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\u524d\u9053\u5de5\u5e8f<\/strong><\/p>\n \u534a\u5bfc\u4f53\u5de5\u827a\u5305\u542b\u524d\u9053\u5de5\u5e8f\u548c\u540e\u9053\u5de5\u5e8f\u3002<\/p>\n \u524d\u9053\u5de5\u5e8f\u4e3b\u8981\u662f\u5bf9\u7845\u6676\u5706\u8fdb\u884c\u52a0\u5de5\uff0c\u8fd9\u79cd\u52a0\u5de5\u4e0d\u662f\u5c06\u96f6\u4ef6\u6dfb\u52a0\u5230\u76ae\u5e26\u8f93\u9001\u673a\u4e0a\uff0c\u6d41\u52a8\u6e05\u6d17\u3001\u79bb\u5b50\u6ce8\u5165\u548c\u70ed\u5904\u7406\u3001\u5149\u523b\u3001\u523b\u8680\u3001\u6210\u819c\u3001\u5e73\u5766\u5316\uff08CMP\uff09\u8fd96\u4e2a\u5de5\u827a\u4f1a\u53cd\u590d\u591a\u6b21\u8fdb\u884c\uff0c\u4e5f\u53eb\u201c\u5faa\u73af\u5de5\u827a\u201d\u3002<\/p>\n LSI\u82af\u7247<\/u>\u5e76\u4e0d\u662f\u4e00\u4e2a\u4e2a\u5728\u7845\u7247\u4e0a\u5236\u9020\uff0c\u800c\u662f\u7c7b\u4f3c\u5370\u949e\uff0c\u5728\u4e00\u5f20\u5927\u7eb8\uff08\u7845\u7247\uff09\u4e0a\u5370\u5237\u5f88\u591a\u5f20\uff0c\u7136\u540e\u526a\u88c1\u51fa\u6765\u3002\u524d\u9053\u5de5\u5e8f\u4e00\u5927\u7279\u70b9\u5c31\u662f\u751f\u4ea7\u7ebf\u7684\u6e05\u6d01\u5ea6\u8981\u6c42\u975e\u5e38\u4e25\u683c\uff0c\u901a\u5e38\u9700\u8981\u81f3\u5c111\u7ea7\u2460\u4ee5\u4e0a\u7684\u6e05\u6d01\u5ea6\u3002<\/p>\n \u24601\u7ea7\uff1aClass\u662f\u6d01\u51c0\u5ea6\u7684\u6807\u51c6\u3002\u75281\u7acb\u65b9\u82f1\u5c3a\uff08\u7ea630\u5e73\u65b9\u5398\u7c73\uff09\u7684\u7a7a\u6c14\u4e2d\u5b58\u5728\u591a\u5c11\u9897\u7c92\u8868\u793a\u3002Class 1\u6307\u5b58\u57281\u4e2a\u4e2a\u9897\u7c92\u3002<\/p>\n \u63d0\u95ee<\/p>\n 1.\u524d\u9053\u5de5\u5e8ffab\u7684\u5168\u8c8c\u662f\u600e\u6837\u7684\uff1f<\/p>\n 2.\u4ec0\u4e48\u53eb\u505aBay\u65b9\u5f0f\uff1f<\/p>\n \u6e05\u6d17\u548c\u5e72\u71e5\u6e7f\u6cd5\u5de5\u827a<\/strong><\/p>\n \u5728\u524d\u9053\u5de5\u5e8f\u4e2d\uff0c\u6676\u5706\u5728\u534a\u5bfc\u4f53\u5de5\u827a\u5404\u79cd\u8bbe\u5907\u4f20\u9001\u671f\u95f4\uff0c\u5fc5\u987b\u8fdb\u884c\u6e05\u6d17\u3002\u6676\u5706\u5728\u6bcf\u6b21\u7684\u5de5\u827a\u5904\u7406\u8fc7\u7a0b\u4e2d\u90fd\u4f1a\u53d7\u5230\u6c61\u67d3\uff0c\u4f8b\u5982\u7a7a\u6c14\u548c\u90e8\u54c1\u6750\u8d28\u7684\u5fae\u7ec6\u9897\u7c92\u548c\u6742\u8d28\u3001\u