\u6982\u7387\u76f8\u5bf9\u8f83\u5c0f\u3002\u56fe8\uff08b\uff09\u663e\u793a\u4e86\u5ba4\u6e29\u4e0bSPAD\u540e\u8109\u51b2\u6982\u7387\u968f\u8fc7\u504f\u538b\u7684\u53d8\u5316\u5173\u7cfb\uff0c\u57285 V\u8fc7\u504f\u538b\u4e0b\u4ec5\u67090.92%\u3002\u4eceDCR\u548cAP\u7684\u6d4b\u8bd5\u7ed3\u679c\u53ef\u4ee5\u770b\u51fa\u8be5\u5668\u4ef6\u5177\u6709\u4f18\u5f02\u7684\u566a\u58f0\u6027\u80fd\u3002<\/p>\n

\"394e43bc-4106-11ee-a2ef-92fbcf53809c-1\"<\/p>\n

\u56fe8 \uff08a\uff09\u4e0d\u540c\u6e29\u5ea6\u4e0bDCR\u968f\u8fc7\u504f\u538b\u7684\u53d8\u5316\uff1b\uff08b\uff09\u5ba4\u6e29\u4e0b\u540e\u8109\u51b2\u6982\u7387\u968f\u8fc7\u504f\u538b\u7684\u53d8\u5316<\/p>\n

\u4e3a\u4e86\u6d4b\u91cfSPAD\u5668\u4ef6\u7684PDP\uff0c\u5c06\u6ce2\u957f\u8303\u56f4\u4e3a405 ~ 940 nm\u7684\u6fc0\u5149\u901a\u8fc7\u5149\u7ea4\u4f20\u9001\u5230\u79ef\u5206\u7403\uff08Integrati<\/u>ng sphere\uff09\uff0c\u79ef\u5206\u7403\u4f1a\u5c06\u5149\u5747\u5300\u6563\u5c04\u5230\u5668\u4ef6\u8868\u9762\u548c\u5149\u529f\u7387\u8ba1\u7684\u63a2\u5934\u3002\u5e76\u4e14\u5149\u529f\u7387\u8ba1\u53ef\u4ee5\u6821\u51c6\u603b\u5165\u5c04\u5149\u529f\u7387\u4e3anW\u7ea7\uff0c\u4ece\u800c\u4fdd\u8bc1SPAD\u5668\u4ef6\u5de5\u4f5c\u5728\u5355\u5149\u5b50\u72b6\u6001\uff0c\u4ee5\u514d\u5165\u5c04\u5149\u5b50\u8fc7\u591a\u53d1\u751f\u5806\u53e0\u6548\u5e94\u3002<\/p>\n

PDP\u6d4b\u91cf\u7ed3\u679c\u5982\u56fe9\u6240\u793a\uff0c\u5728\u8fc7\u504f\u538b\u5927\u4e8e2 V\u65f6\uff0cPDP\u5728450 ~ 780 nm\u6ce2\u957f\u8303\u56f4\u5185\u5747\u5927\u4e8e15%\uff0c\u57285 V\u8fc7\u504f\u538b\u4e0b\uff0c\u5668\u4ef6\u5728600 nm\u5904\u7684PDP\u5cf0\u503c\u8fbe\u5230\u4e8643.3%\u3002\u6b64\u5916\uff0c\u7531\u4e8e\u5177\u6709\u6df1\u7ed3\u7684\u96ea\u5d29\u500d\u589e\u533a\uff0c\u5668\u4ef6\u5bf9780 ~ 940 nm\u7684\u8fd1\u7ea2\u5916\u5149\u5b50\u7684\u54cd\u5e94\u7075\u654f\u5ea6\u4e5f\u5f97\u5230\u663e\u8457\u589e\u5f3a\uff0cPDP\u5728905 nm\u5904\u4f9d\u7136\u80fd\u591f\u5927\u4e8e7.6%\u3002\u6d4b\u8bd5\u7ed3\u679c\u9a8c\u8bc1\u4e86\u8be5SPAD\u5177\u6709\u5bbd\u5149\u8c31\u54cd\u5e94\u8303\u56f4\uff0c\u53ef\u4ee5\u5de5\u4f5c\u5728\u4eba\u773c\u9608\u503c\u8f83\u9ad8\u7684\u8fd1\u7ea2\u5916\u77ed\u6ce2\u6ce2\u6bb5\u3002<\/p>\n

