{"id":10403,"date":"2022-10-19T09:06:54","date_gmt":"2022-10-19T01:06:54","guid":{"rendered":"http:\/\/www.szryc.com\/?p=10403"},"modified":"2022-10-19T09:06:54","modified_gmt":"2022-10-19T01:06:54","slug":"%e5%85%89%e5%88%bb%e5%b7%a5%e8%89%ba%e7%9a%84%e5%9f%ba%e6%9c%ac%e6%ad%a5%e9%aa%a4","status":"publish","type":"post","link":"http:\/\/www.szryc.com\/?p=10403","title":{"rendered":"\u5149\u523b\u5de5\u827a\u7684\u57fa\u672c\u6b65\u9aa4"},"content":{"rendered":"

\u4f20\u7edf\u7684\u5149\u523b\u5de5\u827a\u662f\u76f8\u5bf9\u76ee\u524d\u5df2\u7ecf\u6216\u5c1a\u672a\u5e94\u7528\u4e8e\u96c6\u6210\u7535\u8def\u4ea7\u4e1a\u7684\u5148\u8fdb\u5149\u523b\u5de5\u827a\u800c\u8a00\u7684\uff0c\u666e\u904d\u8ba4\u4e3a 193nm \u6ce2\u957f\u7684 ArF \u6df1\u7d2b\u5916\u5149\u523b\u5de5\u827a\u662f\u5206\u6c34\u5cad\uff08\u89c1\u4e0b\u8868\uff09\u3002\u8fd9\u662f\u56e0\u4e3a 193nm \u7684\u5149\u523b\u4f9d\u9760\u6d78\u6ca1\u5f0f\u548c\u591a\u91cd\u66dd\u5149\u6280\u672f\u7684\u652f\u6491\uff0c\u53ef\u4ee5\u6ee1\u8db3\u4ece 0.13um\u81f37nm \u51719\u4e2a\u6280\u672f\u8282\u70b9\u7684\u5149\u523b\u9700\u8981\u3002<\/p>\n\n\n\n\n\n\n\n\n\n
\u5149\u6e90\u4e0e\u6ce2\u6bb5<\/td>\n\u5149\u6ce2\u957f<\/td>\n\u5e94\u7528\u6280\u672f\u8282\u70b9<\/td>\n<\/tr>\n
\u7d2b\u5916\u7ebf\uff08\u6c5e\u706f\uff09<\/td>\ng\u7ebf<\/td>\n436nm<\/td>\n0.5um\u4ee5\u4e0a<\/td>\n<\/tr>\n
i\u7ebf<\/td>\n365nm<\/td>\n0.35\uff5e0.25um<\/td>\n<\/tr>\n
\u6df1\u7d2b\u5916\u7ebf\uff08DUV\uff09<\/td>\nKrF<\/u><\/td>\n248nm<\/td>\n0.25\uff5e0.13um<\/td>\n<\/tr>\n
ArF<\/td>\n193nm<\/td>\n0.13um\uff5e7nm<\/td>\n<\/tr>\n
F2<\/td>\n157nm<\/td>\n\u65e0\u4ea7\u4e1a\u5316\u5e94\u7528<\/td>\n<\/tr>\n
\u7b49\u79bb\u5b50\u4f53\u6781\u7d2b\u5916\u7ebf<\/td>\n\u6781\u7d2b\u5916\u7ebf\uff08\u8f6fX\uff09<\/td>\n13.5nm<\/td>\n7nm\/5nm\u4ee5\u4e0b<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\u4e3a\u4e86\u5c06\u63a9\u6a21\u7248\uff08\u4e5f\u79f0\u63a9\u819c\u7248\uff09\u4e0a\u7684\u8bbe\u8ba1\u7ebf\u8def\u56fe\u5f62\u8f6c\u79fb\u5230\u7845\u7247 \u4e0a\uff0c\u9996\u5148\u9700\u8981\u901a\u8fc7\u66dd\u5149\u5de5\u827a\uff08\u4fd7\u79f0\u5149\u523b\uff09\u6765\u5b9e\u73b0\u8f6c\u79fb\uff0c\u7136\u540e\u901a\u8fc7\u523b\u8680\u5de5\u827a\u5f97\u5230\u7845\u56fe\u5f62\uff1a\u7531\u4e8e\u5149\u523b\u5de5\u827a\u533a\u7684\u7167\u660e\u91c7\u7528\u7684\u662f\u611f\u5149\u6750\u6599\u4e0d\u654f\u611f\u7684\u9ec4\u8272\u5149\u6e90\uff0c\u56e0\u6b64\u53c8\u79f0\u9ec4\u5149\u533a\u3002\u5149\u523b\u6280\u672f\u6700\u5148\u5e94\u7528\u4e8e\u5370\u5237\u884c\u4e1a\uff0c\u5e76\u4e14\u662f\u65e9\u671f\u5236\u9020\u00a0PCB<\/u>\u00a0\u7684\u4e3b\u8981\u6280\u672f\u3002<\/p>\n