8bbe\u65bd\u3001\u8bbe\u5907\u548c\u7535\u6e90<\/u>\u7ebf\u7684\u7535\u78c1\u8f90\u5c04\u3001\u6676\u5706\u52a0\u5de5\u6d4b\u91cf\u65f6\u5149\u675f\u9020\u6210\u7684\u635f\u574f\u3001\u5de5\u827a\u548c\u6676\u5706\u4f20\u9001\u65f6\u7684\u9759\u7535\u7b49\u3002\u4ece\u6e05\u6d17\u8bbe\u5907\u51fa\u6765\u540e\uff0c\u5fc5\u987b\u4fdd\u6301\u5e72\u71e5\u72b6\u6001\uff0c\u79f0\u4e3a\u201c\u5e72\u8fdb\u5e72\u51fa\u201d\uff08Dry-In-Dry-Out\uff09\uff0c\u56e0\u4e3a\u6676\u5706\u5982\u679c\u5904\u4e8e\u542b\u6c34\u7684\u72b6\u6001\uff0c\u6676\u5706\u8868\u9762\u5c31\u4f1a\u8fc5\u901f\u6c27\u5316\uff0c\u8089\u773c\u770b\u4e0d\u89c1\u7684\u6c34\u6ef4\u4f1a\u5f62\u6210\u6c34\u6e0d\u5f71\u54cd\u540e\u7eed\u5de5\u827a\u3002<\/p>\n 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Dry\uff09\u548cIPA\uff08\u5f02\u4e19\u9187\uff09\u5e72\u71e5\u3002\u524d\u8005\u5c06\u6676\u5706\u653e\u5165\u4e00\u4e2a\u7279\u6b8a\u7684\u76d2\u5b50\u4e2d\uff0c\u5e76\u9ad8\u901f\u65cb\u8f6c\u4ee5\u7529\u6389\u6c34\u5206\uff0c\u8be5\u65b9\u6cd5\u8bbe\u5907\u7ed3\u6784\u7b80\u5355\uff0c\u4ef7\u683c\u4f4e\uff0c\u541e\u5410\u91cf\u2461\u9ad8\uff0c\u4f46\u9700\u8981\u7075\u6d3b\u6027\u9ad8\u3001\u80fd\u4ea7\u751f\u9759\u7535\u7684\u96f6\u90e8\u4ef6\u3002\u540e\u8005\u662f\u7528\u6325\u53d1\u6027IPA\u84b8\u6c7d\u66ff\u6362\u6676\u5706\u8868\u9762\u7684\u6c34\u5206\uff0c\u4f7f\u4e4b\u5e72\u71e5\uff0c\u597d\u5904\u662f\u6709\u5229\u4e8e\u56fe\u5f62\u7684\u5e72\u71e5\uff0c\u4f46\u9700\u8981\u4f7f\u7528\u6613\u71c3\u5316\u5b66\u54c1\uff0c\u4e14\u5bb9\u6613\u7559\u4e0b\u6709\u673a\u7269\u3001\u6b8b\u7559\u7269\u3002\u9664\u6b64\u4e4b\u5916\uff0c\u8fd8\u6709\u4e00\u79cd\u5e72\u71e5\u65b9\u6cd5\u53eb\u201c\u9a6c\u5170\u6208\u5c3c\u5e72\u71e5\u201d\uff0c\u5373\u5c06\u6676\u5706\u4ece\u987a\u6c34\u4e2d\u7acb\u5373\u9001\u5165IPA\u84b8\u6c7d\u4e2d\u5e72\u71e5\uff0c\u5982\u6b64\u53ef\u4ee5\u51cf\u5c11IPA\u7684\u7528\u91cf\uff0c\u4f46\u541e\u5410\u91cf\u8f83\u5c0f\uff0c\u6709\u673a\u7269\u6709\u6b8b\u7559\u3002<\/p>\n \u2461\u541e\u5410\u91cf\uff08Throughput\uff09\uff1a\u5355\u4f4d\u65f6\u95f4\u5185\u53ef\u4ee5\u5904\u7406\u7684\u6676\u5706\u6570\u91cf\u3002<\/p>\n \u63d0\u95ee<\/p>\n 1.