\"39778f88-4106-11ee-a2ef-92fbcf53809c-1\"<\/p>\n

\u56fe9 PDP\u5bf9\u5149\u5b50\u6ce2\u957f\u54cd\u5e94\u66f2\u7ebf<\/p>\n

\u56fe10\u5c06\u6240\u8bbe\u8ba1SPAD\u5668\u4ef6\u7684\u8fd1\u7ea2\u5916PDP\u548cDCR\u7684\u6027\u80fd\u4e0e\u62a5\u9053\u7684\u5148\u8fdb\u6210\u679c\u8fdb\u884c\u4e86\u5bf9\u6bd4\u3002\u53ef\u4ee5\u770b\u5230\uff0c\u9664\u80cc\u7167\u5f0f\u5668\u4ef6\u5916\uff0c\u5bf9\u4e8e\u4f20\u7edf\u5149\u5b50\u6b63\u9762\u5165\u5c04\u7684\u5668\u4ef6\u5728905 nm\u5904\u7684PDP\u901a\u5e38\u5c0f\u4e8e6%\u3002\u800c\u672c\u6587\u6240\u8bbe\u8ba1\u7684\u5668\u4ef6\u5728905 nm\u5904\u7684PDP\u80fd\u591f\u8fbe\u52307.6%\uff0c\u4f18\u4e8e\u5176\u4ed6\u6210\u679c\uff0c\u5e76\u4e14\u8868\u73b0\u51fa\u4f4e\u7684\u6697\u8ba1\u6570\u566a\u58f0\u3002<\/p>\n

\"39870422-4106-11ee-a2ef-92fbcf53809c-1\"<\/p>\n

\u56fe10 \u4e0e\u5176\u4ed6\u6027\u80fd\u5148\u8fdb\u7684SPAD\u5668\u4ef6\u6bd4\u8f83<\/p>\n

dTOF\u8bfb\u51fa\u7535\u8def\u6d4b\u8bd5<\/p>\n

dTOF\u8bfb\u51fa\u7535\u8def\u9759\u6001\u7279\u6027\u7684\u6d4b\u8bd5\u5305\u62ec\u52a8\u6001\u8303\u56f4\u3001\u65f6\u95f4\u5206\u8fa8\u7387\u548c\u975e\u7ebf\u6027\u8bef\u5dee\u3002\u5176\u4e2d\u52a8\u6001\u8303\u56f4\u548c\u65f6\u95f4\u5206\u8fa8\u7387\u53ef\u4ee5\u901a\u8fc7\u6784\u5efa\u4f20\u9012\u7279\u6027\u66f2\u7ebf\u8868\u793a\uff0c\u6839\u636e\u4f20\u9012\u7279\u6027\u66f2\u7ebf\u53ef\u4ee5\u6c42\u5f97\u975e\u7ebf\u6027\u8bef\u5dee\u3002\u4f20\u9012\u7279\u6027\u66f2\u7ebf\u7684\u5177\u4f53\u6d4b\u8bd5\u65b9\u6cd5\u4e3a\uff1a\u9996\u5148\u5229\u7528\u6570\u5b57\u5ef6\u65f6\u5668\u5c06Start\u548cStop\u4e4b\u95f4\u7684\u65f6\u95f4\u95f4\u9694\u4ee54.16 ns\u7684\u65f6\u957f\u6b65\u8fdb\uff0c\u68c0\u6d4b<\/u>\u8bfb\u51fa\u7535\u8def\u7684\u52a8\u6001\u8303\u56f4\u3002\u7136\u540e\u9009\u53d6\u51e0\u4e2a\u5173\u952e\u65f6\u95f4\u4e3a\u8d77\u70b9\uff0c\u6309\u7167\u540c\u6837\u7684\u65b9\u6cd5\u4ee55 ps\u7684\u65f6\u957f\u6b65\u8fdb\uff0c\u8bb0\u5f55\u8f93\u51fa\u7ed3\u679c\u8df3\u53d8\u65f6\u6240\u5bf9\u5e94\u7684\u8f93\u5165\u65f6\u95f4\u95f4\u9694\uff0c\u4e24\u4e2a\u8df3\u53d8\u70b9\u4e4b\u95f4\u7684\u65f6\u95f4\u95f4\u9694\u4e3a\u5b9e\u9645\u65f6\u95f4\u5206\u8fa8\u7387\u3002\u6d4b\u5f97\u7684\u4f20\u9012\u66f2\u7ebf\u5982\u56fe11\u6240\u793a\uff0c\u7531\u4e8e\u5b58\u5728\u7535\u6e90\u6ce2\u52a8\u3001\u65f6\u949f\u6296\u52a8\u3001\u5668\u4ef6\u5931\u914d\u7b49\u975e\u7406\u60f3\u56e0\u7d20\uff0c\u5b9e\u9645\u4f20\u9012\u66f2\u7ebf\u4e0e\u7406\u60f3\u7ed3\u679c\u5b58\u5728\u4e00\u5b9a\u8bef\u5dee\u3002\u5728\u8bc4\u4f30\u7cfb\u7edf\u7684\u975e\u7ebf\u6027\u8bef\u5dee\u65f6\uff0c\u4ee5107~111.5 ns\u5206\u8fa8\u7387\u6d4b\u8bd5\u83b7\u53d6\u7684\u6240\u6709\u6570\u636e\u4e3a\u57fa\u7840\uff0c\u5f97\u5230\u4e86\u5982\u56fe12\u6240\u793a\u7684\u5dee\u5206\u975e\u7ebf\u6027\u5ea6\uff08DNL\uff09\u548c\u79ef\u5206\u975e\u7ebf\u6027\u5ea6\uff08INL\uff09\u66f2\u7ebf\u3002\u7ed3\u679c\u663e\u793a\uff0cDNL\u548cINL\u5206\u522b\u5728-0.88 LSB ~ 0.81 LSB\u548c-0.92 LSB ~ 0.58 LSB\u8303\u56f4\u5185\u53d8\u5316\uff0c\u5747\u5c0f\u4e8e\u00b11 LSB\uff081LSB=130ps\uff09\uff0c\u8868\u660e\u8bfb\u51fa\u7535\u8def\u7684\u4f20\u9012\u7279\u6027\u80fd\u4fdd\u6301\u5355\u8c03\u7279\u6027\uff0c\u8bef\u5dee\u6ce2\u52a8\u8303\u56f4\u8f83\u5c0f\u3002<\/p>\n