\u81ea20\u4e16\u7eaa 50\u5e74\u4ee3\u8d77\uff0c\u5149\u523b\u6280\u672f\u9010\u6b65\u6210\u4e3a\u96c6\u6210\u7535\u8def\u82af\u7247\u5236\u9020\u4e2d\u56fe\u5f62\u8f6c\u79fb\u7684\u4e3b\u6d41\u6280\u672f\u3002\u5149\u523b\u5de5\u827a\u7684\u5173\u952e\u6307\u6807\u5305\u62ec\u5206\u8fa6\u7387\u3001\u7075\u654f\u5ea6\u3001\u5957\u51c6\u7cbe\u5ea6\u3001\u7f3a\u9677\u7387\u7b49\u3002\u5149\u523b\u5de5\u827a\u4e2d\u6700\u5173\u952e\u7684\u6750\u6599\u662f\u4f5c\u4e3a\u611f\u5149\u6750\u6599\u7684\u5149\u523b\u80f6\uff0c\u7531\u4e8e\u5149\u523b\u80f6\u7684\u654f\u611f\u6027\u4f9d\u8d56\u4e8e\u5149\u6e90\u6ce2\u957f\uff0c\u6240\u4ee5g\/i\u7ebf\u3001248nm KrF\u3001193nm ArF\u00a0\u7b49\u5149\u523b\u5de5\u827a\u9700\u8981\u91c7\u7528\u4e0d\u540c\u7684\u5149\u523b\u80f6\u6750\u6599\uff0c\u5982i\u7ebf\u5149\u523b\u80f6\u4e2d\u6700\u5e38\u89c1\u7684\u91cd\u6c2e\u837c\u918c(DNQ\uff09\u7ebf\u6027\u915a\u919b\u6811\u8102\u5c31\u4e0d\u9002\u7528\u4e8e 193nm \u5149\u523b\u5de5\u827a\u3002<\/p>\n

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\u5178\u578b\u7684\u5149\u523b\u5de5\u827a\u4e3b\u8981\u8fc7\u7a0b\u5305\u62ec8\u4e2a\u6b65\u9aa4\uff1a\u5e95\u819c\u51c6\u5907 \u4e00\u00a0\u6d82\u5149\u523b\u80f6 \u4e00\u00a0\u8f6f\u70d8 \u4e00\u00a0\u5bf9\u51c6\u548c\u66dd\u5149 \u4e00 \u66dd\u5149\u540e\u70d8 \u00a0\u2014 \u00a0\u663e\u5f71\u00a0\u4e00 \u575a\u819c \u4e00 \u663e\u5f71\u68c0\u6d4b<\/u>\u3002<\/p>\n

(1\uff09\u5e95\u819c\u51c6\u5907\uff1a\u4e3b\u8981\u662f\u6e05\u6d17\u548c\u8131\u6c34\u3002\u56e0\u4e3a\u4efb\u4f55\u6c61\u67d3\u7269\u90fd\u4f1a\u51cf\u5f31\u5149\u523b\u80f6\u4e0e\u7845\u7247\u4e4b\u95f4\u7684\u9644\u7740\u529b\uff0c\u6240\u4ee5\u5f7b\u5e95\u7684\u6e05\u6d17\u53ef\u4ee5\u63d0\u5347\u7845\u7247\u4e0e\u5149\u523b\u80f6\u4e4b\u95f4\u7684\u9ecf\u9644\u6027<\/p>\n

(2\uff09\u6d82\u5149\u523b\u80f6\uff1a\u901a\u8fc7\u65cb\u8f6c\u7845\u7247\u7684\u65b9\u5f0f\u5b9e\u73b0\u3002\u4e0d\u540c\u7684\u5149\u523b\u80f6\u8981\u6c42\u4e0d\u540c\u7684\u6d82\u80f6\u5de5\u827a\u53c2\u6570\uff0c\u5305\u62ec\u65cb\u8f6c\u901f\u5ea6\u3001\u80f6\u539a\u5ea6\u548c\u6e29\u5ea6\u7b49\u3002<\/p>\n