\u6e05\u6d17\u6676\u5706\u7684\u65b9\u6cd5\u6709\u54ea\u4e9b\uff1f<\/p>\n 2.\u4ec0\u4e48\u53eb\u6e7f\u6cd5\u5de5\u827a\u548c\u5e72\u6cd5\u6e05\u6d17\uff1f<\/p>\n \u79bb\u5b50\u6ce8\u5165\u548c\u70ed\u5904\u7406\u5de5\u827a<\/strong><\/p>\n 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\u5149\u523b\u5de5\u827a<\/strong><\/p>\n \u5149\u523b\u5de5\u827a\u672c\u8eab\u4e0d\u80fd\u518dLSI\u7559\u4e0b\u4efb\u4f55\u5f62\u72b6\uff0c\u5982\u679c\u4ece\u7ed8\u753b\u7684\u89d2\u5ea6\u6765\u8bf4\uff0c\u5149\u523b\u5c31\u50cf\u7d20\u63cf\u6216\u8005\u8349\u7a3f\u3002\u5149\u523b\u7684\u6784\u6210\u8981\u7d20\u5305\u62ec\u66dd\u5149\u88c5\u7f6e\u3001\u611f\u5149\u6750\u6599\u7684\u5149\u523b\u80f6\u3001\u6709\u7248\u56fe\u7684\u63a9\u6a21\u7248\u3001\u6d82\u80f6\u3001\u663e\u5f71\u7b49\u5de5\u827a\u3002<\/p>\n \u6211\u4eec\u53ef\u4ee5\u628a\u5149\u523b\u7406\u89e3\u4e3a\u662f\u7167\u76f8\uff0c\u5149\u523b\u80f6\u662f\u76f8\u7eb8\uff0c\u63a9\u819c\u662f\u88ab\u7167\u7684\u7269\u4f53\uff0c\u4f8b\u5982\u4e00\u7247\u53f6\u5b50\uff0c\u5149\u6e90\u5c31\u662f\u65e5\u5149\u3002\u5177\u4f53\u6d41\u7a0b\u5927\u6982\u662f\uff0c\u9996\u5148\u5728\u51c6\u5907\u523b\u8680\u7684\u8584\u819c\u4e0a\u9762\u6d82\u4e0a\u5149\u523b\u80f6\uff0c\u4f46\u6676\u5706\u8868\u9762\u4eb2\u6c34\u6027\u9ad8\uff0c\u6709\u65f6\u5149\u523b\u80f6\u65e0\u6cd5\u5f88\u597d\u7684\u6d82\u62b9\uff0c\u9700\u8981\u7528\u5230\u4e00\u79cd\u540d\u4e3aHMDS\uff08\u516d\u7532\u57fa\u4e8c\u7845\u6c2e\u70f7\uff09\u7684\u6709\u673a\u6eb6\u5242\u4f7f\u6676\u5706\u8868\u9762\u5177\u6709\u758f\u6c34\u6027\u3002\u6d82\u4e0a\u5149\u523b\u80f6\u540e\uff0c\u9700\u8981\u572870\u2103-90\u2103\u6e29\u5ea6\u4e0b\u8fdb\u884c\u524d\u70d8\u5904\u7406\uff08Pre-Bake\uff0c\u4e5f\u79f0\u201c\u8f6f\u70d8\u201d\uff09\u6765\u53bb\u9664\u6eb6\u5242\u3002<\/p>\n \u63a5\u4e0b\u6765\u66dd\u5149\u88c5\u7f6e\u9700\u8981\u901a\u8fc7\u63a9\u6a21\u7248\u6765\u7ed8\u5236\u56fe\u5f62\uff0c\u5176\u5b9e\u5149\u523b\u5c31\u662f\u5c06\u63a9\u6a21\u7248\u4e0a\u7684\u56fe\u50cf\u7cbe\u786e\u5730\u8f6c\u79fb\uff08\u7167\uff09\u5230\u5149\u523b\u80f6\uff08\u76f8\u7eb8\uff09\u4e0a\u3002\u63a9\u6a21\u7248\u662f\u5728\u900f\u5149\u7684\u77f3\u82f1\u57fa\u677f\u4e0a\u7528\u94ec\uff08Cr\uff09\u4f5c\u4e3a\u906e\u5149\u6750\u6599\uff0c\u5f62\u6210\u4e00\u5b9a\u7684\u56fe\u5f62\u3002<\/p>\n \u63a5\u4e0b\u6765\u8fdb\u884c\u201c\u663e\u5f71\u201d\u6b65\u9aa4\uff0c\u8fd9\u4e2a\u65f6\u5019\u53c8\u8981\u63d0\u5230\u5149\u523b\u80f6\u3002\u5149\u523b\u80f6\u5c31\u50cf\u8001\u5f0f\u76f8\u7eb8\u7684\u6b63\u7247\u3001\u5e95\u7247\u4e00\u6837\uff0c\u5b83\u4e5f\u5206\u201c\u8d1f\u6027\u5149\u523b\u80f6\u201d\u548c\u201c\u6b63\u6027\u5149\u523b\u80f6\u201d\u3002\u8d1f\u6027\u5149\u523b\u80f6\u5728\u5149\u7167\u5c04\u5230\u7684\u5730\u65b9\u4f1a\u7559\u4e0b\u56fe\u5f62\uff0c\u800c\u6b63\u6027\u5149\u523b\u80f6\u5728\u5149\u7167\u5c04\u4e0d\u5230\u7684\u5730\u65b9\u4f1a\u7559\u4e0b\u56fe\u5f62\u3002\u7531\u6b64\u53ef\u63a8\u7406\uff0c\u5982\u679c\u662f\u8d1f\u6027\u5149\u523b\u80f6\uff0c\u663e\u5f71\u5c31\u662f\u53bb\u9664\u6ca1\u6709\u88ab\u5149\u7167\u5230\u7684\u5730\u65b9\uff1b\u5982\u679c\u662f\u6b63\u6027\u5149\u523b\u80f6\uff0c\u663e\u5f71\u5c31\u662f\u53bb\u9664\u88ab\u5149\u7167\u5c04\u5230\u7684\u5730\u65b9\u3002<\/p>\n \u63a5\u4e0b\u6765\uff0c\u4e3a\u4e86\u53bb\u9664\u663e\u5f71\u6db2\u7b49\u591a\u4f59\u6db2\u4f53\uff0c\u589e\u5f3a\u5269\u4f59\u5149\u523b\u80f6\u4e0e\u523b\u8680\u8584\u819c\u7684\u9644\u7740\u6027\uff0c\u9700\u8981\u5728100\u2103\u7684\u6e29\u5ea6\u4e0b\u8fdb\u884c\u540e\u70d8\uff08Post-Bake\uff0c\u4e5f\u79f0\u786c\u70d8\uff09\u3002<\/p>\n \u63d0\u95ee<\/p>\n 1.\u5149\u523b\u5de5\u827a\u4e2d\u600e\u6837\u5c06\u56fe\u50cf\u201c\u51b2\u5370\u201d\u5230\u5149\u523b\u80f6\u4e0a\uff1f\u66dd\u5149\u6280\u672f\u8fd9\u4e9b\u5e74\u6765\u53d1\u751f\u4e86\u54ea\u4e9b\u6539\u53d8\uff1f<\/p>\n 2.DUV\u548cEUV\u7684\u533a\u522b\u662f\u4ec0\u4e48\uff1f<\/p>\n 3.\u5728\u63a5\u8fd1\u66dd\u5149\u5206\u8fa8\u7387\u7684\u6781\u9650\u4e0b\uff0c\u600e\u6837\u8fdb\u4e00\u6b65\u63d0\u9ad8\u5149\u523b\u7684\u7cbe\u7ec6\u5ea6\uff1f<\/p>\n \u523b\u8680\u5de5\u827a<\/strong><\/p>\n \u523b\u8680\u662f\u5229\u7528\u5149\u523b\u5de5\u827a\u6240\u5728\u523b\u8680\u8584\u819c\uff08\u523b\u8680\u5bf9\u8c61\uff09\u4e0a\u5f62\u6210\u5149\u523b\u56fe\u5f62\uff0c\u6b64\u65f6\u5149\u523b\u80f6\u4f5c\u4e3a\u523b\u8680\u7684\u63a9\u853d\u5c42\uff0c\u6240\u4ee5\u6709\u65f6\u5019\u4e5f\u79f0\u5176\u4e3a\u5149\u523b\u80f6\u63a9\u853d\u819c\u3002\u63a5\u4e0b\u6765\uff0c\u653e\u5165\u523b\u8680\u8bbe\u5907\uff08\u672c\u5c0f\u8282\u4e3b\u8981\u8bb2\u5e72\u6cd5\u523b\u8680\u8bbe\u5907\uff09\uff0c\u7528\u5149\u523b\u80f6\u4f5c\u4e3a\u63a9\u819c\u8fdb\u884c\u523b\u8680\u3002<\/p>\n \u523b\u8680\u6c14\u4f53\u5728\u7b49\u79bb\u5b50\u4f53\u2462\u4e2d\u5206\u89e3\u7535\u79bb\uff0c\u5f62\u6210\u79bb\u5b50\u548c\u81ea\u7531\u57fa\u7b49\u523b\u8680\u7c7b\u7269\u8d28\uff0c\u79f0\u4e3a\u201cEnchant\u2463\u201d\u3002Enchant\u8fbe\u5230\u6676\u5706\u8868\u9762\u5f00\u59cb\u523b\u8680\uff0c\u60f3\u8981\u523b\u8680\u51fa\u6df1\u5ea6\u5f62\u72b6\uff0c\u4f4e\u538b\u60c5\u51b5\u4e0b\u66f4\u6709\u5229\uff0c\u4f46\u4e5f\u4e0d\u662f\u8d8a\u4f4e\u8d8a\u597d\uff0c\u592a\u4f4e\u7684\u538b\u529b\u653e\u7535\u4f1a\u4e0d\u987a\u5229\uff0c\u7b49\u79bb\u5b50\u4f53\u96be\u4ee5\u4ea7\u751f\u3002<\/p>\n \u5230\u8fbe\u6676\u5706\u8868\u9762\u7684Enchant\u4e0e\u88ab\u523b\u8680\u7269\u53d1\u751f\u53cd\u5e94\uff0c\u8fdb\u884c\u523b\u8680\u53cd\u5e94\u3002\u523b\u8680\u53cd\u5e94\u7684\u526f\u4ea7\u7269\u5fc5\u987b\u8fc5\u901f\u8131\u79bb\u5e76\u6392\u6c14\uff0c\u5426\u5219\u526f\u4ea7\u7269\u4f1a\u9644\u7740\u5728\u8868\u9762\uff0c\u523b\u8680\u53cd\u5e94\u65e0\u6cd5\u8fdb\u884c\u3002<\/p>\n \u523b\u8680\u5b8c\u6210\u540e\uff0c\u9700\u8981\u91c7\u7528\u201c\u7070\u5316\u2464\u201d\u6765\u53bb\u9664\u523b\u8680\u5bf9\u8c61\u4e0a\u9762\u7684\u5149\u523b\u80f6\u3002<\/p>\n \u2462\u7b49\u79bb\u5b50\u4f53\uff1a\u7b49\u79bb\u5b50\u4f53\u662f\u6c14\u4f53\u3001\u6db2\u4f53\u3001\u56fa\u4f53\u4e4b\u5916\u7684\u7b2c\u56db\u79cd\u7269\u8d28\u72b6\u6001\uff0c\u5927\u81f4\u6765\u8bf4\u5c31\u662f\u7535\u79bb\u6c14\u4f53\uff0c\u53ef\u4ee5\u8ba4\u4e3a\u5176\u6574\u4f53\u7535\u8377\u4e3a\u4e2d\u6027\u3002\u5728\u771f\u7a7a\u4e2d\u5bfc\u5165\u60f3\u8981\u7684\u6c14\u4f53\uff0c\u7ecf\u8fc7\u653e\u7535\u548c\u589e\u538b\uff0c\u4ea7\u751f\u7684\u7535\u5b50\u4e0e\u6c14\u4f53\u5206\u5b50\u78b0\u649e\uff0c\u751f\u4ea7\u79bb\u5b50\u548c\u4e2d\u6027\u6d3b\u6027\u7684\u81ea\u7531\u57fa\uff0c\u4e0d\u65ad\u91cd\u590d\u8fd9\u4e2a\u8fc7\u7a0b\u5c31\u4f1a\u4ea7\u751f\u7b49\u79bb\u5b50\u4f53\u3002<\/p>\n \u2463Enchant\uff1a\u7b49\u79bb\u5b50\u4f53\u4e2d\u4ea7\u751f\u7684\u4e00\u5806\u8fdb\u884c\u523b\u8680\u7684\u7269\u8d28\uff0c\u5305\u62ec\u7535\u5b50\u3001\u79bb\u5b50\u548c\u81ea\u7531\u57fa\u3002<\/p>\n \u2464\u7070\u5316\uff08Ashing\uff09\uff1a\u628a\u6709\u673a\u7269\u7684\u5149\u523b\u80f6\u7528\u6c27\u6c14\u71c3\u70e7\u6210\u201c\u7070\u201d\u3002<\/p>\n \u63d0\u95ee<\/p>\n 1.\u523b\u8680\u8bbe\u5907\u7684\u8fd0\u4f5c\u673a\u7406\u662f\u600e\u6837\u7684\uff1f<\/p>\n 2.\u76ee\u524d\u5e72\u6cd5\u523b\u8680\u9762\u4e34\u7740\u600e\u6837\u7684\u6311\u6218\uff1f<\/p>\n 3.\u523b\u8680\u51fa\u73b0\u7684\u6eb6\u89e3\u504f\u5dee\u600e\u6837\u51cf\u5c0f\uff1f<\/p>\n \u6210\u819c\u5de5\u827a<\/strong><\/p>\n LSI\u5de5\u827a\u672c\u8d28\u4e0a\u662f\u5728\u4e00\u4e2a\u7845\u6676\u5706\u4e0a\u5236\u9020\u6742\u8d28\u533a\u57df\u3001\u5e03\u7ebf\u548c\u7edd\u7f18\u819c\u7684\u5de5\u827a\u8fc7\u7a0b\u3002LSI\u57fa\u672c\u4e0a\u7531\u534a\u5bfc\u4f53\u5c42\uff08\u5305\u62ec\u7845\u6676\u5706\uff09\u3001\u7528\u4e8e\u4f9b\u7535\u7684\u91d1\u5c5e\u5e03\u7ebf\u5c42\u4ee5\u53ca\u7528\u4e8e\u7535\u5668\u9694\u79bb\u7684\u7edd\u7f18\u5c42\uff08\u4e5f\u79f0\u4ecb\u8d28\u5c42\uff09\u7ec4\u6210\u3002<\/p>\n \u5176\u4e2d\uff0c\u534a\u5bfc\u4f53\u5c42\u662f\u6676\u4f53\u7ba1\u4e2d\u6700\u91cd\u8981\u7684\u533a\u57df\uff0c\u6676\u4f53\u7ba1\u662f\u534a\u5bfc\u4f53\u5668\u4ef6\u7684\u57fa\u7840\u3002\u91d1\u5c5e\u5e03\u7ebf\u5c06\u8fd9\u4e9b\u5668\u4ef6\u8fde\u63a5\u8d77\u6765\uff0c\u7edd\u7f18\u5c42\u628a\u5bfc\u7ebf\u548c\u5143\u4ef6\u7535\u6c14<\/u>\u9694\u79bb\u5f00\u6765\u3002\u5176\u4e2d\u5c31\u6d89\u53ca\u5230\u5404\u79cd\u201c\u819c\u201d\uff0c\u6bd4\u5982\u7535\u963b\u819c\u3001\u7edd\u7f18\u819c\u3001Cu\u963b\u9694\u91d1\u5c5e\u819c\u3001Al\u963b\u9694\u91d1\u5c5e\u819c\u3001STI\u57cb\u5c42\u7b49\u3002<\/p>\n \u63d0\u95ee<\/p>\n 1.\u6210\u819c\u8bbe\u5907\u7684\u8fd0\u4f5c\u65b9\u5f0f\u662f\u600e\u6837\u7684\uff1f<\/p>\n 2.