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\n\t\u3000\u3000ECM\u6709\u4e24\u6839\u4fe1\u53f7\u5f15\u7ebf\uff1a\u8f93\u51fa\u548c\u63a5\u5730\u3002\u9ea6\u514b\u98ce\u901a\u8fc7\u8f93\u51fa\u5f15\u811a\u4e0a\u7684\u76f4\u6d41\u504f\u7f6e\u5b9e\u73b0\u504f\u7f6e\u3002\u8fd9\u79cd\u504f\u7f6e\u901a\u5e38\u901a\u8fc7\u504f\u7f6e\u7535\u963b\u63d0\u4f9b\uff0c\u800c\u4e14\u9ea6\u514b\u98ce\u8f93\u51fa\u548c\u524d\u7f6e\u653e\u5927\u5668<\/u>\u8f93\u5165\u4e4b\u95f4\u7684\u4fe1\u53f7\u4f1a\u7ecf\u8fc7\u4ea4\u6d41\u8026\u5408<\/u>\u3002<\/p>\n \n\t\u3000\u3000ECM\u7684\u5e38\u89c1\u7528\u4f8b\u662f\u5728\u624b\u673a\u4e0a\u8fde\u63a5\u7684\u8033\u673a\u4e2d\u7528\u4f5c\u5185\u8054\u5f0f\u8bed\u97f3\u9ea6\u514b\u98ce\u3002\u8fd9\u79cd\u60c5\u51b5\u4e0b\uff0c\u8033\u673a\u548c\u624b\u673a\u4e4b\u95f4\u7684\u8fde\u63a5\u5668\u6709\u56db\u4e2a\u5f15\u811a\uff1a\u5de6\u4fa7\u97f3\u9891\u8f93\u51fa\u3001\u53f3\u4fa7\u97f3\u9891\u8f93\u51fa\u3001\u9ea6\u514b\u98ce\u4fe1\u53f7\u4ee5\u53ca\u63a5\u5730\u3002\u5728\u8fd9\u79cd\u8bbe\u8ba1\u4e2d\uff0cECM\u7684\u8f93\u51fa\u4fe1\u53f7\u548c\u76f4\u6d41\u504f\u7f6e\u7535\u538b\u5728\u540c\u4e00\u4fe1\u53f7\u7ebf\u8def\u4e2d\u4f20\u8f93\u3002\u504f\u7f6e\u7535\u538b\u6e90\u901a\u5e38\u7ea6\u4e3a2.2 V\u3002<\/p>\n \n\t\u3000\u3000MEMS\u9ea6\u514b\u98ce\u533a\u522b<\/p>\n \n\t\u3000\u3000\u6a21\u62dfMEMS\u9ea6\u514b\u98ce\u7684\u4fe1\u53f7\u5f15\u811a\u4e0a\u4e0d\u4f7f\u7528\u8f93\u5165\u504f\u7f6e\u7535\u538b\u3002\u4f46\u662f\uff0c\u5b83\u662f\u4e00\u79cd\u4e09\u7aef\u5668\u4ef6\uff0c\u6709\u4e0d\u540c\u7684\u5f15\u811a\u5206\u522b\u7528\u4e8e\u7535\u6e90\u3001\u63a5\u5730\u548c\u8f93\u51fa\u3002VDD\u5f15\u811a\u7684\u4f9b\u7535\u7535\u538b\u4e00\u822c\u4e3a 1.8\u81f33.3 V\u3002MEMS\u9ea6\u514b\u98ce\u7684\u4fe1\u53f7\u8f93\u51fa\u901a\u8fc7\u76f4\u6d41\u7535\u538b\u5b9e\u73b0\u504f\u7f6e\uff0c\u4e00\u822c\u7b49\u4e8e\u6216\u63a5\u8fd10.8 V\u3002\u5728\u8bbe\u8ba1\u4e2d\uff0c\u8be5\u8f93\u51fa\u4fe1\u53f7\u901a\u5e38\u4f1a\u7ecf\u8fc7\u4ea4\u6d41\u8026\u5408\u3002<\/p>\n \n\t\u3000\u3000<\/p>\n \n\t\u3000\u3000\u56fe1. ECM\u7535\u8def\u8fde\u63a5<\/p>\n \n\t\u3000\u3000\u76f8\u5bf9\u4e8eECM\uff0c\u4f7f\u7528MEMS\u9ea6\u514b\u98ce\u7684\u5173\u952e\u4f18\u52bf\u5728\u4e8e\u5b83\u7684\u7535\u6e90\u6291\u5236\uff08PSR\uff09\u6027\u80fd\u66f4\u5f3a\u3002MEMS\u9ea6\u514b\u98ce\u7684PSR\u901a\u5e38\u81f3\u5c11\u4e3a70 dBV\uff0cECM\u5374\u6839\u672c\u6ca1\u6709\u7535\u6e90\u6291\u5236\u80fd\u529b\uff0c\u56e0\u4e3a\u504f\u7f6e\u7535\u538b\u76f4\u63a5\u901a\u8fc7\u7535\u963b\u8fde\u63a5\u81f3\u9ea6\u514b\u98ce\u3002<\/p>\n \n\t\u3000\u3000\u7528MEMS\u9ea6\u514b\u98ce\u53d6\u4ee3ECM\u65f6\u9700\u8981\u8fdb\u884c\u7684\u7535\u8def\u66f4\u6539<\/p>\n \n\t\u3000\u3000\u5bf9\u4e8e\u539f\u672c\u56f4\u7ed5ECM\u8bbe\u8ba1\u7684\u7cfb\u7edf\uff0c\u6539\u7528MEMS\u9ea6\u514b\u98ce\u65f6\u9762\u4e34\u7684\u57fa\u672c\u96be\u9898\u662f\uff0c\u7535\u6e90\u548c\u9ea6\u514b\u98ce\u8f93\u51fa\u6ca1\u6709\u5355\u72ec\u7684\u4fe1\u53f7\uff0c\u4f8b\u5982\u4f7f\u7528\u8033\u673a\u5f0f\u9ea6\u514b\u98ce\u65f6\u3002\u5982\u679c\u5bf9\u7535\u8def\u8fdb\u884c\u4e00\u4e9b\u5c0f\u7684\u66f4\u6539\uff0c\u5c31\u53ef\u4ee5\u5728\u6b64\u7c7b\u8bbe\u8ba1\u4e2d\u4f7f\u7528MEMS\u9ea6\u514b\u98ce\u3002\u9996\u5148\uff0c\u5fc5\u987b\u5c06\u4fe1\u53f7\u94fe\u4e2d\u76f4\u6d41\u504f\u7f6e\u63d0\u4f9b\u7684\u4e0b\u6e38\u4fe1\u53f7\u4e0e\u9ea6\u514b\u98ce\u7684\u8f93\u51fa\u4fe1\u53f7\u9694\u79bb\u3002\u5176\u6b21\uff0c\u5fc5\u987b\u5c06\u6b64\u76f4\u6d41\u504f\u7f6e\u7528\u4e8e\u4e3a MEMS\u9ea6\u514b\u98ce\u4f9b\u7535\uff0c\u800c\u4e14\u4e0d\u80fd\u8ba9\u9ea6\u514b\u98ce\u7684\u8f93\u51fa\u4fe1\u53f7\u5e72\u6270\u7535\u6e90\u3002\u76f4\u6d41\u504f\u7f6e\u7684\u9694\u79bb\u53ef\u901a\u8fc7\u4ea4\u6d41\u8026\u5408\u7535\u5bb9\u5b9e\u73b0\uff0cMEMS\u9ea6\u514b\u98ce\u7684\u7535\u6e90\u53ef\u901a\u8fc7\u4ed4\u7ec6\u8bbe\u8ba1\u7684\u7535\u8def\u63d0\u4f9b\uff0c\u8be5\u7535\u8def\u5145\u5f53\u5206\u538b\u5668\u548c\u4f4e\u901a\u6ee4\u6ce2\u5668<\/u>\u3002\u4ee5\u4e0b\u8bbe\u8ba1\u4e2d\u4f7f\u7528\u4e86ADMP504 MEMS\u9ea6\u514b\u98ce\u4f5c\u4e3a\u793a\u4f8b\u3002\u5176\u4e2d\u7528\u5230\u4e86\u4e00\u4e2a2.2 k \u504f\u7f6e\u7535\u963b\u3002<\/p>\n \n\t\u3000\u3000<\/p>\n \n\t\u3000\u3000\u56fe2. \u5c06\u4e00\u6839\u7ebf\u7528\u4e8e\u7535\u6e90\u548c\u8f93\u51fa\u4fe1\u53f7\u7684MEMS\u9ea6\u514b\u98ce<\/p>\n \n\t\u3000\u3000\u56fe2\u663e\u793a\u4e86\u4e00\u4e2a\u5b9e\u73b0\u4e0a\u8ff0\u529f\u80fd\u7684\u8bbe\u8ba1\u793a\u4f8b\u3002\u5728\u8033\u673a\u7684\u8bbe\u8ba1\u4e2d\uff0c\u8033\u673a\u8fde\u63a5\u5668\u5de6\u4fa7\u7684\u7535\u8def\u90e8\u5206\u5c06\u4f1a\u5728\u5b9e\u9645\u8033\u673a\u4e2d\uff0c2.2 k\u504f\u7f6e\u7535\u963b\u548c1 F\u4ea4\u6d41\u8026\u5408\u7535\u5bb9\u5219\u5728\u6e90\u8bbe\u5907\uff08\u4f8b\u5982\u667a\u80fd\u624b\u673a\uff09\u4e2d\u3002\u7535\u963bR1\u548cR\u504f\u7f6e\u5f62\u6210\u5206\u538b\u5668\uff0cMEMS\u9ea6\u514b\u98ce\u5c06V\u504f\u7f6e\u7535\u538b\u964d\u81f3VDD\u5f15\u811a\u7684\u4f9b\u7535\u7535\u538b\u3002\u6839\u636eV\u504f\u7f6e\u3001R\u504f\u7f6e\u548c\u6240\u9700VDD\u7535\u538b\u7684\u503c\uff0c\u7535\u963bR1\u53ef\u80fd\u9700\u8981\u975e\u5e38\u5c0f\uff0c\u5982\u4e0b\u4f8b\u6240\u793a\u3002\u8981\u8ba1\u7b97\u6240\u9700\u7684\u4e32\u8054\u7535\u963b\uff08R\u504f\u7f6e + R1\uff09\uff0c\u53ef\u5c06\u9ea6\u514b\u98ce\u5efa\u6a21\u4e3a\u4e00\u4e2a\u7535\u963b\uff0c\u5c06\u6709\u56fa\u5b9a\u7535\u6d41\u4ece\u4e2d\u6d41\u8fc7\u3002VDD = 1.8 V\u65f6\uff0cADMP504\u7684\u5178\u578b\u4f9b\u7535\u7535\u6d41\u4e3a180 A\u3002\u6839\u636e\u6b27\u59c6\u5b9a\u5f8b\uff0cVDD\u4e0a\u7684\u7535\u538b\u4e3a1.8 V\u65f6\uff0c\u8be5\u9ea6\u514b\u98ce\u53ef\u5efa\u6a21\u4e3a\u4e00\u4e2a10 k \u7684\u7535\u963b\u3002\u8981\u6c42\u89e3\u5408\u9002\u7684\u7535\u963bR1\u503c\uff0c\u6240\u7528\u7684\u5206\u538b\u5668\u516c\u5f0f\u4e3a\uff1a<\/p>\n \n\t\u3000\u3000\uff3b\u9ea6\u514b\u98ceVDD\uff3d = \uff3b\u504f\u7f6e\u7535\u538b\uff3d &TI<\/u>mes;\uff0810 k \/\uff0810 k + R1 + R\u504f\u7f6e<\/p>\n \n\t\u3000\u3000\u6839\u636e\u6b64\u516c\u5f0f\u53ef\u4ee5\u7b97\u51fa\uff0c\u4e00\u4e2a2.2 k \u7684R\u504f\u7f6e\u7535\u963b\u548c\u4e00\u4e2a499\u7684R1\u7535\u963b\u4f1a\u4ece2.2 V\u504f\u7f6e\u7535\u538b\u5206\u51fa1.73 V\u5230\u9ea6\u514b\u98ce\u7684VDD\u4e0a\u3002\u5728\u9009\u62e9R1\u503c\u65f6\uff0c\u9700\u8981\u8fdb\u884c\u6743\u8861\u53d6\u820d;\u5982\u4e0b\u6240\u793a\uff0c\u6b64\u503c\u592a\u5927\u4f1a\u5bfc\u81f4VDD\u8fc7\u5c0f\uff0c\u4f46\u4e3a\u4e86\u9632\u6b62C2\u8fc7\u5927\uff0c\u53c8\u4e0d\u80fd\u8ba9\u6b64\u503c\u592a\u5c0f\u3002 \u5982\u4ecaMEMS\u9ea6\u514b\u98ce\u6b63\u9010\u6e10\u53d6\u4ee3\u97f3\u9891\u7535\u8def\u4e2d\u7684\u9a7b\u6781\u4f53\u7535\u5bb9\u9ea6\u514b\u98ce\uff08ECM\uff09\u3002ECM\u548cMEMS\u8fd9\u4e24\u79cd\u9ea6\u514b\u98ce\u7684\u529f\u80fd\u76f8\u540c\uff0c\u4f46\u5404\u81ea\u548c\u7cfb\u7edf\u5176\u4f59\u90e8\u5206\u4e4b\u95f4\u7684\u8fde\u63a5\u5374\u4e0d\u4e00\u6837\u3002\u672c\u5e94\u7528\u7b14\u8bb0\u5c06\u4f1a\u4ecb\u7ecd\u8fd9\u4e9b\u533a\u522b\uff0c\u5e76\u6839\u636e\u4e00\u4e2a\u7b80\u5355\u7684\u57fa\u4e8eMEMS\u9ea6\u514b\u98ce\u7684\u66ff\u6362\u7535\u8def\u63d0\u4f9b\u8bbe\u8ba1\u8be6\u60c5\u3002<\/p>\n \n\t\u3000\u3000<\/p>\n \n\t\u3000\u3000\u56fe3. \u5206\u538b\u5668\u6a21\u578b<\/p>\n \n\t\u3000\u3000\u56fe3\u663e\u793a\u4e86\u8be5\u5206\u538b\u5668\u7684\u4e24\u79cd\u4e0d\u540c\u6a21\u578b\u3002\u5de6\u4fa7\uff0cADMP504\u9ea6\u514b\u98ce\u5efa\u6a21\u4e3a180 A\u7535\u6d41\u6e90;\u53f3\u4fa7\uff0c\u9ea6\u514b\u98ce\u5219\u5efa\u6a21\u4e3a\u5177\u67091.8 V VDD\u768410 k \u7535\u963b\u3002<\/p>\n \n\t\u3000\u3000\u7535\u5bb9C2\u548c\u7535\u963bR1\u5f62\u6210\u4f4e\u901a\u6ee4\u6ce2\u5668\uff0c\u7528\u4e8e\u5bf9\u7535\u538b\u4f9b\u7535\u4fe1\u53f7\u4e2d\u8f93\u51fa\u7684\u9ea6\u514b\u98ce\u97f3\u9891\u8fdb\u884c\u6ee4\u6ce2\u3002\u8fd9\u79cd\u6ee4\u6ce2\u5668\u8f6c\u6298\u9891\u7387\u5e94\u8be5\u8fdc\u4f4e\u4e8e\u9ea6\u514b\u98ce\u672c\u8eab\u7684\u6ee4\u6ce2\u5668\u8f83\u4f4e\u8f6c\u6298\u9891\u7387\u3002\u5c06\u4f4e\u901a\u6ee4\u6ce2\u5668\u8bbe\u8ba1\u4e3a\u81f3\u5c11\u4f4e\u4e8e\u9ea6\u514b\u98ce\u8f83\u4f4e\u8f6c\u6298\u9891\u7387\u7684\u4e24\u4e2a\u500d\u9891\u7a0b\uff0c\u8fd9\u4f1a\u662f\u4e00\u4e2a\u597d\u7684\u5f00\u7aef\u3002\u5bf9\u4e8eADMP504\uff0c\u6b64\u8f6c\u6298\u9891\u7387\u4e3a100 Hz\u300210 F\u7684\u7535\u5bb9\u548c499 \u7684R1\u7535\u963b\u53ef\u5b9e\u73b0\u8f6c\u6298\u9891\u7387\u4e3a31 Hz\u7684\u6ee4\u6ce2\u5668\u3002\u8f83\u5927\u7684\u7535\u5bb9\u6216\u7535\u963b\u4f1a\u8fdb\u4e00\u6b65\u964d\u4f4e\u6b64\u8f6c\u6298\u9891\u7387\uff0c\u4f46\u662f\u8be5\u6ee4\u6ce2\u5668\u7684\u7535\u963b\u5927\u5c0f\u5fc5\u987b\u4e0e\u5b83\u5bf9\u5206\u538b\u5668\u7684\u8d21\u732e\u4fdd\u6301\u5e73\u8861\uff0c\u5176\u4e2d\uff0c\u5206\u538b\u5668\u4f1a\u5411\u9ea6\u514b\u98ce\u63d0\u4f9bVDD\u3002\u4f4e\u901a\u6ee4\u6ce2\u5668\u7684−3 dB\u70b9\u7684\u8ba1\u7b97\u516c\u5f0f\u5982\u4e0b\uff1a<\/p>\n \n\t\u3000\u3000f−3 dB = 1\/\uff082π &TImes; R1 &TImes; C2\uff09<\/p>\n \n\t\u3000\u3000\u5176\u4e2d\uff1a<\/p>\n \n\t\u3000\u3000R1\u4e3a\u5206\u538b\u5668\u4e2d\u7684\u7535\u963b\u3002<\/p>\n \n\t\u3000\u3000C2\u4e3a\u4f4e\u901a\u6ee4\u6ce2\u5668\u7535\u5bb9\u3002<\/p>\n \n\t\u3000\u3000\u7535\u5bb9C1\u5bf9\u9ea6\u514b\u98ce\u8f93\u51fa\u8fdb\u884c\u4ea4\u6d41\u8026\u5408\uff0c\u8fd9\u6837\u5b83\u7684\u504f\u7f6e\u8f93\u51fa\u5c31\u4f1a\u4e0e\u901a\u8fc7\u624b\u673a\u63d0\u4f9b\u7684\u9ea6\u514b\u98ce\u504f\u7f6e\u7535\u538b\u9694\u79bb\u3002\u5728\u7ed9\u5b9a\u7684VDD\u6761\u4ef6\u4e0b\uff0c\u51ed\u501fR\u504f\u7f6e\u3001R1\u548c\u9ea6\u514b\u98ce\u7684\u7b49\u6548\u7535\u963b\uff0c\u8be5\u7535\u5bb9\u8fd8\u4f1a\u5f62\u6210\u9ad8\u901a<\/u>\u6ee4\u6ce2\u5668\u3002\u8ba1\u7b97\u9ad8\u901a\u6ee4\u6ce2\u5668\u8f6c\u6298\u9891\u7387\u65f6\u8981\u8003\u8651\u7684\u603b\u7535\u963b\u4e3a\u4e0eR\u504f\u7f6e\u5e76\u8054\u7684RMIC\u548cR1\u7684\u4e32\u8054\u7535\u963b\u3002\u6b64\u7535\u963b\u7684\u8ba1\u7b97\u516c\u5f0f\u4e3a<\/p>\n \n\t\u3000\u3000R\u603b =\uff08\uff08RMIC + R1\uff09 &TImes; R\u504f\u7f6e\uff09\/\uff08RMIC + R1 + R\u504f\u7f6e\uff09<\/p>\n \n\t\u3000\u3000\u5bf9\u4e8e\u6b64\u5904\u7684\u793a\u4f8b\uff0cR\u603b = 1810 \u3002\u9ad8\u901a\u6ee4\u6ce2\u5668\u8f6c\u6298\u9891\u7387\u4e3a\uff1a<\/p>\n \n\t\u3000\u3000f−3 dB = 1\/\uff082π\uff08R\u603b × C1\uff09<\/p>\n \n\t\u3000\u3000\u8981\u8ba9\u6ee4\u6ce2\u5668\u8f6c\u6298\u9891\u7387\u81f3\u5c11\u4f4e\u4e8eADMP504\u4f4e\u9891\u6eda\u964d\u9891\u7387100 Hz\u4e00\u4e2a\u500d\u9891\u7a0b\u7684\u6ee4\u6ce2\u5668\u8f6c\u6298\u9891\u7387\u4e3a100 Hz\uff0cC1\u81f3\u5c11\u5e94\u8be5\u4e3a1.8 F\u3002<\/p>\n \n\t\u3000\u3000<\/p>\n \n\t\u3000\u3000\u56fe4. \u91c7\u7528ADMP504 MEMS\u9ea6\u514b\u98ce\u7684\u7535\u8def<\/p>\n \n\t\u3000\u3000\u56fe4\u663e\u793a\u4e86\u4e00\u5957\u5b8c\u6574\u7684\u8033\u673a\u7535\u8def\uff0c\u5176\u4e2d\u91c7\u7528\u4e86ADMP504MEMS\u9ea6\u514b\u98ce\u4ee5\u53ca\u5408\u9002\u7684\u7535\u963b\u548c\u7535\u5bb9\u503c\uff0c\u5e76\u4ee5\u6211\u4eec\u5904\u7406\u7684V\u504f\u7f6e\u548cR\u504f\u7f6e\u503c\u4e3a\u4f9d\u636e\u3002<\/p>\n","protected":false},"excerpt":{"rendered":" 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\n\t\u3000\u3000\u9ea6\u514b\u98ce\u504f\u7f6e\u7535\u8def\u548c\u6ee4\u6ce2\u7535\u8def<\/h2>\n