\"39a74a84-4106-11ee-a2ef-92fbcf53809c\"<\/p>\n

\u56fe11 TDC\u4f20\u9012\u7279\u6027\u66f2\u7ebf<\/p>\n

\"39cb0d0c-4106-11ee-a2ef-92fbcf53809c-1\"<\/p>\n

\u56fe12 TDC\u975e\u7ebf\u6027\u8bef\u5dee\uff1a\uff08a\uff09DNL\u66f2\u7ebf\uff1b\uff08b\uff09INL\u66f2\u7ebf<\/p>\n

\u4e3a\u4e86\u7814\u7a76\u975e\u7406\u60f3\u6761\u4ef6\u4e0bdTOF\u63a2\u6d4b\u5668\u91cf\u5316\u7ed3\u679c\u7684\u7a33\u5b9a\u6027\uff0c\u901a\u8fc7\u5916\u90e8\u8f93\u5165\u56fa\u5b9a\u65f6\u95f4\u95f4\u9694\u7684Start\u548cStop\u4fe1\u53f7\u8fdb\u884c\u8bfb\u51fa\u7535\u8def\u52a8\u6001\u7279\u6027\u6d4b\u8bd5\u3002\u56fe13\uff08a\uff09\u793a\u6ce2\u5668<\/u>\u663e\u793a\u4e8680 ns TOF\u503c\u7684\u4eff\u771f\u7ed3\u679c\u4e0e\u5b9e\u6d4b\u7ed3\u679c\u7684\u5bf9\u6bd4\u3002\u7531\u4e8e\u4f20\u8f93\u8def\u5f84\u4e0d\u540c\uff0cStart\u548cStop\u4fe1\u53f7\u7684\u4f20\u8f93\u5ef6\u65f6\u5b58\u5728\u5dee\u5f02\uff0c\u6d4b\u8bd5\u7ed3\u679c\u4e0e\u5b9e\u9645TOF\u503c\u5b58\u5728\u4e00\u5b9a\u7684\u504f\u5dee\uff0c\u56e0\u6b64\u5728\u540e\u7eed\u6570\u636e\u5904\u7406\u4e2d\u53ef\u5c06\u5176\u4f5c\u4e3a\u56fa\u5b9a\u5ef6\u65f6\u504f\u5dee\u8fdb\u884c\u8865\u507f\u3002\u6b64\u5916\uff0c\u53d7\u7535\u6e90\u566a\u58f0\u4ee5\u53ca\u4fe1\u9053\u4e4b\u95f4\u4e32\u6270\u7684\u5f71\u54cd\uff0c\u63a2\u6d4b\u5668\u6bcf\u6b21\u91cf\u5316\u7684\u7ed3\u679c\u4f1a\u5b58\u5728\u5dee\u5f02\uff0c\u8fd9\u79cd\u5dee\u5f02\u53ef\u4ee5\u901a\u8fc7\u91cd\u590d\u6d4b\u91cf\u6052\u5b9a\u7684TOF\u503c\u5e76\u8ba1\u7b97\u6d4b\u91cf\u7ed3\u679c\u7684\u5206\u5e03\u6807\u51c6\u5dee\uff08RMS<\/u>\uff09\u5373\u5355\u5c04\u7cbe\u5ea6\uff08precision\uff09\u8fdb\u884c\u8868\u5f81\u3002\u56fe13\uff08b\uff09\u662f\u5bf9TOF=80 ns\u8fdb\u884c\u7ea61000\u6b21\u6d4b\u91cf\u5f97\u5230\u7684\u5355\u5c04\u7cbe\u5ea6\u7edf\u8ba1\u76f4\u65b9\u56fe\u3002\u53ef\u4ee5\u770b\u51fa\uff0c\u6d4b\u8bd5\u7ed3\u679c\u5448\u9ad8\u65af\u5206\u5e03\uff0c\u5e76\u4e14\u5bf9\u5cf0\u503c\u6570\u636e\uff0879.682ns\uff09\u8fdb\u884c\u56fa\u5b9a\u8bef\u5dee\u8865\u507f\u4e4b\u540e\uff0c\u5176\u7ed3\u679c\u63a5\u8fd1\u5b9e\u9645TOF\u503c\uff0c\u6b64\u5916\uff0c\u591a\u6b21\u6d4b\u91cf\u5f97\u5230\u7684RMS\u4ec5\u4e3a188 ps\u3002<\/p>\n