\u6210\u819c\u73af\u8282\u4e2d\u7684CVD\u3001\u6e85\u5c04\u5de5\u827a\u3001\u7535\u9540\u5de5\u827a\u3001\u6d82\u5e03\u5de5\u827a\u3001High-k\u6805\u6781\u5806\u53e0\u5de5\u827a\u3001Cu\/Low-k\u5de5\u827a\u90fd\u662f\u600e\u4e48\u4e00\u56de\u4e8b\uff1f<\/p>\n \u5e73\u5766\u5316\uff08CMP\uff09\u5de5\u827a<\/strong><\/p>\n CMP\u5728\u4e00\u5f00\u59cb\u5e76\u4e0d\u662f\u524d\u9053\u5de5\u5e8f\u7684\u5fc5\u8981\u6b65\u9aa4\uff0c\u968f\u7740\u7cfb\u7edf\u7ea7LSI\u548c\u5148\u8fdbCMOS\u6570\u5b57\u7535\u8def<\/u>\u591a\u5c42\u5e03\u7ebf\u5316\u7684\u53d1\u5c55\u9700\u6c42\uff0c\u4f7f\u5f97CMP\u8fd9\u4e00\u8ba9\u7845\u7247\u8868\u9762\u53d8\u5e73\u6ed1\u7684\u6280\u672f\u4e0d\u53ef\u6216\u7f3a\u3002<\/p>\n \u5148\u8fdbLSI\u901a\u5e38\u4f1a\u662f\u628a\u5df2\u7ecf\u5b8c\u6210\u7535\u8def\u9a8c\u8bc1\u7684IP\u8fdb\u884c\u6574\u5408\uff0c\u5b8c\u6210\u903b\u8f91LSI\u7684\u8bbe\u8ba1\uff0c\u6240\u4ee5\u5fc5\u987b\u8981\u7528\u5e03\u7ebf\u8fde\u63a5\u5404\u79cd\u7535\u8def\u6a21\u5757\u3002\u8fd9\u6837\u7684\u5e03\u7ebf\u65b9\u6cd5\u5fc5\u5b9a\u662f\u591a\u5c42\u6b21\u7ed3\u6784\uff0c\u9700\u8981\u591a\u5c42\u5e03\u7ebf\uff0c\u4e3a\u4e86\u5b8c\u62103\u5c42\u53ca\u4ee5\u4e0a\u7684\u591a\u5c42\u5e03\u7ebf\uff0cCMP\u662f\u975e\u5e38\u6709\u5fc5\u8981\u7684\u3002<\/p>\n \u63d0\u95ee<\/p>\n 1.CMP\u8bbe\u5907\u662f\u600e\u6837\u7684\uff1f\u5982\u4f55\u5de5\u4f5c\u7684\uff1f<\/p>\n 2.CMP\u7684\u5e73\u5766\u5316\u673a\u7406\u662f\u4ec0\u4e48\uff1f<\/p>\n 3.\u53cc\u5927\u9a6c\u58eb\u9769\u7684\u6d41\u7a0b\u662f\u4ec0\u4e48\uff1f<\/p>\n \u540e\u9053\u5de5\u5e8f<\/strong><\/p>\n \u540e\u9053\u5de5\u5e8f\u662f\u5c06\u6676\u5706\u4e0a\u505a\u597d\u7684LSI\u82af\u7247\u5355\u72ec\u5207\u5272\u3001\u5c01\u88c5\u7684\u7ec4\u88c5\u52a0\u5de5\u6280\u672f\u3002<\/p>\n \u5373\u4f7f\u524d\u9053\u5de5\u5e8f\u505a\u5f97\u975e\u5e38\u8ba4\u771f\uff0c\u6700\u7ec8\u6676\u5706\u4e0a\u7684\u82af\u7247\u8fd8\u662f\u4f1a\u6709\u4e0d\u826f\u54c1\uff0c\u9700\u8981\u7ecf\u8fc7\u6676\u5706\u6d4b\u8bd5\u6765\u53bb\u9664\u3002\u6676\u5706\u6d4b\u8bd5\u4f7f\u7528\u79f0\u4e3a\u63a2\u9488\u53f0\uff08Prober\uff09\u7684\u8bbe\u5907\u6765\u5b8c\u6210\uff0c\u8bbe\u5907\u4e0a\u88c5\u6709\u63a2\u9488\u5361\uff0c\u63a2\u9488\u5361\u4e0a\u6709\u5f88\u591a\u5bfc\u7535\u7684\u63a2\u9488\u3002<\/p>\n 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