(3\uff09\u8f6f\u70d8\uff1a\u901a\u8fc7\u70d8\u70e4\u53ef\u4ee5\u63d0\u9ad8\u5149\u523b\u80f6\u4e0e\u7845\u7247\u7684\u9ecf\u9644\u6027\uff0c\u4ee5\u53ca\u5149\u523b\u80f6\u539a\u5ea6\u7684\u5747\u5300\u6027\uff0c\u4ee5\u5229\u4e8e\u540e\u7eed\u523b\u8680\u5de5\u827a\u7684\u51e0\u4f55\u5c3a\u5bf8\u7684\u7cbe\u5bc6\u63a7\u5236\u3002<\/p>\n

(4\uff09\u5bf9\u51c6\u548c\u66dd\u5149 (Alignment and Exposure)\uff1a\u8fd9\u662f\u5149\u523b\u5de5\u827a\u4e2d\u6700\u91cd\u8981\u7684\u73af\u8282\uff0c\u662f\u6307\u5c06\u63a9\u6a21\u7248\u56fe\u5f62\u4e0e\u7845\u7247\u5df2\u6709\u56fe\u5f62\uff08\u6216\u79f0\u524d\u5c42\u56fe\u5f62\uff09\u5bf9\u51c6\uff0c\u7136\u540e\u7528\u7279\u5b9a\u7684\u5149\u7167\u5c04\uff0c\u5149\u80fd\u6fc0\u6d3b\u5149\u523b\u80f6\u4e2d\u7684\u5149\u654f\u6210\u5206\uff0c\u4ece\u800c\u5c06\u63a9\u6a21\u7248\u56fe\u5f62\u8f6c\u79fb\u5230\u5149\u523b\u80f6\u4e0a\u3002\u5bf9\u51c6\u548c\u66dd\u5149\u6240\u7528\u7684\u8bbe\u5907\u4e3a\u5149\u523b\u673a\uff0c\u5b83\u662f\u6574\u4e2a\u96c6\u6210\u7535\u8def\u5236\u9020\u5de5\u827a\u4e2d\u5355\u53f0\u4ef7\u683c\u6700\u9ad8\u7684\u5de5\u827a\u8bbe\u5907\u3002\u5149\u523b\u673a\u7684\u6280\u672f\u6c34\u5e73\u4ee3\u8868\u4e86\u6574\u6761\u751f\u4ea7\u7ebf\u7684\u5148\u8fdb\u7a0b\u5ea6\u3002<\/p>\n

(5\uff09 \u66dd\u5149\u540e\u70d8\u70e4 (Post Exposure Bake, PEB)\uff1a\u5373\u66dd\u5149\u540e\u8fdb\u884c\u77ed\u65f6\u95f4\u7684\u70d8\u70e4\u5904\u7406\uff0c\u5176\u4f5c\u7528\u4e0e\u5728\u6df1\u7d2b\u5916\u5149\u523b\u80f6\u548c\u5e38\u89c4 i-\u7ebf\u5149\u523b\u80f6\u4e2d\u7684\u4f5c\u7528\u6709\u6240\u4e0d\u540c\u3002\u5bf9\u4e8e\u6df1\u7d2b\u5916\u5149\u523b\u80f6\uff0c\u66dd\u5149\u53ca\u540e\u70d8\u53bb\u9664\u4e86\u5149\u523b\u80f6\u4e2d\u7684\u4fdd\u62a4\u6210\u5206\uff0c\u4f7f\u5f97\u5149\u523b\u80f6\u80fd\u6eb6\u89e3\u4e8e\u663e\u5f71\u6db2\uff0c\u56e0\u6b64\u66dd\u5149\u540e\u70d8\u662f\u5fc5\u987b\u8fdb\u884c\u7684\uff1b\u5bf9\u4e8e\u5e38\u89c4 i-\u7ebf\u5149\u523b\u80f6\uff0c\u540e\u70d8\u53ef\u63d0\u9ad8\u5149\u523b\u80f6\u7684\u9ecf\u9644\u6027\u5e76\u51cf\u5c11\u9a7b\u6ce2\uff08\u9a7b\u6ce2\u5bf9\u5149\u523b\u80f6\u8fb9\u7f18\u5f62\u8c8c\u4f1a\u6709\u4e0d\u826f\u5f71\u54cd\uff09\u3002<\/p>\n