\"39f0f42c-4106-11ee-a2ef-92fbcf53809c-1\"<\/p>\n

\u56fe13 \u52a8\u6001\u7279\u6027\u6d4b\u8bd5\uff1a\uff08a\uff09\u77ac\u6001\u8f93\u51fa\u6ce2\u5f62\uff1b\uff08b\uff09\u5355\u5c04\u7cbe\u5ea6<\/p>\n

\u88681\u5bf9\u6bd4\u4e86\u8fd1\u671f\u62a5\u9053\u7684\u51e0\u79cddTOF\u63a2\u6d4b\u5668\u7684\u5173\u952e\u6027\u80fd\u3002\u53ef\u4ee5\u770b\u51fa\uff0c\u672c\u6587\u63d0\u51fa\u7684SPAD\u5668\u4ef6\u5177\u6709\u4f18\u8d8a\u7684\u6027\u80fd\uff0c\u5b9e\u73b0\u4e86\u9ad8\u4e8e\u5176\u4ed6\u7814\u7a76\u6210\u679c\u7684\u5cf0\u503cPDP\u548c\u4f4e\u7684\u6697\u8ba1\u6570\u3002\u6240\u8bbe\u8ba1\u7684TDC\u8bfb\u51fa\u7535\u8def\u5728\u4fdd\u6301\u76f8\u5bf9\u8f83\u5c0f\u7684\u65f6\u95f4\u5206\u8fa8\u7387\u7684\u60c5\u51b5\u4e0b\u8fbe\u5230\u4e86\u8f83\u5927\u7684\u52a8\u6001\u8303\u56f4\uff0c\u5e76\u4e14\u52a8\u6001\u8303\u56f4\u53ef\u4ee5\u6839\u636e\u65f6\u949f\u7684\u5b9e\u9645\u9a71\u52a8\u80fd\u529b\u589e\u52a0\u7c97\u8ba1\u6570\u4f4d\u6570\u6765\u8fdb\u4e00\u6b65\u6269\u5c55\u3002\u540c\u65f6\uff0cTDC\u7684\u5176\u4ed6\u6027\u80fd\u53c2\u6570\u5982\u7ebf\u6027\u5ea6\u548c\u5355\u5c04\u7cbe\u5ea6\u7b49\u90fd\u63a7\u5236\u5728\u5408\u7406\u7684\u8303\u56f4\u5185\u3002<\/p>\n

\u88681 dTOF\u63a2\u6d4b\u5668\u5173\u952e\u6027\u80fd\u5bf9\u6bd4<\/p>\n

\"3a17e3ca-4106-11ee-a2ef-92fbcf53809c-1\"<\/p>\n

\u7ed3\u8bba<\/p>\n

\u672c\u6587\u91c7\u75280.18 \u03bcm BCD\u5de5\u827a\u8bbe\u8ba1\u4e86\u4e00\u6b3e\u57fa\u4e8eSPAD\u7684\u8fd1\u7ea2\u5916\u9ad8\u5206\u8fa8\u7387dTOF\u63a2\u6d4b\u5668\u3002SPAD\u5668\u4ef6\u5229\u7528\u9ad8\u538bp\u9631\/n+\u57cb\u5c42\u5f62\u6210\u6df1\u7ed3\u7ed3\u6784\u5e76\u91c7\u7528\u5916\u5ef6\u5c42\u505a\u865a\u62df\u4fdd\u62a4\u73af\uff0c\u4e0d\u4f46\u63d0\u9ad8\u4e86\u5bf9\u8fd1\u7ea2\u5916\u5149\u5b50\u7684\u63a2\u6d4b\u6982\u7387\uff0c\u800c\u4e14\u964d\u4f4e\u4e86\u6697\u8ba1\u6570\u7387\u3002\u6240\u8bbe\u8ba1\u7684\u4e09\u6b65\u5f0f\u6df7\u5408\u7ed3\u6784TDC\u5229\u7528\u5177\u6709\u4f4e\u6296\u52a8\u4e14\u5206\u76f8\u5747\u5300\u7684\u5185\u7f6ePLL\u5b9e\u73b0\u4e86130 ps\u5206\u8fa8\u7387\u548c258 ns\u7684\u52a8\u6001\u8303\u56f4\u3002\u6d4b\u8bd5\u7ed3\u679c\u8868\u660e\uff0c\u57285 V\u8fc7\u504f\u538b\u4e0bSPAD\u5668\u4ef6\u5cf0\u503cPDP\u9ad8\u8fbe45%\uff0c\u5e76\u4e14905 nm\u5904\u7684PDP\u5927\u4e8e7.6%\u3002\u4e0e\u5148\u8fdb\u6280\u672f\u76f8\u6bd4\uff0c\u8be5\u5668\u4ef6\u5728\u80fd\u591f\u5bf9\u8fd1\u7ea2\u5916\u5149\u5b50\u5b9e\u73b0\u9ad8\u63a2\u6d4b\u6982\u7387\u7684\u540c\u65f6\u6697\u8ba1\u6570\u566a\u58f0\u4fdd\u6301\u76f8\u5bf9\u8f83\u4f4e\u6c34\u5e73\u3002\u6b64\u5916\uff0cTDC\u8bfb\u51fa\u7535\u8def\u4e5f\u83b7\u5f97\u4e86\u8f83\u9ad8\u7684\u7ebf\u6027\u5ea6\uff0c\u6d4b\u5f97\u7684DNL\u4e3a-0.88 ~ 0.81 LSB\uff0cINL\u4e3a-0.92~ 0.58 LSB\u3002\u63a2\u6d4b\u5668\u5728TOF\u4e3a80 ns\u7684\u5355\u5c04\u7cbe\u5ea6\u6d4b\u8bd5\u4e2d\u5f97\u5230\u7684\u6296\u52a8\u534a\u9ad8\u5168\u5bbd\u4ec5\u6709293 ps\u3002\u7efc\u4e0a\uff0c\u6240\u63d0\u51fa\u7684\u5668\u4ef6\u548c\u8bfb\u51fa\u7535\u8def\u5177\u6709\u826f\u597d\u7684\u6027\u80fd\uff0c\u4e3a\u540e\u7eed\u8bbe\u8ba1\u5177\u6709\u9ad8\u6548\u7387\u3001\u9ad8\u5206\u8fa8\u7387\u548c\u5bbd\u52a8\u6001\u8303\u56f4\u7684\u5927\u9635\u5217\u63a2\u6d4b\u5668\u5960\u5b9a\u4e86\u57fa\u7840\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

\u57fa\u4e8e\u5355\u5149\u5b50\u96ea\u5d29\u4e8c\u6781\u7ba1\uff08SPAD\uff09\u7684\u5149\u5b50\u76f4\u63a5\u98de\u884c\u65f6\u95f4\uff08dTOF\uff09\u63a2\u6d4b\u5668\u901a\u8fc7\u6d4b\u91cf\u53d1\u5c04\u5149\u4e0e\u53cd\u5c04\u5149\u4e4b\u95f4\u7684\u65f6\u95f4\u95f4\u9694\u6765\u8ba1\u7b97 […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[12],"tags":[],"_links":{"self":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/11376"}],"collection":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=11376"}],"version-history":[{"count":1,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/11376\/revisions"}],"predecessor-version":[{"id":11402,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/11376\/revisions\/11402"}],"wp:attachment":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=11376"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=11376"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=11376"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}