(6) \u00a0 \u663e\u5f71(Development)\uff1a\u5373\u7528\u663e\u5f71\u6db2\u6eb6\u89e3\u66dd\u5149\u540e\u7684\u5149\u523b\u80f6\u53ef\u6eb6\u89e3\u90e8\u5206(\u6b63\u5149\u523b\u80f6)\uff0c\u5c06\u63a9\u6a21\u7248\u56fe\u5f62\u51c6\u786e\u5730\u7528\u5149\u523b\u80f6\u56fe\u5f62\u663e\u73b0\u51fa\u6765\u3002\u663e\u5f71\u5de5\u827a\u7684\u5173\u952e\u53c2\u6570\u5305\u62ec\u663e\u5f71\u6e29\u5ea6\u548c\u65f6\u95f4\u3001\u663e\u5f71\u6db2\u7528\u91cf\u548c\u6d53\u5ea6\u3001\u6e05\u6d17\u7b49\uff0c\u901a\u8fc7\u8c03\u6574\u663e\u5f71\u4e2d\u7684\u76f8\u5173\u53c2\u6570\u53ef\u63d0\u9ad8\u66dd\u5149\u4e0e\u672a\u66dd\u5149\u90e8\u5206\u5149\u523b\u80f6\u7684\u6eb6\u89e3\u901f\u7387\u5dee\uff0c\u4ece\u800c\u83b7\u5f97\u6240\u9700\u7684\u663e\u5f71\u6548\u679c\u3002<\/p>\n

(7\uff09\u575a\u819c(Hard Bake)\uff1a\u53c8\u79f0\u575a\u819c\u70d8\u7119\uff0c\u662f\u5c06\u663e\u5f71\u540e\u7684\u5149\u523b\u80f6\u4e2d\u5269\u4f59\u7684\u6eb6\u5242\u3001\u663e\u5f71\u6db2\u3001\u6c34\u53ca\u5176\u4ed6\u4e0d\u5fc5\u8981\u7684\u6b8b\u7559\u6210\u5206\u901a\u8fc7\u52a0\u70ed\u84b8\u53d1\u53bb\u9664\uff0c\u4ee5\u63d0\u9ad8\u5149\u523b\u80f6\u4e0e\u7845\u886c\u5e95\u7684\u9ecf\u9644\u6027\u53ca\u5149\u523b\u80f6\u7684\u6297\u523b\u8680\u80fd\u529b\u3002\u575a\u819c\u8fc7\u7a0b\u7684\u6e29\u5ea6\u89c6\u5149\u523b\u80f6\u7684\u4e0d\u540c\u53ca\u575a\u819c\u65b9\u6cd5\u7684\u4e0d\u540c\u800c\u6709\u6240\u4e0d\u540c\uff0c\u4ee5\u5149\u523b\u80f6\u56fe\u5f62\u4e0d\u53d1\u751f\u5f62\u53d8\u4e3a\u524d\u63d0\uff0c\u5e76\u5e94\u4f7f\u5149\u523b\u80f6\u53d8\u5f97\u8db3\u591f\u575a\u786c\u3002<\/p>\n

(8\uff09\u663e\u5f71\u68c0\u6d4b ( Afte<\/u>r Development Inspec<\/u>TI<\/u>on,\u00a0ADI<\/u>)\uff1a\u5373\u68c0\u67e5\u663e\u5f71\u540e\u5149\u523b\u80f6\u56fe\u5f62\u7684\u7f3a\u9677\u3002\u901a\u5e38\u5229\u7528\u56fe\u50cf\u8bc6\u522b\u6280\u672f\uff0c\u81ea\u52a8\u626b\u63cf\u663e\u5f71\u540e\u7684\u82af\u7247\u56fe\u5f62\uff0c\u4e0e\u9884\u5b58\u7684\u65e0\u7f3a\u9677\u6807\u51c6\u56fe\u5f62\u8fdb\u884c\u6bd4\u5bf9\uff0c\u82e5\u53d1\u73b0\u6709\u4e0d\u540c\u4e4b\u5904\uff0c\u5c31\u89c6\u4e3a\u5b58\u5728\u7f3a\u9677\u3002\u5982\u679c\u7f3a\u9677\u8d85\u8fc7\u4e00\u5b9a\u7684\u6570\u91cf\uff0c\u5219\u8be5\u7845\u7247\u88ab\u5224\u5b9a\u672a\u901a\u8fc7\u663e\u5f71\u68c0\u6d4b\uff0c\u89c6\u60c5\u51b5\u53ef\u5bf9\u8be5\u7845\u7247\u8fdb\u884c\u62a5\u5e9f\u6216\u8fd4\u5de5\u5904\u7406\u3002\u5728\u96c6\u6210\u7535\u8def\u5236\u9020\u8fc7\u7a0b\u4e2d\uff0c\u7edd\u5927\u591a\u6570\u5de5\u827a\u90fd\u662f\u4e0d\u53ef\u9006\u7684\uff0c\u800c\u5149\u523b\u662f\u6781\u5c11\u6570\u53ef\u8fdb\u884c\u8fd4\u5de5\uff08Rework\uff09\u7684\u4e00\u9053\u5de5\u5e8f\u3002<\/p>\n

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